JPH0128509B2 - - Google Patents
Info
- Publication number
- JPH0128509B2 JPH0128509B2 JP56204520A JP20452081A JPH0128509B2 JP H0128509 B2 JPH0128509 B2 JP H0128509B2 JP 56204520 A JP56204520 A JP 56204520A JP 20452081 A JP20452081 A JP 20452081A JP H0128509 B2 JPH0128509 B2 JP H0128509B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductive layer
- semiconductor substrate
- impurities
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P76/40—
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56204520A JPS58106865A (ja) | 1981-12-19 | 1981-12-19 | 半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56204520A JPS58106865A (ja) | 1981-12-19 | 1981-12-19 | 半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58106865A JPS58106865A (ja) | 1983-06-25 |
| JPH0128509B2 true JPH0128509B2 (OSRAM) | 1989-06-02 |
Family
ID=16491886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56204520A Granted JPS58106865A (ja) | 1981-12-19 | 1981-12-19 | 半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58106865A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0116654B1 (de) * | 1983-02-12 | 1986-12-10 | Deutsche ITT Industries GmbH | Verfahren zum Herstellen von bipolaren Planartransistoren |
| JPS63114261A (ja) * | 1986-09-11 | 1988-05-19 | フェアチャイルド セミコンダクタ コーポレーション | トランジスタ用の自己整合型ベース分路 |
| JPH01119064A (ja) * | 1987-10-31 | 1989-05-11 | Nec Yamagata Ltd | 半導体装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53141591A (en) * | 1977-05-16 | 1978-12-09 | Nec Corp | Manufacture of semiconductor device |
| JPS5515231A (en) * | 1978-07-19 | 1980-02-02 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing method of semiconductor device |
| JPS5627965A (en) * | 1979-08-15 | 1981-03-18 | Nec Corp | Manufacture of semiconductor device |
-
1981
- 1981-12-19 JP JP56204520A patent/JPS58106865A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58106865A (ja) | 1983-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3841598B2 (ja) | 半導体素子の製造方法 | |
| JP3175700B2 (ja) | メタルゲート電界効果トランジスタの製造方法 | |
| JPH0123954B2 (OSRAM) | ||
| US5610424A (en) | Metal oxide semiconductor field effect transistor | |
| JP3000739B2 (ja) | 縦型mos電界効果トランジスタおよびその製造方法 | |
| JPH0128509B2 (OSRAM) | ||
| JPS60217657A (ja) | 半導体集積回路装置の製造方法 | |
| JPH05283687A (ja) | 半導体素子の製造方法 | |
| US5620911A (en) | Method for fabricating a metal field effect transistor having a recessed gate | |
| JPS6245071A (ja) | 半導体装置の製造方法 | |
| JP2968548B2 (ja) | 半導体装置及びその製造方法 | |
| JPH0878685A (ja) | Soi−mosfetとその製造方法 | |
| JPH11330090A (ja) | 縦型二重拡散mosfetおよびその製造方法 | |
| JPH01125977A (ja) | Mos型半導体装置 | |
| JPH06204456A (ja) | 半導体装置 | |
| JPH0517713B2 (OSRAM) | ||
| KR960002083B1 (ko) | 모스 페트 제조 방법 | |
| KR0135670B1 (ko) | 반도체 소자의 제조방법 | |
| JPS61166154A (ja) | Mis型半導体装置の製造方法 | |
| JPH02126645A (ja) | Mis型電界効果トランジスタの製造方法 | |
| JPH04137735A (ja) | 半導体装置およびその製造方法 | |
| JPS6367778A (ja) | 半導体装置の製造方法 | |
| JPH0548103A (ja) | 半導体装置の製造方法 | |
| JPH0851200A (ja) | 半導体装置の製造方法 | |
| JPS6292450A (ja) | 半導体装置の製造方法 |