WO2009050990A1 - 圧電マイクロブロア - Google Patents

圧電マイクロブロア Download PDF

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Publication number
WO2009050990A1
WO2009050990A1 PCT/JP2008/067236 JP2008067236W WO2009050990A1 WO 2009050990 A1 WO2009050990 A1 WO 2009050990A1 JP 2008067236 W JP2008067236 W JP 2008067236W WO 2009050990 A1 WO2009050990 A1 WO 2009050990A1
Authority
WO
WIPO (PCT)
Prior art keywords
blower
opening
wall
outside
inlet path
Prior art date
Application number
PCT/JP2008/067236
Other languages
English (en)
French (fr)
Inventor
Atsuhiko Hirata
Gaku Kamitani
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to EP08839629A priority Critical patent/EP2096309A4/en
Priority to JP2009507635A priority patent/JP5012889B2/ja
Publication of WO2009050990A1 publication Critical patent/WO2009050990A1/ja
Priority to US12/476,332 priority patent/US7972124B2/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1093—Adaptations or arrangements of distribution members the members being low-resistance valves allowing free streaming
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Reciprocating Pumps (AREA)

Abstract

【課題】逆止弁を使用せずに大流量の圧縮性流体を輸送でき、外部に漏れ出す騒音を抑制できる圧電マイクロブロアを提供する。 【解決手段】ブロア本体１に第１壁部１２と第２壁部１０とを設け、ダイヤフラム２の中央部と対向する壁部の位置に開口部１２ａ，１０ａを形成する。両壁部の間に、開口部１２ａ，１０ａと外部とを連通させる流入通路１１ｂを形成する。圧電素子２２に電圧を印加してダイヤフラム２を振動させると、開口部１２ａ周辺の第１壁部１２が振動し、流入通路１１ｂから気体を吸い込み、開口部１０ａから気体を排出することができる。流入通路１１ｂの途中に吸音用の複数の枝路１１ｃを接続し、開口部１０ａ付近で発生する騒音が流入口４から漏れ出るのを防止する。
PCT/JP2008/067236 2007-10-16 2008-09-25 圧電マイクロブロア WO2009050990A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08839629A EP2096309A4 (en) 2007-10-16 2008-09-25 PIEZOELECTRIC MICRO FAN
JP2009507635A JP5012889B2 (ja) 2007-10-16 2008-09-25 圧電マイクロブロア
US12/476,332 US7972124B2 (en) 2007-10-16 2009-06-02 Piezoelectric micro-blower

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-268501 2007-10-16
JP2007268501 2007-10-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/476,332 Continuation US7972124B2 (en) 2007-10-16 2009-06-02 Piezoelectric micro-blower

Publications (1)

Publication Number Publication Date
WO2009050990A1 true WO2009050990A1 (ja) 2009-04-23

Family

ID=40567263

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067236 WO2009050990A1 (ja) 2007-10-16 2008-09-25 圧電マイクロブロア

Country Status (5)

Country Link
US (1) US7972124B2 (ja)
EP (1) EP2096309A4 (ja)
JP (1) JP5012889B2 (ja)
CN (1) CN101568728A (ja)
WO (1) WO2009050990A1 (ja)

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WO2009148008A1 (ja) * 2008-06-03 2009-12-10 株式会社村田製作所 圧電マイクロブロア

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TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
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TWI683959B (zh) * 2016-09-05 2020-02-01 研能科技股份有限公司 壓電致動器及其所適用之微型流體控制裝置
TWI625468B (zh) 2016-09-05 2018-06-01 研能科技股份有限公司 流體控制裝置
TWI602995B (zh) 2016-09-05 2017-10-21 研能科技股份有限公司 流體控制裝置
US10943578B2 (en) 2016-12-13 2021-03-09 Ultrahaptics Ip Ltd Driving techniques for phased-array systems
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148008A1 (ja) * 2008-06-03 2009-12-10 株式会社村田製作所 圧電マイクロブロア
US8596998B2 (en) 2008-06-03 2013-12-03 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower

Also Published As

Publication number Publication date
EP2096309A4 (en) 2013-02-27
US7972124B2 (en) 2011-07-05
JP5012889B2 (ja) 2012-08-29
CN101568728A (zh) 2009-10-28
JPWO2009050990A1 (ja) 2011-03-03
EP2096309A1 (en) 2009-09-02
US20090232684A1 (en) 2009-09-17

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