JPWO2020246232A1 - - Google Patents

Info

Publication number
JPWO2020246232A1
JPWO2020246232A1 JP2021524740A JP2021524740A JPWO2020246232A1 JP WO2020246232 A1 JPWO2020246232 A1 JP WO2020246232A1 JP 2021524740 A JP2021524740 A JP 2021524740A JP 2021524740 A JP2021524740 A JP 2021524740A JP WO2020246232 A1 JPWO2020246232 A1 JP WO2020246232A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021524740A
Other languages
Japanese (ja)
Other versions
JP7444165B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020246232A1 publication Critical patent/JPWO2020246232A1/ja
Application granted granted Critical
Publication of JP7444165B2 publication Critical patent/JP7444165B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021524740A 2019-06-03 2020-05-19 流体制御装置及び電子機器 Active JP7444165B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019103467 2019-06-03
JP2019103467 2019-06-03
PCT/JP2020/019821 WO2020246232A1 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Publications (2)

Publication Number Publication Date
JPWO2020246232A1 true JPWO2020246232A1 (enExample) 2020-12-10
JP7444165B2 JP7444165B2 (ja) 2024-03-06

Family

ID=73652808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021524740A Active JP7444165B2 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Country Status (6)

Country Link
US (1) US12135022B2 (enExample)
EP (1) EP3978752B1 (enExample)
JP (1) JP7444165B2 (enExample)
KR (1) KR20220016072A (enExample)
CN (1) CN113710896A (enExample)
WO (1) WO2020246232A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023183637A (ja) * 2022-06-16 2023-12-28 ローム株式会社 マイクロポンプ

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270677A (ja) * 1985-09-24 1987-04-01 Ckd Controls Ltd ピエゾポンプ
JPH051669A (ja) * 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH10502861A (ja) * 1994-05-09 1998-03-17 アクアテック・ウォーター・システムズ・インコーポレーテッド 逆浸透用透過水ポンプ
JPH10184549A (ja) * 1996-12-26 1998-07-14 Citizen Electron Co Ltd 小型ポンプ
JPH11311184A (ja) * 1998-04-27 1999-11-09 Matsushita Electric Works Ltd 小型ポンプ
JP2000265963A (ja) * 1999-03-17 2000-09-26 Kasei Optonix Co Ltd 小型ポンプ
JP2002227770A (ja) * 2001-02-02 2002-08-14 Matsushita Electric Ind Co Ltd 小型ポンプ
US20020197167A1 (en) * 2001-06-26 2002-12-26 Micralyne Inc. Microfluidic flow control device
WO2005012729A1 (ja) * 2003-08-04 2005-02-10 Nec Corporation ダイヤフラムポンプおよび該ダイヤフラムポンプを備えた冷却システム
JP2006295147A (ja) * 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
JP2007507663A (ja) * 2003-10-01 2007-03-29 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ マイクロポンプ
JP2007162525A (ja) * 2005-12-12 2007-06-28 Sony Corp 噴流発生装置、放熱装置及び電子機器
JP2008163902A (ja) * 2006-12-28 2008-07-17 Murata Mfg Co Ltd 圧電ポンプ
JP2009293626A (ja) * 2009-09-18 2009-12-17 Seiko Epson Corp 流体噴射装置
JP2012528980A (ja) * 2009-06-03 2012-11-15 ザ テクノロジー パートナーシップ ピーエルシー 流体ディスクポンプ
WO2018033347A1 (en) * 2016-08-16 2018-02-22 Philip Morris Products S.A. Aerosol-generating device
JP2019065708A (ja) * 2017-09-28 2019-04-25 日本電産株式会社 ポンプ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221485A (ja) 1983-05-31 1984-12-13 Sharp Corp ポンプ
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
DE4332720C2 (de) * 1993-09-25 1997-02-13 Karlsruhe Forschzent Mikromembranpumpe
JPH07301182A (ja) 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
JP4793442B2 (ja) * 2006-03-29 2011-10-12 株式会社村田製作所 マイクロポンプ
WO2009050990A1 (ja) * 2007-10-16 2009-04-23 Murata Manufacturing Co., Ltd. 圧電マイクロブロア
EP2241757B1 (en) 2007-12-03 2018-01-03 Murata Manufacturing Co. Ltd. Piezoelectric pump
JP2012026385A (ja) * 2010-07-26 2012-02-09 Ricoh Co Ltd 液体搬送装置、液体搬送キット
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
KR20140081570A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 마이크로 펌프
KR20140118542A (ko) * 2013-03-29 2014-10-08 삼성전기주식회사 마이크로 펌프
CN105822527B (zh) 2016-03-24 2017-12-05 北京理工大学 利用压电陶瓷驱动的多功能流体分配系统及其驱动方法
WO2021090729A1 (ja) * 2019-11-08 2021-05-14 ソニー株式会社 バルブモジュール、流体制御装置及び電子機器

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270677A (ja) * 1985-09-24 1987-04-01 Ckd Controls Ltd ピエゾポンプ
JPH051669A (ja) * 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH10502861A (ja) * 1994-05-09 1998-03-17 アクアテック・ウォーター・システムズ・インコーポレーテッド 逆浸透用透過水ポンプ
JPH10184549A (ja) * 1996-12-26 1998-07-14 Citizen Electron Co Ltd 小型ポンプ
JPH11311184A (ja) * 1998-04-27 1999-11-09 Matsushita Electric Works Ltd 小型ポンプ
JP2000265963A (ja) * 1999-03-17 2000-09-26 Kasei Optonix Co Ltd 小型ポンプ
JP2002227770A (ja) * 2001-02-02 2002-08-14 Matsushita Electric Ind Co Ltd 小型ポンプ
US20020197167A1 (en) * 2001-06-26 2002-12-26 Micralyne Inc. Microfluidic flow control device
WO2005012729A1 (ja) * 2003-08-04 2005-02-10 Nec Corporation ダイヤフラムポンプおよび該ダイヤフラムポンプを備えた冷却システム
JP2007507663A (ja) * 2003-10-01 2007-03-29 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ マイクロポンプ
JP2006295147A (ja) * 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
JP2007162525A (ja) * 2005-12-12 2007-06-28 Sony Corp 噴流発生装置、放熱装置及び電子機器
JP2008163902A (ja) * 2006-12-28 2008-07-17 Murata Mfg Co Ltd 圧電ポンプ
JP2012528980A (ja) * 2009-06-03 2012-11-15 ザ テクノロジー パートナーシップ ピーエルシー 流体ディスクポンプ
JP2009293626A (ja) * 2009-09-18 2009-12-17 Seiko Epson Corp 流体噴射装置
WO2018033347A1 (en) * 2016-08-16 2018-02-22 Philip Morris Products S.A. Aerosol-generating device
JP2019065708A (ja) * 2017-09-28 2019-04-25 日本電産株式会社 ポンプ

Also Published As

Publication number Publication date
EP3978752A1 (en) 2022-04-06
US20220260067A1 (en) 2022-08-18
EP3978752A4 (en) 2023-04-19
US12135022B2 (en) 2024-11-05
KR20220016072A (ko) 2022-02-08
WO2020246232A1 (ja) 2020-12-10
JP7444165B2 (ja) 2024-03-06
CN113710896A (zh) 2021-11-26
EP3978752B1 (en) 2025-11-26

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