JP7589807B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP7589807B2
JP7589807B2 JP2023517029A JP2023517029A JP7589807B2 JP 7589807 B2 JP7589807 B2 JP 7589807B2 JP 2023517029 A JP2023517029 A JP 2023517029A JP 2023517029 A JP2023517029 A JP 2023517029A JP 7589807 B2 JP7589807 B2 JP 7589807B2
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oxide
metal layer
ceramic plate
semiconductor device
ceramic
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JPWO2022230220A5 (https=
JPWO2022230220A1 (https=
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聖一 ▲高▼橋
将義 下田
誠 磯崎
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Fuji Electric Co Ltd
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Fuji Electric Co Ltd
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