CN114731148A - 谐振装置及其制造方法 - Google Patents

谐振装置及其制造方法 Download PDF

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Publication number
CN114731148A
CN114731148A CN202080080530.5A CN202080080530A CN114731148A CN 114731148 A CN114731148 A CN 114731148A CN 202080080530 A CN202080080530 A CN 202080080530A CN 114731148 A CN114731148 A CN 114731148A
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CN
China
Prior art keywords
lower cover
upper cover
resonator
arm
vibrating arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080080530.5A
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English (en)
Chinese (zh)
Inventor
福光政和
岸武彦
樋口敬之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN114731148A publication Critical patent/CN114731148A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202080080530.5A 2019-12-09 2020-06-22 谐振装置及其制造方法 Pending CN114731148A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-221957 2019-12-09
JP2019221957 2019-12-09
PCT/JP2020/024369 WO2021117272A1 (ja) 2019-12-09 2020-06-22 共振装置及びその製造方法

Publications (1)

Publication Number Publication Date
CN114731148A true CN114731148A (zh) 2022-07-08

Family

ID=76330207

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080080530.5A Pending CN114731148A (zh) 2019-12-09 2020-06-22 谐振装置及其制造方法

Country Status (4)

Country Link
US (1) US20220231663A1 (https=)
JP (1) JP7591182B2 (https=)
CN (1) CN114731148A (https=)
WO (1) WO2021117272A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117730482A (zh) * 2021-08-03 2024-03-19 株式会社村田制作所 谐振子以及谐振装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140375178A1 (en) * 2013-06-24 2014-12-25 Seiko Epson Corporation Resonator element, resonator device, electronic apparatus, moving object, and method of manufacturing resonator element
CN108141197A (zh) * 2015-12-21 2018-06-08 株式会社村田制作所 谐振子和谐振装置
US20180226937A1 (en) * 2015-11-24 2018-08-09 Murata Manufacturing Co., Ltd. Resonance device and manufacturing method therefor
CN109155614A (zh) * 2016-06-08 2019-01-04 株式会社村田制作所 谐振装置制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11214947A (ja) * 1998-01-21 1999-08-06 Toyo Commun Equip Co Ltd 圧電デバイスのパッケージ構造
JP2000193458A (ja) 1998-12-28 2000-07-14 Murata Mfg Co Ltd 振動ジャイロおよびその製造方法
JP2007081697A (ja) 2005-09-13 2007-03-29 Daishinku Corp 圧電振動デバイス及びその製造方法
JP2007306471A (ja) 2006-05-15 2007-11-22 Citizen Holdings Co Ltd 水晶振動子及びその製造方法ならびに物理量センサー
JP4814016B2 (ja) 2006-08-24 2011-11-09 セイコーインスツル株式会社 圧電振動子およびこれを備える発振器、電子機器
JP4986545B2 (ja) * 2006-08-31 2012-07-25 京セラクリスタルデバイス株式会社 水晶振動子
JP5175128B2 (ja) 2008-04-04 2013-04-03 日本電波工業株式会社 音叉型圧電振動片および圧電デバイス
JP5622173B2 (ja) * 2010-07-29 2014-11-12 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP6230285B2 (ja) * 2012-08-24 2017-11-15 セイコーインスツル株式会社 電子デバイス、ｍｅｍｓセンサ及び電子デバイスの製造方法
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP5822186B2 (ja) * 2014-09-29 2015-11-24 セイコーエプソン株式会社 振動子、発振器、および電子機器
KR102117466B1 (ko) * 2015-08-28 2020-06-01 삼성전기주식회사 전자부품 패키지
WO2018008198A1 (ja) 2016-07-05 2018-01-11 株式会社村田製作所 共振子及び共振装置
JP2018165642A (ja) * 2017-03-28 2018-10-25 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140375178A1 (en) * 2013-06-24 2014-12-25 Seiko Epson Corporation Resonator element, resonator device, electronic apparatus, moving object, and method of manufacturing resonator element
US20180226937A1 (en) * 2015-11-24 2018-08-09 Murata Manufacturing Co., Ltd. Resonance device and manufacturing method therefor
CN108141197A (zh) * 2015-12-21 2018-06-08 株式会社村田制作所 谐振子和谐振装置
CN109155614A (zh) * 2016-06-08 2019-01-04 株式会社村田制作所 谐振装置制造方法

Also Published As

Publication number Publication date
WO2021117272A1 (ja) 2021-06-17
JP7591182B2 (ja) 2024-11-28
US20220231663A1 (en) 2022-07-21
JPWO2021117272A1 (https=) 2021-06-17

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