JPH02108329U - - Google Patents
Info
- Publication number
- JPH02108329U JPH02108329U JP1572189U JP1572189U JPH02108329U JP H02108329 U JPH02108329 U JP H02108329U JP 1572189 U JP1572189 U JP 1572189U JP 1572189 U JP1572189 U JP 1572189U JP H02108329 U JPH02108329 U JP H02108329U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- transporting
- workpieces
- processed
- diagram showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Description
第１図は本考案の原理説明図、第２図は本考案
の実施例を示す図、第３図は本考案の実施例の制
御系を示す図、第４図は従来の電子ビーム露光装
置を示す図、第５図は従来の処理物体搬送用カセ
ツトの交換機を持つ電子ビーム露光装置を示す図
、第６図は従来の処理物体搬送用カセツトを示す
図、第７図は大きさ、形状の異なる被処理物体に
対応する処理物体搬送用カセツトの３例を示す図
である。
図において、３はＸＹステージ、４は被処理物
体、５は処理物体搬送用カセツト、７は露光室、
８は被処理物体着脱部、９はイン側キヤリア、１
０はロードロツク及び処理物体搬送用カセツト交
換部、１１はアウト側キヤリア、１２は処理物体
搬送用カセツト搬送アーム、２０はカセツトスト
ツカー、２１は露光制御部ＣＰＵ、２２は被処理
物体交換制御部、２３は基板処理装置、２４はキ
ヤリア検知センサ、を示す。
Fig. 1 is a diagram explaining the principle of the present invention, Fig. 2 is a diagram showing an embodiment of the invention, Fig. 3 is a diagram showing a control system of the embodiment of the invention, and Fig. 4 is a conventional electron beam exposure apparatus. 5 is a diagram showing an electron beam exposure apparatus having a conventional exchanger for a cassette for transporting processing objects, FIG. 6 is a diagram showing a conventional cassette for transporting processing objects, and FIG. 7 is a diagram showing the size and shape. FIG. 3 is a diagram showing three examples of processing object transport cassettes corresponding to different processing objects. In the figure, 3 is an XY stage, 4 is an object to be processed, 5 is a cassette for transporting the object to be processed, 7 is an exposure chamber,
8 is a processing object attachment/detachment part, 9 is an inside carrier, 1
0 is a load lock and a cassette exchange unit for transporting the processing object, 11 is an outside carrier, 12 is a cassette transport arm for transporting the processing object, 20 is a cassette stocker, 21 is an exposure control unit CPU, 22 is a processing object exchange control unit, Reference numeral 23 indicates a substrate processing apparatus, and reference numeral 24 indicates a carrier detection sensor.
Claims (1)
する装置において、 被処理物体４を装着し処理室まで搬送するため
の、異なる複数種類の処理物体搬送用カセツト５
を複数個有するカセツトストツカー２０を持ち、
各種被処理物体４の一枚毎にそれぞれ適応するカ
セツト５を前記カセツトストツカー２０から選択
し、被処理物体４を装着して処理室に搬送するこ
とを特徴とする基板処理装置。[Claims for Utility Model Registration] In an apparatus that successively processes workpieces of different sizes and shapes, a cassette 5 for transporting a plurality of different types of workpieces for loading workpieces 4 and transporting them to a processing chamber.
has a cassette stocker 20 having a plurality of
A substrate processing apparatus characterized in that a cassette 5 suitable for each of various objects 4 to be processed is selected from the cassette stocker 20, the objects 4 to be processed are mounted thereon, and the cassettes 5 are transported to a processing chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015721U JPH0731539Y2 (en) | 1989-02-15 | 1989-02-15 | Substrate processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015721U JPH0731539Y2 (en) | 1989-02-15 | 1989-02-15 | Substrate processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02108329U true JPH02108329U (en) | 1990-08-29 |
| JPH0731539Y2 JPH0731539Y2 (en) | 1995-07-19 |
Family
ID=31228013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989015721U Expired - Lifetime JPH0731539Y2 (en) | 1989-02-15 | 1989-02-15 | Substrate processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731539Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011128646A (en) * | 2011-02-07 | 2011-06-30 | Canon Inc | Aligner and method for manufacturing device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012100929A1 (en) | 2012-02-06 | 2013-08-08 | Roth & Rau Ag | Substrate processing system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS629643A (en) * | 1985-07-08 | 1987-01-17 | Nippon Kogaku Kk <Nikon> | Substrate carrier system |
| JPS62169327A (en) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | Substrate exchange apparatus |
-
1989
- 1989-02-15 JP JP1989015721U patent/JPH0731539Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS629643A (en) * | 1985-07-08 | 1987-01-17 | Nippon Kogaku Kk <Nikon> | Substrate carrier system |
| JPS62169327A (en) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | Substrate exchange apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011128646A (en) * | 2011-02-07 | 2011-06-30 | Canon Inc | Aligner and method for manufacturing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731539Y2 (en) | 1995-07-19 |
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