CN113710896A - 流体控制装置及电子设备 - Google Patents

流体控制装置及电子设备 Download PDF

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Publication number
CN113710896A
CN113710896A CN202080029567.5A CN202080029567A CN113710896A CN 113710896 A CN113710896 A CN 113710896A CN 202080029567 A CN202080029567 A CN 202080029567A CN 113710896 A CN113710896 A CN 113710896A
Authority
CN
China
Prior art keywords
space
control device
fluid control
port
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080029567.5A
Other languages
English (en)
Chinese (zh)
Inventor
铃木洋志
佐藤正啓
福元康司
堀内祐哉
安倍浩信
川口裕人
本郷一泰
松下拓磨
水田大辅
吉田健太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Group Corp
Original Assignee
Sony Group Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Group Corp filed Critical Sony Group Corp
Publication of CN113710896A publication Critical patent/CN113710896A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202080029567.5A 2019-06-03 2020-05-19 流体控制装置及电子设备 Pending CN113710896A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019103467 2019-06-03
JP2019-103467 2019-06-03
PCT/JP2020/019821 WO2020246232A1 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Publications (1)

Publication Number Publication Date
CN113710896A true CN113710896A (zh) 2021-11-26

Family

ID=73652808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080029567.5A Pending CN113710896A (zh) 2019-06-03 2020-05-19 流体控制装置及电子设备

Country Status (6)

Country Link
US (1) US12135022B2 (enExample)
EP (1) EP3978752B1 (enExample)
JP (1) JP7444165B2 (enExample)
KR (1) KR20220016072A (enExample)
CN (1) CN113710896A (enExample)
WO (1) WO2020246232A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023183637A (ja) * 2022-06-16 2023-12-28 ローム株式会社 マイクロポンプ

Family Cites Families (31)

* Cited by examiner, † Cited by third party
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JPS59221485A (ja) * 1983-05-31 1984-12-13 Sharp Corp ポンプ
JPS6270677A (ja) * 1985-09-24 1987-04-01 Ckd Controls Ltd ピエゾポンプ
GB2248891A (en) 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
DE4332720C2 (de) * 1993-09-25 1997-02-13 Karlsruhe Forschzent Mikromembranpumpe
JPH07301182A (ja) 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
TW274114B (enExample) * 1994-05-09 1996-04-11 Ralf Wolbers
JPH10184549A (ja) * 1996-12-26 1998-07-14 Citizen Electron Co Ltd 小型ポンプ
JPH11311184A (ja) * 1998-04-27 1999-11-09 Matsushita Electric Works Ltd 小型ポンプ
JP3784566B2 (ja) * 1999-03-17 2006-06-14 日東工器株式会社 小型ポンプ
JP2002227770A (ja) * 2001-02-02 2002-08-14 Matsushita Electric Ind Co Ltd 小型ポンプ
US6629820B2 (en) 2001-06-26 2003-10-07 Micralyne Inc. Microfluidic flow control device
JPWO2005012729A1 (ja) * 2003-08-04 2007-11-01 日本電気株式会社 ダイヤフラムポンプおよび該ダイヤフラムポンプを備えた冷却システム
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
JP2006295147A (ja) * 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
JP4867324B2 (ja) * 2005-12-12 2012-02-01 ソニー株式会社 放熱装置及び電子機器
CN101415945A (zh) * 2006-03-29 2009-04-22 株式会社村田制作所 微型泵
JP5003154B2 (ja) * 2006-12-28 2012-08-15 株式会社村田製作所 圧電ポンプ
CN101568728A (zh) * 2007-10-16 2009-10-28 株式会社村田制作所 压电微型鼓风器
CN101622451B (zh) * 2007-12-03 2011-05-11 株式会社村田制作所 压电泵
CA2764332C (en) 2009-06-03 2016-11-01 The Technology Partnership Plc Fluid disc pump
JP2009293626A (ja) * 2009-09-18 2009-12-17 Seiko Epson Corp 流体噴射装置
JP2012026385A (ja) * 2010-07-26 2012-02-09 Ricoh Co Ltd 液体搬送装置、液体搬送キット
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
KR20140081570A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 마이크로 펌프
KR20140118542A (ko) * 2013-03-29 2014-10-08 삼성전기주식회사 마이크로 펌프
CN105822527B (zh) * 2016-03-24 2017-12-05 北京理工大学 利用压电陶瓷驱动的多功能流体分配系统及其驱动方法
JP7086936B2 (ja) * 2016-08-16 2022-06-20 フィリップ・モーリス・プロダクツ・ソシエテ・アノニム エアロゾル発生装置
JP7021738B2 (ja) * 2017-09-28 2022-02-17 日本電産株式会社 ポンプ
US12085067B2 (en) * 2019-11-08 2024-09-10 Sony Group Corporation Valve module, fluid control apparatus, and electronic apparatus

Also Published As

Publication number Publication date
JPWO2020246232A1 (enExample) 2020-12-10
KR20220016072A (ko) 2022-02-08
WO2020246232A1 (ja) 2020-12-10
EP3978752A4 (en) 2023-04-19
US20220260067A1 (en) 2022-08-18
EP3978752B1 (en) 2025-11-26
JP7444165B2 (ja) 2024-03-06
EP3978752A1 (en) 2022-04-06
US12135022B2 (en) 2024-11-05

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