JP7591182B2 - 共振装置及びその製造方法 - Google Patents

共振装置及びその製造方法 Download PDF

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Publication number
JP7591182B2
JP7591182B2 JP2021563737A JP2021563737A JP7591182B2 JP 7591182 B2 JP7591182 B2 JP 7591182B2 JP 2021563737 A JP2021563737 A JP 2021563737A JP 2021563737 A JP2021563737 A JP 2021563737A JP 7591182 B2 JP7591182 B2 JP 7591182B2
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Japan
Prior art keywords
resonator
vibrating arm
lid
cover
tip
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JP2021563737A
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English (en)
Japanese (ja)
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JPWO2021117272A5 (https=
JPWO2021117272A1 (https=
Inventor
政和 福光
武彦 岸
敬之 樋口
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2021563737A 2019-12-09 2020-06-22 共振装置及びその製造方法 Active JP7591182B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019221957 2019-12-09
JP2019221957 2019-12-09
PCT/JP2020/024369 WO2021117272A1 (ja) 2019-12-09 2020-06-22 共振装置及びその製造方法

Publications (3)

Publication Number Publication Date
JPWO2021117272A1 JPWO2021117272A1 (https=) 2021-06-17
JPWO2021117272A5 JPWO2021117272A5 (https=) 2022-07-22
JP7591182B2 true JP7591182B2 (ja) 2024-11-28

Family

ID=76330207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563737A Active JP7591182B2 (ja) 2019-12-09 2020-06-22 共振装置及びその製造方法

Country Status (4)

Country Link
US (1) US20220231663A1 (https=)
JP (1) JP7591182B2 (https=)
CN (1) CN114731148A (https=)
WO (1) WO2021117272A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117730482A (zh) * 2021-08-03 2024-03-19 株式会社村田制作所 谐振子以及谐振装置

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193458A (ja) 1998-12-28 2000-07-14 Murata Mfg Co Ltd 振動ジャイロおよびその製造方法
JP2007081697A (ja) 2005-09-13 2007-03-29 Daishinku Corp 圧電振動デバイス及びその製造方法
JP2007306471A (ja) 2006-05-15 2007-11-22 Citizen Holdings Co Ltd 水晶振動子及びその製造方法ならびに物理量センサー
JP2008054018A (ja) 2006-08-24 2008-03-06 Seiko Instruments Inc 圧電振動子およびこれを備える発振器、電子機器
JP2008061048A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 水晶振動子、及びその水晶振動子の封止方法
JP2009253622A (ja) 2008-04-04 2009-10-29 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片および圧電デバイス
JP2014060698A (ja) 2012-08-24 2014-04-03 Seiko Instruments Inc 電子デバイス、ｍｅｍｓセンサ及び電子デバイスの製造方法
JP2015008353A (ja) 2013-06-24 2015-01-15 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体、および振動素子の製造方法
JP2015035818A (ja) 2014-09-29 2015-02-19 セイコーエプソン株式会社 振動子、発振器、および電子機器
JP2017045980A (ja) 2015-08-28 2017-03-02 サムソン エレクトロ−メカニックス カンパニーリミテッド． 電子部品パッケージ
WO2017212677A1 (ja) 2016-06-08 2017-12-14 株式会社村田製作所 共振装置製造方法
WO2018008480A1 (ja) 2016-07-05 2018-01-11 株式会社村田製作所 共振子及び共振装置
JP2018165642A (ja) 2017-03-28 2018-10-25 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11214947A (ja) * 1998-01-21 1999-08-06 Toyo Commun Equip Co Ltd 圧電デバイスのパッケージ構造
JP5622173B2 (ja) * 2010-07-29 2014-11-12 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
WO2017090380A1 (ja) * 2015-11-24 2017-06-01 株式会社村田製作所 共振装置及びその製造方法
WO2017110126A1 (ja) * 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193458A (ja) 1998-12-28 2000-07-14 Murata Mfg Co Ltd 振動ジャイロおよびその製造方法
JP2007081697A (ja) 2005-09-13 2007-03-29 Daishinku Corp 圧電振動デバイス及びその製造方法
JP2007306471A (ja) 2006-05-15 2007-11-22 Citizen Holdings Co Ltd 水晶振動子及びその製造方法ならびに物理量センサー
JP2008054018A (ja) 2006-08-24 2008-03-06 Seiko Instruments Inc 圧電振動子およびこれを備える発振器、電子機器
JP2008061048A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 水晶振動子、及びその水晶振動子の封止方法
JP2009253622A (ja) 2008-04-04 2009-10-29 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片および圧電デバイス
JP2014060698A (ja) 2012-08-24 2014-04-03 Seiko Instruments Inc 電子デバイス、ｍｅｍｓセンサ及び電子デバイスの製造方法
JP2015008353A (ja) 2013-06-24 2015-01-15 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、移動体、および振動素子の製造方法
JP2015035818A (ja) 2014-09-29 2015-02-19 セイコーエプソン株式会社 振動子、発振器、および電子機器
JP2017045980A (ja) 2015-08-28 2017-03-02 サムソン エレクトロ−メカニックス カンパニーリミテッド． 電子部品パッケージ
WO2017212677A1 (ja) 2016-06-08 2017-12-14 株式会社村田製作所 共振装置製造方法
WO2018008480A1 (ja) 2016-07-05 2018-01-11 株式会社村田製作所 共振子及び共振装置
JP2018165642A (ja) 2017-03-28 2018-10-25 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Also Published As

Publication number Publication date
CN114731148A (zh) 2022-07-08
WO2021117272A1 (ja) 2021-06-17
US20220231663A1 (en) 2022-07-21
JPWO2021117272A1 (https=) 2021-06-17

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