JPH01152775A - ジョセフソン接合素子のパターン形成方法 - Google Patents

ジョセフソン接合素子のパターン形成方法

Info

Publication number
JPH01152775A
JPH01152775A JP62311095A JP31109587A JPH01152775A JP H01152775 A JPH01152775 A JP H01152775A JP 62311095 A JP62311095 A JP 62311095A JP 31109587 A JP31109587 A JP 31109587A JP H01152775 A JPH01152775 A JP H01152775A
Authority
JP
Japan
Prior art keywords
film
pattern
lower electrode
upper electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62311095A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530310B2 (enrdf_load_html_response
Inventor
Koji Yamada
宏治 山田
Shinichiro Yano
振一郎 矢野
Hiroyuki Mori
博之 森
Yoshinobu Taruya
良信 樽谷
Mikio Hirano
幹夫 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62311095A priority Critical patent/JPH01152775A/ja
Publication of JPH01152775A publication Critical patent/JPH01152775A/ja
Publication of JPH0530310B2 publication Critical patent/JPH0530310B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62311095A 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法 Granted JPH01152775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62311095A JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62311095A JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Publications (2)

Publication Number Publication Date
JPH01152775A true JPH01152775A (ja) 1989-06-15
JPH0530310B2 JPH0530310B2 (enrdf_load_html_response) 1993-05-07

Family

ID=18013074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62311095A Granted JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Country Status (1)

Country Link
JP (1) JPH01152775A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009111306A (ja) * 2007-11-01 2009-05-21 Hitachi Ltd ジョセフソン接合を備えた電子デバイスとその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176983A (ja) * 1982-04-12 1983-10-17 Agency Of Ind Science & Technol ジヨセフソン接合素子の作成方法
JPS6233483A (ja) * 1985-08-07 1987-02-13 Agency Of Ind Science & Technol 超電導集積回路

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176983A (ja) * 1982-04-12 1983-10-17 Agency Of Ind Science & Technol ジヨセフソン接合素子の作成方法
JPS6233483A (ja) * 1985-08-07 1987-02-13 Agency Of Ind Science & Technol 超電導集積回路

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009111306A (ja) * 2007-11-01 2009-05-21 Hitachi Ltd ジョセフソン接合を備えた電子デバイスとその製造方法

Also Published As

Publication number Publication date
JPH0530310B2 (enrdf_load_html_response) 1993-05-07

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Legal Events

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