JPH0114714B2 - - Google Patents

Info

Publication number
JPH0114714B2
JPH0114714B2 JP58203195A JP20319583A JPH0114714B2 JP H0114714 B2 JPH0114714 B2 JP H0114714B2 JP 58203195 A JP58203195 A JP 58203195A JP 20319583 A JP20319583 A JP 20319583A JP H0114714 B2 JPH0114714 B2 JP H0114714B2
Authority
JP
Japan
Prior art keywords
resistance
cantilever
layer
diffused
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58203195A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6094758A (ja
Inventor
Akinobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EASTERN STEEL
Original Assignee
EASTERN STEEL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EASTERN STEEL filed Critical EASTERN STEEL
Priority to JP58203195A priority Critical patent/JPS6094758A/ja
Publication of JPS6094758A publication Critical patent/JPS6094758A/ja
Publication of JPH0114714B2 publication Critical patent/JPH0114714B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP58203195A 1983-10-28 1983-10-28 抵抗調整装置とその製造方法 Granted JPS6094758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58203195A JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58203195A JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Publications (2)

Publication Number Publication Date
JPS6094758A JPS6094758A (ja) 1985-05-27
JPH0114714B2 true JPH0114714B2 (enExample) 1989-03-14

Family

ID=16470034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58203195A Granted JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Country Status (1)

Country Link
JP (1) JPS6094758A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537287A (ja) * 1990-01-03 1993-02-12 Motorola Inc 超高周波発振器／共振器

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3323343B2 (ja) * 1994-04-01 2002-09-09 日本碍子株式会社 センサ素子及び粒子センサ
JP3299131B2 (ja) * 1996-05-16 2002-07-08 日本碍子株式会社 粒子センサ
KR100849466B1 (ko) 2007-01-31 2008-07-30 포항공과대학교 산학협력단 미세 압전 외팔보 센서 및 이를 위한 발진회로

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537287A (ja) * 1990-01-03 1993-02-12 Motorola Inc 超高周波発振器／共振器

Also Published As

Publication number Publication date
JPS6094758A (ja) 1985-05-27

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