KR102823564B1 - 반도체 장치 - Google Patents

반도체 장치 Download PDF

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KR102823564B1
KR102823564B1 KR1020237010993A KR20237010993A KR102823564B1 KR 102823564 B1 KR102823564 B1 KR 102823564B1 KR 1020237010993 A KR1020237010993 A KR 1020237010993A KR 20237010993 A KR20237010993 A KR 20237010993A KR 102823564 B1 KR102823564 B1 KR 102823564B1
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oxide
metal layer
ceramic plate
ceramic
semiconductor devices
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KR20230058492A (ko
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세이이치 타카하시
마사요시 시모다
마코토 이소자키
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후지 덴키 가부시키가이샤
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    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
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    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

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