JPS6094758A - 抵抗調整装置とその製造方法 - Google Patents

抵抗調整装置とその製造方法

Info

Publication number
JPS6094758A
JPS6094758A JP58203195A JP20319583A JPS6094758A JP S6094758 A JPS6094758 A JP S6094758A JP 58203195 A JP58203195 A JP 58203195A JP 20319583 A JP20319583 A JP 20319583A JP S6094758 A JPS6094758 A JP S6094758A
Authority
JP
Japan
Prior art keywords
cantilever
resistance
diffused
layer
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58203195A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114714B2 (enExample
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP58203195A priority Critical patent/JPS6094758A/ja
Publication of JPS6094758A publication Critical patent/JPS6094758A/ja
Publication of JPH0114714B2 publication Critical patent/JPH0114714B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP58203195A 1983-10-28 1983-10-28 抵抗調整装置とその製造方法 Granted JPS6094758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58203195A JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58203195A JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Publications (2)

Publication Number Publication Date
JPS6094758A true JPS6094758A (ja) 1985-05-27
JPH0114714B2 JPH0114714B2 (enExample) 1989-03-14

Family

ID=16470034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58203195A Granted JPS6094758A (ja) 1983-10-28 1983-10-28 抵抗調整装置とその製造方法

Country Status (1)

Country Link
JP (1) JPS6094758A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301594A (ja) * 1994-04-01 1995-11-14 Ngk Insulators Ltd センサ素子及び粒子センサ
JPH1030981A (ja) * 1996-05-16 1998-02-03 Ngk Insulators Ltd 粒子センサ
KR100849466B1 (ko) 2007-01-31 2008-07-30 포항공과대학교 산학협력단 미세 압전 외팔보 센서 및 이를 위한 발진회로

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5023503A (en) * 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301594A (ja) * 1994-04-01 1995-11-14 Ngk Insulators Ltd センサ素子及び粒子センサ
JPH1030981A (ja) * 1996-05-16 1998-02-03 Ngk Insulators Ltd 粒子センサ
KR100849466B1 (ko) 2007-01-31 2008-07-30 포항공과대학교 산학협력단 미세 압전 외팔보 센서 및 이를 위한 발진회로

Also Published As

Publication number Publication date
JPH0114714B2 (enExample) 1989-03-14

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