JPH0530310B2 - - Google Patents

Info

Publication number
JPH0530310B2
JPH0530310B2 JP62311095A JP31109587A JPH0530310B2 JP H0530310 B2 JPH0530310 B2 JP H0530310B2 JP 62311095 A JP62311095 A JP 62311095A JP 31109587 A JP31109587 A JP 31109587A JP H0530310 B2 JPH0530310 B2 JP H0530310B2
Authority
JP
Japan
Prior art keywords
film
pattern
lower electrode
alo
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62311095A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01152775A (ja
Inventor
Koji Yamada
Shinichiro Yano
Hiroyuki Mori
Yoshinobu Taruya
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62311095A priority Critical patent/JPH01152775A/ja
Publication of JPH01152775A publication Critical patent/JPH01152775A/ja
Publication of JPH0530310B2 publication Critical patent/JPH0530310B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62311095A 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法 Granted JPH01152775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62311095A JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62311095A JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Publications (2)

Publication Number Publication Date
JPH01152775A JPH01152775A (ja) 1989-06-15
JPH0530310B2 true JPH0530310B2 (enrdf_load_html_response) 1993-05-07

Family

ID=18013074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62311095A Granted JPH01152775A (ja) 1987-12-10 1987-12-10 ジョセフソン接合素子のパターン形成方法

Country Status (1)

Country Link
JP (1) JPH01152775A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009111306A (ja) * 2007-11-01 2009-05-21 Hitachi Ltd ジョセフソン接合を備えた電子デバイスとその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176983A (ja) * 1982-04-12 1983-10-17 Agency Of Ind Science & Technol ジヨセフソン接合素子の作成方法
JPS6233483A (ja) * 1985-08-07 1987-02-13 Agency Of Ind Science & Technol 超電導集積回路

Also Published As

Publication number Publication date
JPH01152775A (ja) 1989-06-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term