JPS646046U - - Google Patents

Info

Publication number
JPS646046U
JPS646046U JP10007587U JP10007587U JPS646046U JP S646046 U JPS646046 U JP S646046U JP 10007587 U JP10007587 U JP 10007587U JP 10007587 U JP10007587 U JP 10007587U JP S646046 U JPS646046 U JP S646046U
Authority
JP
Japan
Prior art keywords
wafer
cassette
transport mechanism
vacuum suction
tweezers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10007587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10007587U priority Critical patent/JPS646046U/ja
Publication of JPS646046U publication Critical patent/JPS646046U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP10007587U 1987-07-01 1987-07-01 Pending JPS646046U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10007587U JPS646046U (enrdf_load_stackoverflow) 1987-07-01 1987-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10007587U JPS646046U (enrdf_load_stackoverflow) 1987-07-01 1987-07-01

Publications (1)

Publication Number Publication Date
JPS646046U true JPS646046U (enrdf_load_stackoverflow) 1989-01-13

Family

ID=31327822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10007587U Pending JPS646046U (enrdf_load_stackoverflow) 1987-07-01 1987-07-01

Country Status (1)

Country Link
JP (1) JPS646046U (enrdf_load_stackoverflow)

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