JP7519019B2 - カルコゲナイドガラス材 - Google Patents
カルコゲナイドガラス材 Download PDFInfo
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- JP7519019B2 JP7519019B2 JP2022165365A JP2022165365A JP7519019B2 JP 7519019 B2 JP7519019 B2 JP 7519019B2 JP 2022165365 A JP2022165365 A JP 2022165365A JP 2022165365 A JP2022165365 A JP 2022165365A JP 7519019 B2 JP7519019 B2 JP 7519019B2
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- Prior art keywords
- glass material
- chalcogenide glass
- layer
- refractive index
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims description 48
- 239000005387 chalcogenide glass Substances 0.000 title claims description 31
- 239000011521 glass Substances 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000006117 anti-reflective coating Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 5
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052714 tellurium Inorganic materials 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 239000002994 raw material Substances 0.000 description 11
- 239000003708 ampul Substances 0.000 description 10
- 238000004017 vitrification Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 230000003667 anti-reflective effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical group 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052798 chalcogen Inorganic materials 0.000 description 2
- 150000001787 chalcogens Chemical class 0.000 description 2
- 239000012768 molten material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910017000 As2Se3 Inorganic materials 0.000 description 1
- 229910005900 GeTe Inorganic materials 0.000 description 1
- 229910005916 GeTe2 Inorganic materials 0.000 description 1
- 229910009973 Ti2O3 Inorganic materials 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 229910052958 orpiment Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- GQUJEMVIKWQAEH-UHFFFAOYSA-N titanium(III) oxide Chemical compound O=[Ti]O[Ti]=O GQUJEMVIKWQAEH-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
- C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3464—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide
- C03C17/347—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide comprising a sulfide or oxysulfide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3621—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3628—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a sulfide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3634—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing carbon, a carbide or oxycarbide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/32—Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
- C03C3/321—Chalcogenide glasses, e.g. containing S, Se, Te
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/10—Compositions for glass with special properties for infrared transmitting glass
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
- Light Receiving Elements (AREA)
Description
部材や、赤外線センサ部に赤外光を集光させるためのレンズ等の光学素子として好適である。
Claims (8)
- 表面に反射防止膜が形成されている、カルコゲナイドガラス材であって、
前記反射防止膜が、低屈折率層と高屈折率層が交互に合計2層以上積層されることにより構成されており、
前記反射防止膜が、Geからなる層とYF3からなる層が接して積層されている部分を含み、
前記カルコゲナイドガラス材のガラス組成中の含有量が、
モル%で、Te 42~93%であることを特徴とするカルコゲナイドガラス材。 - モル%で、Te 42~93%、Ge 1~40%、Ga 1~30%、Ag 1~10%であることを特徴とする請求項1に記載のカルコゲナイドガラス材。
- 前記反射防止膜において、前記低屈折率層の材質がYF3であり、前記高屈折率層の材質がGeであることを特徴とする請求項1又は2に記載のカルコゲナイドガラス材。
- 前記反射防止膜が、前記低屈折率層と前記高屈折率層が交互に合計2~12層積層されていることにより構成されていることを特徴とする請求項1~3のいずれか一項に記載のカルコゲナイドガラス材。
- 前記反射防止膜の、ガラス材側の第1層が、Geからなる層であることを特徴とする請求項1~4のいずれか一項に記載のカルコゲナイドガラス材。
- 前記反射防止膜の、ガラス材側と反対の最外層が、YF3からなる層であることを特徴とする請求項1~5のいずれか一項に記載のカルコゲナイドガラス材。
- 請求項1~6のいずれか一項に記載のカルコゲナイドガラス材を用いることを特徴とする光学素子。
- 請求項7に記載の光学素子を用いることを特徴とする赤外線センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022165365A JP7519019B2 (ja) | 2017-09-12 | 2022-10-14 | カルコゲナイドガラス材 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2017174793A JP7172024B2 (ja) | 2017-09-12 | 2017-09-12 | カルコゲナイドガラス材 |
JP2022165365A JP7519019B2 (ja) | 2017-09-12 | 2022-10-14 | カルコゲナイドガラス材 |
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JP2017174793A Division JP7172024B2 (ja) | 2017-09-12 | 2017-09-12 | カルコゲナイドガラス材 |
Publications (2)
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JP2022186810A JP2022186810A (ja) | 2022-12-15 |
JP7519019B2 true JP7519019B2 (ja) | 2024-07-19 |
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JP2017174793A Active JP7172024B2 (ja) | 2017-09-12 | 2017-09-12 | カルコゲナイドガラス材 |
JP2022165365A Active JP7519019B2 (ja) | 2017-09-12 | 2022-10-14 | カルコゲナイドガラス材 |
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JP2021056270A (ja) * | 2019-09-27 | 2021-04-08 | 日本電気硝子株式会社 | レンズ部材及びレンズユニット並びにレンズ部材及びレンズユニットの製造方法 |
CN112047627B (zh) * | 2020-08-14 | 2022-09-09 | 暨南大学 | 一种全谱段硫系玻璃材料及其制备方法 |
JP2022063893A (ja) * | 2020-10-13 | 2022-04-25 | 日本電気硝子株式会社 | ガラスの製造方法 |
US20240019668A1 (en) * | 2020-12-16 | 2024-01-18 | Nippon Electric Glass Co.,Ltd. | Infrared imaging lens and infrared camera |
EP4442659A1 (en) * | 2021-11-29 | 2024-10-09 | Nippon Electric Glass Co., Ltd. | Infrared-transmitting glass |
WO2023243407A1 (ja) * | 2022-06-17 | 2023-12-21 | 日本電気硝子株式会社 | 赤外線透過ガラス |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004053720A (ja) | 2002-07-17 | 2004-02-19 | Matsushita Electric Works Ltd | 赤外線透過フィルターの製造方法 |
JP2007298661A (ja) | 2006-04-28 | 2007-11-15 | Horiba Ltd | 赤外光用反射防止膜 |
JP2007316283A (ja) | 2006-05-25 | 2007-12-06 | Matsushita Electric Works Ltd | 赤外線フィルタ及びその製造方法 |
JP2014032213A (ja) | 2010-11-30 | 2014-02-20 | Fujifilm Corp | 赤外線用光学機能膜 |
WO2017110500A1 (ja) | 2015-12-25 | 2017-06-29 | 日本電気硝子株式会社 | 赤外線透過ガラス |
WO2019018018A2 (en) | 2017-04-12 | 2019-01-24 | Corning Incorporated | ANTIREFLECTION COATINGS FOR INFRARED OPTICAL SYSTEM |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5988338A (ja) * | 1982-11-08 | 1984-05-22 | Hitachi Ltd | 赤外光用光フアイバ |
JPS60114801A (ja) * | 1983-11-25 | 1985-06-21 | Matsushita Electric Ind Co Ltd | 反射防止膜 |
JPS61127639A (ja) | 1984-11-21 | 1986-06-14 | Hitachi Ltd | 赤外光フアイバ用材料 |
JPH01230001A (ja) * | 1988-03-10 | 1989-09-13 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | カルコゲナイドガラスの反射防止膜 |
JPH06313802A (ja) * | 1993-04-28 | 1994-11-08 | Topcon Corp | 赤外域多層膜 |
JP3361621B2 (ja) * | 1994-06-29 | 2003-01-07 | 三菱電機株式会社 | 赤外域用反射防止膜 |
JPH08310840A (ja) * | 1995-05-16 | 1996-11-26 | Nippon Sheet Glass Co Ltd | 反射防止膜 |
CZ286152B6 (cs) * | 1998-03-13 | 2000-01-12 | Miroslav Ing. Csc. Vlček | Transparentní a semitransparentní difrakční prvky |
JP2001264509A (ja) * | 2000-03-21 | 2001-09-26 | Nippon Sheet Glass Co Ltd | 反射防止膜が被覆された物品およびその製造方法 |
EP1642870B1 (fr) * | 2004-09-09 | 2008-03-26 | Umicore | Verres de chalcogénures à base de Te pour transmission dans l'infrarouge moyen et lointain |
US7116888B1 (en) * | 2005-04-13 | 2006-10-03 | Corning, Incorporated | Chalcogenide glass for low viscosity extrusion and injection molding |
JP5339720B2 (ja) | 2007-12-28 | 2013-11-13 | 五鈴精工硝子株式会社 | モールド成型用赤外線透過ガラス |
JP5489824B2 (ja) * | 2010-04-02 | 2014-05-14 | 富士フイルム株式会社 | 反射防止膜及び赤外線用光学素子 |
KR20140058208A (ko) * | 2012-11-06 | 2014-05-14 | 삼성전자주식회사 | 이미지 센서 |
JP6046860B2 (ja) * | 2014-03-13 | 2016-12-21 | 富士フイルム株式会社 | 光学部品,赤外線カメラおよび光学部品の製造方法 |
JP6631775B2 (ja) * | 2014-08-11 | 2020-01-15 | 日本電気硝子株式会社 | 赤外線透過ガラス |
CN106796308B (zh) | 2014-09-30 | 2018-12-14 | 富士胶片株式会社 | 防反射膜、透镜以及摄像装置 |
CN106796309B (zh) | 2014-09-30 | 2018-11-06 | 富士胶片株式会社 | 防反射膜、硫属化合物玻璃透镜以及摄像装置 |
JP6819920B2 (ja) * | 2016-01-14 | 2021-01-27 | 日本電気硝子株式会社 | カルコゲナイドガラス |
WO2017126394A1 (ja) * | 2016-01-18 | 2017-07-27 | 住友電気工業株式会社 | 光学部品 |
JP2017128491A (ja) | 2016-01-18 | 2017-07-27 | 住友電気工業株式会社 | 光学部品 |
JP6709499B2 (ja) * | 2016-02-02 | 2020-06-17 | 日本電気硝子株式会社 | 赤外線透過ガラス |
-
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- 2017-09-12 JP JP2017174793A patent/JP7172024B2/ja active Active
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004053720A (ja) | 2002-07-17 | 2004-02-19 | Matsushita Electric Works Ltd | 赤外線透過フィルターの製造方法 |
JP2007298661A (ja) | 2006-04-28 | 2007-11-15 | Horiba Ltd | 赤外光用反射防止膜 |
JP2007316283A (ja) | 2006-05-25 | 2007-12-06 | Matsushita Electric Works Ltd | 赤外線フィルタ及びその製造方法 |
JP2014032213A (ja) | 2010-11-30 | 2014-02-20 | Fujifilm Corp | 赤外線用光学機能膜 |
WO2017110500A1 (ja) | 2015-12-25 | 2017-06-29 | 日本電気硝子株式会社 | 赤外線透過ガラス |
WO2019018018A2 (en) | 2017-04-12 | 2019-01-24 | Corning Incorporated | ANTIREFLECTION COATINGS FOR INFRARED OPTICAL SYSTEM |
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EP3683196B1 (en) | 2023-09-06 |
EP3683196A4 (en) | 2021-06-02 |
JP2019048752A (ja) | 2019-03-28 |
CN111094201A (zh) | 2020-05-01 |
JP7172024B2 (ja) | 2022-11-16 |
JP2022186810A (ja) | 2022-12-15 |
US20200189964A1 (en) | 2020-06-18 |
US11643357B2 (en) | 2023-05-09 |
EP3683196A1 (en) | 2020-07-22 |
CN115010379A (zh) | 2022-09-06 |
WO2019054145A1 (ja) | 2019-03-21 |
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