JP7444165B2 - 流体制御装置及び電子機器 - Google Patents

流体制御装置及び電子機器 Download PDF

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Publication number
JP7444165B2
JP7444165B2 JP2021524740A JP2021524740A JP7444165B2 JP 7444165 B2 JP7444165 B2 JP 7444165B2 JP 2021524740 A JP2021524740 A JP 2021524740A JP 2021524740 A JP2021524740 A JP 2021524740A JP 7444165 B2 JP7444165 B2 JP 7444165B2
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JP
Japan
Prior art keywords
space
control device
fluid control
fluid
inlets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021524740A
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English (en)
Japanese (ja)
Other versions
JPWO2020246232A1 (enExample
Inventor
洋志 鈴木
正啓 佐藤
康司 福元
祐哉 堀内
浩信 安倍
裕人 川口
一泰 本郷
拓磨 松下
大輔 水田
健太郎 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Sony Group Corp
Original Assignee
Sony Corp
Sony Group Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Sony Corp, Sony Group Corp filed Critical Sony Corp
Publication of JPWO2020246232A1 publication Critical patent/JPWO2020246232A1/ja
Application granted granted Critical
Publication of JP7444165B2 publication Critical patent/JP7444165B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021524740A 2019-06-03 2020-05-19 流体制御装置及び電子機器 Active JP7444165B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019103467 2019-06-03
JP2019103467 2019-06-03
PCT/JP2020/019821 WO2020246232A1 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Publications (2)

Publication Number Publication Date
JPWO2020246232A1 JPWO2020246232A1 (enExample) 2020-12-10
JP7444165B2 true JP7444165B2 (ja) 2024-03-06

Family

ID=73652808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021524740A Active JP7444165B2 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Country Status (6)

Country Link
US (1) US12135022B2 (enExample)
EP (1) EP3978752B1 (enExample)
JP (1) JP7444165B2 (enExample)
KR (1) KR20220016072A (enExample)
CN (1) CN113710896A (enExample)
WO (1) WO2020246232A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023183637A (ja) * 2022-06-16 2023-12-28 ローム株式会社 マイクロポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019065708A (ja) 2017-09-28 2019-04-25 日本電産株式会社 ポンプ

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JPS59221485A (ja) 1983-05-31 1984-12-13 Sharp Corp ポンプ
JPS6270677A (ja) 1985-09-24 1987-04-01 Ckd Controls Ltd ピエゾポンプ
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
JPH051669A (ja) * 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
DE4332720C2 (de) * 1993-09-25 1997-02-13 Karlsruhe Forschzent Mikromembranpumpe
JPH07301182A (ja) 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
TW274114B (enExample) 1994-05-09 1996-04-11 Ralf Wolbers
JPH10184549A (ja) 1996-12-26 1998-07-14 Citizen Electron Co Ltd 小型ポンプ
JPH11311184A (ja) 1998-04-27 1999-11-09 Matsushita Electric Works Ltd 小型ポンプ
JP3784566B2 (ja) * 1999-03-17 2006-06-14 日東工器株式会社 小型ポンプ
JP2002227770A (ja) 2001-02-02 2002-08-14 Matsushita Electric Ind Co Ltd 小型ポンプ
US6629820B2 (en) 2001-06-26 2003-10-07 Micralyne Inc. Microfluidic flow control device
CN100510400C (zh) 2003-08-04 2009-07-08 日本电气株式会社 隔膜泵和具有隔膜泵的冷却系统
US7284966B2 (en) 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
JP2006295147A (ja) 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
JP4867324B2 (ja) 2005-12-12 2012-02-01 ソニー株式会社 放熱装置及び電子機器
JP4793442B2 (ja) * 2006-03-29 2011-10-12 株式会社村田製作所 マイクロポンプ
JP5003154B2 (ja) 2006-12-28 2012-08-15 株式会社村田製作所 圧電ポンプ
WO2009050990A1 (ja) * 2007-10-16 2009-04-23 Murata Manufacturing Co., Ltd. 圧電マイクロブロア
EP2241757B1 (en) 2007-12-03 2018-01-03 Murata Manufacturing Co. Ltd. Piezoelectric pump
JP2012528980A (ja) * 2009-06-03 2012-11-15 ザ テクノロジー パートナーシップ ピーエルシー 流体ディスクポンプ
JP2009293626A (ja) 2009-09-18 2009-12-17 Seiko Epson Corp 流体噴射装置
JP2012026385A (ja) * 2010-07-26 2012-02-09 Ricoh Co Ltd 液体搬送装置、液体搬送キット
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
KR20140081570A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 마이크로 펌프
KR20140118542A (ko) * 2013-03-29 2014-10-08 삼성전기주식회사 마이크로 펌프
CN105822527B (zh) 2016-03-24 2017-12-05 北京理工大学 利用压电陶瓷驱动的多功能流体分配系统及其驱动方法
EP3699430B1 (en) 2016-08-16 2021-10-06 Philip Morris Products S.A. Aerosol-generating device
WO2021090729A1 (ja) * 2019-11-08 2021-05-14 ソニー株式会社 バルブモジュール、流体制御装置及び電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019065708A (ja) 2017-09-28 2019-04-25 日本電産株式会社 ポンプ

Also Published As

Publication number Publication date
EP3978752A1 (en) 2022-04-06
JPWO2020246232A1 (enExample) 2020-12-10
US20220260067A1 (en) 2022-08-18
EP3978752A4 (en) 2023-04-19
US12135022B2 (en) 2024-11-05
KR20220016072A (ko) 2022-02-08
WO2020246232A1 (ja) 2020-12-10
CN113710896A (zh) 2021-11-26
EP3978752B1 (en) 2025-11-26

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