JPH0534108Y2 - - Google Patents

Info

Publication number
JPH0534108Y2
JPH0534108Y2 JP1987038492U JP3849287U JPH0534108Y2 JP H0534108 Y2 JPH0534108 Y2 JP H0534108Y2 JP 1987038492 U JP1987038492 U JP 1987038492U JP 3849287 U JP3849287 U JP 3849287U JP H0534108 Y2 JPH0534108 Y2 JP H0534108Y2
Authority
JP
Japan
Prior art keywords
cassette
wafers
foreign matter
wafer
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987038492U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63147811U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987038492U priority Critical patent/JPH0534108Y2/ja
Publication of JPS63147811U publication Critical patent/JPS63147811U/ja
Application granted granted Critical
Publication of JPH0534108Y2 publication Critical patent/JPH0534108Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Drying Of Semiconductors (AREA)
JP1987038492U 1987-03-18 1987-03-18 Expired - Lifetime JPH0534108Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987038492U JPH0534108Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987038492U JPH0534108Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Publications (2)

Publication Number Publication Date
JPS63147811U JPS63147811U (enrdf_load_stackoverflow) 1988-09-29
JPH0534108Y2 true JPH0534108Y2 (enrdf_load_stackoverflow) 1993-08-30

Family

ID=30850792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987038492U Expired - Lifetime JPH0534108Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPH0534108Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2814864B2 (ja) * 1992-12-24 1998-10-27 日新電機株式会社 エアーロック室、イオン注入装置、並びに、エアーロック室のクリーニング方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972739A (ja) * 1982-10-20 1984-04-24 Hitachi Ltd 真空処理装置
JPS59117108A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 気相成長装置
JPS61111524A (ja) * 1984-11-06 1986-05-29 Denkoo:Kk 縦形半導体熱処理炉
JPS6173334A (ja) * 1984-09-19 1986-04-15 Hitachi Ltd 処理装置

Also Published As

Publication number Publication date
JPS63147811U (enrdf_load_stackoverflow) 1988-09-29

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