JP7619943B2 - 撮像装置 - Google Patents

撮像装置 Download PDF

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Publication number
JP7619943B2
JP7619943B2 JP2021527782A JP2021527782A JP7619943B2 JP 7619943 B2 JP7619943 B2 JP 7619943B2 JP 2021527782 A JP2021527782 A JP 2021527782A JP 2021527782 A JP2021527782 A JP 2021527782A JP 7619943 B2 JP7619943 B2 JP 7619943B2
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Prior art keywords
substrate
wiring
pixel
imaging device
transistor
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Japanese (ja)
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JPWO2020262629A1 (https=
Inventor
健芳 河本
正彦 中溝
俊明 小野
知憲 山下
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Sony Semiconductor Solutions Corp
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Sony Semiconductor Solutions Corp
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/79—Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/78—Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/018—Manufacture or treatment of image sensors covered by group H10F39/12 of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/813—Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/423—Shielding layers

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2021527782A 2019-06-26 2020-06-26 撮像装置 Active JP7619943B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019119099 2019-06-26
JP2019119099 2019-06-26
PCT/JP2020/025285 WO2020262629A1 (ja) 2019-06-26 2020-06-26 撮像装置

Publications (2)

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JPWO2020262629A1 JPWO2020262629A1 (https=) 2020-12-30
JP7619943B2 true JP7619943B2 (ja) 2025-01-22

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US (3) US11901391B2 (https=)
EP (1) EP3993011A4 (https=)
JP (1) JP7619943B2 (https=)
KR (2) KR102805550B1 (https=)
CN (2) CN119451260A (https=)
TW (2) TWI861140B (https=)
WO (1) WO2020262629A1 (https=)

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TWI861140B (zh) 2019-06-26 2024-11-11 日商索尼半導體解決方案公司 攝像裝置
JP7427646B2 (ja) * 2021-12-07 2024-02-05 キヤノン株式会社 光電変換装置、光電変換システム、移動体
WO2023248925A1 (ja) * 2022-06-24 2023-12-28 ソニーセミコンダクタソリューションズ株式会社 撮像素子及び電子機器
WO2024042862A1 (ja) * 2022-08-25 2024-02-29 ソニーセミコンダクタソリューションズ株式会社 撮像装置
WO2024095743A1 (ja) * 2022-11-01 2024-05-10 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法、並びに電子機器
JP2024171089A (ja) * 2023-05-29 2024-12-11 キヤノン株式会社 光電変換装置、光電変換システム、および移動体
US20240402006A1 (en) * 2023-06-02 2024-12-05 International Business Machines Corporation Flexible ultraviolet sensor
WO2024252866A1 (ja) * 2023-06-06 2024-12-12 ソニーセミコンダクタソリューションズ株式会社 光検出装置
WO2024253074A1 (ja) * 2023-06-09 2024-12-12 ソニーセミコンダクタソリューションズ株式会社 光検出装置および電子機器
JP2025167910A (ja) * 2024-04-26 2025-11-07 キヤノン株式会社 光電変換装置および機器
WO2025263397A1 (ja) * 2024-06-20 2025-12-26 ソニーセミコンダクタソリューションズ株式会社 光検出素子及び電子機器
WO2026074912A1 (ja) * 2024-10-01 2026-04-09 ソニーセミコンダクタソリューションズ株式会社 光検出装置および電子機器

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JP2013008952A (ja) 2011-05-20 2013-01-10 Societe Francaise De Detecteurs Infrarouges Sofradir 低フラックス及び低ノイズの検出回路
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WO2018075099A1 (en) 2016-10-19 2018-04-26 Raytheon Company Coaxial connector feed-through for multi-level interconnected semiconductor wafers
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JP2018148567A (ja) 2018-04-26 2018-09-20 ソニー株式会社 半導体装置、固体撮像装置、およびカメラシステム

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Publication number Priority date Publication date Assignee Title
JP2006019455A (ja) 2004-06-30 2006-01-19 Nec Electronics Corp 半導体装置およびその製造方法
JP2007294652A (ja) 2006-04-25 2007-11-08 Matsushita Electric Ind Co Ltd 半導体集積回路装置及びその製造方法
JP2013008952A (ja) 2011-05-20 2013-01-10 Societe Francaise De Detecteurs Infrarouges Sofradir 低フラックス及び低ノイズの検出回路
WO2015016140A1 (ja) 2013-08-02 2015-02-05 ソニー株式会社 撮像素子、電子機器、および撮像素子の製造方法
JP2016181884A (ja) 2015-03-25 2016-10-13 住友電気工業株式会社 電子回路
WO2018075099A1 (en) 2016-10-19 2018-04-26 Raytheon Company Coaxial connector feed-through for multi-level interconnected semiconductor wafers
JP2018125396A (ja) 2017-01-31 2018-08-09 東芝メモリ株式会社 半導体装置およびその製造方法
JP2018148567A (ja) 2018-04-26 2018-09-20 ソニー株式会社 半導体装置、固体撮像装置、およびカメラシステム

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US12183760B2 (en) 2024-12-31
CN113841242B (zh) 2025-06-13
EP3993011A1 (en) 2022-05-04
US20220367555A1 (en) 2022-11-17
US20240204028A1 (en) 2024-06-20
KR102805550B1 (ko) 2025-05-13
TWI900270B (zh) 2025-10-01
WO2020262629A1 (ja) 2020-12-30
CN113841242A (zh) 2021-12-24
KR20250059540A (ko) 2025-05-02
EP3993011A4 (en) 2022-11-23
TW202510027A (zh) 2025-03-01
TW202109616A (zh) 2021-03-01
JPWO2020262629A1 (https=) 2020-12-30
TWI861140B (zh) 2024-11-11
US11901391B2 (en) 2024-02-13
US20250072151A1 (en) 2025-02-27
CN119451260A (zh) 2025-02-14
KR20220023760A (ko) 2022-03-02

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