JP7572033B2 - 結像型ｘ線顕微鏡 - Google Patents

結像型ｘ線顕微鏡 Download PDF

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Publication number
JP7572033B2
JP7572033B2 JP2020178363A JP2020178363A JP7572033B2 JP 7572033 B2 JP7572033 B2 JP 7572033B2 JP 2020178363 A JP2020178363 A JP 2020178363A JP 2020178363 A JP2020178363 A JP 2020178363A JP 7572033 B2 JP7572033 B2 JP 7572033B2
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imaging
mirror
rays
multilayer film
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JP2022069273A (ja
JP2022069273A5 (enExample
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和彦 表
雷太 廣瀬
秀一 加藤
ユーリー・プラトノフ
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Rigaku Corp
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Rigaku Corp
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Priority to JP2020178363A priority Critical patent/JP7572033B2/ja
Priority to US17/501,378 priority patent/US11885753B2/en
Priority to EP21203333.6A priority patent/EP3989240A1/en
Priority to CN202111230312.8A priority patent/CN114509452A/zh
Publication of JP2022069273A publication Critical patent/JP2022069273A/ja
Publication of JP2022069273A5 publication Critical patent/JP2022069273A5/ja
Priority to JP2024070094A priority patent/JP7598681B2/ja
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/03—Investigating materials by wave or particle radiation by transmission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pulmonology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2020178363A 2020-10-23 2020-10-23 結像型ｘ線顕微鏡 Active JP7572033B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020178363A JP7572033B2 (ja) 2020-10-23 2020-10-23 結像型ｘ線顕微鏡
US17/501,378 US11885753B2 (en) 2020-10-23 2021-10-14 Imaging type X-ray microscope
EP21203333.6A EP3989240A1 (en) 2020-10-23 2021-10-19 Imaging type x-ray microscope
CN202111230312.8A CN114509452A (zh) 2020-10-23 2021-10-21 成像型x射线显微镜
JP2024070094A JP7598681B2 (ja) 2020-10-23 2024-04-23 結像型ｘ線顕微鏡

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JP2020178363A JP7572033B2 (ja) 2020-10-23 2020-10-23 結像型ｘ線顕微鏡

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JP2022069273A5 JP2022069273A5 (enExample) 2023-01-11
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JP7572033B2 (ja) * 2020-10-23 2024-10-23 株式会社リガク 結像型ｘ線顕微鏡
JP2021087827A (ja) * 2021-03-01 2021-06-10 株式会社三洋物産 遊技機
WO2023203856A1 (ja) * 2022-04-22 2023-10-26 株式会社リガク 半導体検査装置、半導体検査システムおよび半導体検査方法
KR102575501B1 (ko) * 2022-09-05 2023-09-07 한국원자력연구원 반도체 패키징용 칩 정렬 장치 및 그 방법

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Publication number Publication date
CN114509452A (zh) 2022-05-17
JP2022069273A (ja) 2022-05-11
US11885753B2 (en) 2024-01-30
JP7598681B2 (ja) 2024-12-12
JP2024097032A (ja) 2024-07-17
EP3989240A1 (en) 2022-04-27
US20220128487A1 (en) 2022-04-28

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