JP7719087B2 - 半導体装置の駆動方法 - Google Patents

半導体装置の駆動方法

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Publication number
JP7719087B2
JP7719087B2 JP2022551440A JP2022551440A JP7719087B2 JP 7719087 B2 JP7719087 B2 JP 7719087B2 JP 2022551440 A JP2022551440 A JP 2022551440A JP 2022551440 A JP2022551440 A JP 2022551440A JP 7719087 B2 JP7719087 B2 JP 7719087B2
Authority
JP
Japan
Prior art keywords
insulator
transistor
oxide
conductor
memory cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022551440A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022064308A5 (https=
JPWO2022064308A1 (https=
Inventor
佑樹 岡本
達也 大貫
隆徳 松嵜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of JPWO2022064308A1 publication Critical patent/JPWO2022064308A1/ja
Publication of JPWO2022064308A5 publication Critical patent/JPWO2022064308A5/ja
Priority to JP2025123748A priority Critical patent/JP2025146893A/ja
Application granted granted Critical
Publication of JP7719087B2 publication Critical patent/JP7719087B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/225Auxiliary circuits
    • G11C11/2253Address circuits or decoders
    • G11C11/2257Word-line or row circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/221Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements using ferroelectric capacitors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/225Auxiliary circuits
    • G11C11/2259Cell access
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/225Auxiliary circuits
    • G11C11/2273Reading or sensing circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/225Auxiliary circuits
    • G11C11/2275Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/225Auxiliary circuits
    • G11C11/2293Timing circuits or methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Dram (AREA)
  • Thin Film Transistor (AREA)
JP2022551440A 2020-09-22 2021-09-09 半導体装置の駆動方法 Active JP7719087B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025123748A JP2025146893A (ja) 2020-09-22 2025-07-24 半導体装置の駆動方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020158038 2020-09-22
JP2020158038 2020-09-22
PCT/IB2021/058181 WO2022064308A1 (ja) 2020-09-22 2021-09-09 半導体装置の駆動方法

Related Child Applications (1)

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JP2025123748A Division JP2025146893A (ja) 2020-09-22 2025-07-24 半導体装置の駆動方法

Publications (3)

Publication Number Publication Date
JPWO2022064308A1 JPWO2022064308A1 (https=) 2022-03-31
JPWO2022064308A5 JPWO2022064308A5 (https=) 2024-09-17
JP7719087B2 true JP7719087B2 (ja) 2025-08-05

Family

ID=80846275

Family Applications (2)

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JP2022551440A Active JP7719087B2 (ja) 2020-09-22 2021-09-09 半導体装置の駆動方法
JP2025123748A Pending JP2025146893A (ja) 2020-09-22 2025-07-24 半導体装置の駆動方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025123748A Pending JP2025146893A (ja) 2020-09-22 2025-07-24 半導体装置の駆動方法

Country Status (5)

Country Link
US (1) US12437793B2 (https=)
JP (2) JP7719087B2 (https=)
KR (1) KR20230069128A (https=)
CN (1) CN116114018A (https=)
WO (1) WO2022064308A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116018644A (zh) * 2020-09-06 2023-04-25 株式会社半导体能源研究所 半导体装置及电子设备
WO2024194725A1 (ja) * 2023-03-17 2024-09-26 株式会社半導体エネルギー研究所 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008135136A (ja) 2006-11-29 2008-06-12 Fujitsu Ltd 強誘電体メモリおよび強誘電体メモリの動作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519234A (en) 1991-02-25 1996-05-21 Symetrix Corporation Ferroelectric dielectric memory cell can switch at least giga cycles and has low fatigue - has high dielectric constant and low leakage current
JP3191550B2 (ja) 1994-02-15 2001-07-23 松下電器産業株式会社 半導体メモリ装置
JP2692610B2 (ja) 1994-09-28 1997-12-17 日本電気株式会社 半導体不揮発性メモリセル及びその動作方法
JPH08273373A (ja) 1995-03-30 1996-10-18 Yamaha Corp 半導体記憶装置とその動作方法
JP3188179B2 (ja) 1995-09-26 2001-07-16 シャープ株式会社 強誘電体薄膜素子の製造方法及び強誘電体メモリ素子の製造方法
JP2939973B2 (ja) 1996-06-06 1999-08-25 日本電気株式会社 不揮発性半導体メモリ装置の駆動方法
JP4256670B2 (ja) 2002-12-10 2009-04-22 富士通株式会社 容量素子、半導体装置およびその製造方法
JP4652087B2 (ja) 2004-03-11 2011-03-16 株式会社半導体エネルギー研究所 半導体装置
JP4114659B2 (ja) * 2004-11-26 2008-07-09 セイコーエプソン株式会社 強誘電体メモリ及びその駆動方法
US7928910B2 (en) 2005-03-31 2011-04-19 Semiconductor Energy Laboratory Co., Ltd. Wireless chip and electronic device having wireless chip
CN102742003B (zh) 2010-01-15 2015-01-28 株式会社半导体能源研究所 半导体器件
JP6258672B2 (ja) 2013-11-21 2018-01-10 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US9685216B2 (en) * 2015-01-24 2017-06-20 Fudan University Non-destructive readout ferroelectric memory as well as method of preparing the same and method of operating the same
US11121139B2 (en) * 2017-11-16 2021-09-14 International Business Machines Corporation Hafnium oxide and zirconium oxide based ferroelectric devices with textured iridium bottom electrodes
US11171115B2 (en) 2019-03-18 2021-11-09 Kepler Computing Inc. Artificial intelligence processor with three-dimensional stacked memory
US11296708B2 (en) 2019-12-27 2022-04-05 Kepler Computing, Inc. Low power ferroelectric based majority logic gate adder
US11996131B2 (en) * 2022-01-04 2024-05-28 Ferroelectric Memory Gmbh Preconditioning operation for a memory cell with a spontaneously-polarizable memory element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008135136A (ja) 2006-11-29 2008-06-12 Fujitsu Ltd 強誘電体メモリおよび強誘電体メモリの動作方法

Also Published As

Publication number Publication date
KR20230069128A (ko) 2023-05-18
WO2022064308A1 (ja) 2022-03-31
JP2025146893A (ja) 2025-10-03
US12437793B2 (en) 2025-10-07
JPWO2022064308A1 (https=) 2022-03-31
US20240029773A1 (en) 2024-01-25
CN116114018A (zh) 2023-05-12

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