JP7435785B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP7435785B2
JP7435785B2 JP2022536142A JP2022536142A JP7435785B2 JP 7435785 B2 JP7435785 B2 JP 7435785B2 JP 2022536142 A JP2022536142 A JP 2022536142A JP 2022536142 A JP2022536142 A JP 2022536142A JP 7435785 B2 JP7435785 B2 JP 7435785B2
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JP
Japan
Prior art keywords
flat plate
control device
fluid control
valve
valve member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022536142A
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English (en)
Japanese (ja)
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JPWO2022014121A1 (https=
JPWO2022014121A5 (https=
Inventor
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022014121A1 publication Critical patent/JPWO2022014121A1/ja
Publication of JPWO2022014121A5 publication Critical patent/JPWO2022014121A5/ja
Application granted granted Critical
Publication of JP7435785B2 publication Critical patent/JP7435785B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Reciprocating Pumps (AREA)
  • Check Valves (AREA)
JP2022536142A 2020-07-17 2021-04-27 流体制御装置 Active JP7435785B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020122530 2020-07-17
JP2020122530 2020-07-17
JP2020209762 2020-12-18
JP2020209762 2020-12-18
PCT/JP2021/016807 WO2022014121A1 (ja) 2020-07-17 2021-04-27 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022014121A1 JPWO2022014121A1 (https=) 2022-01-20
JPWO2022014121A5 JPWO2022014121A5 (https=) 2023-03-28
JP7435785B2 true JP7435785B2 (ja) 2024-02-21

Family

ID=79554642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022536142A Active JP7435785B2 (ja) 2020-07-17 2021-04-27 流体制御装置

Country Status (4)

Country Link
US (1) US12247559B2 (https=)
JP (1) JP7435785B2 (https=)
CN (1) CN115943267B (https=)
WO (1) WO2022014121A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197617A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009299871A (ja) 2008-06-17 2009-12-24 Omron Healthcare Co Ltd 逆止弁構造、ダイヤフラムポンプおよび血圧計
JP2017133508A (ja) 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型空気圧動力装置
WO2019159448A1 (ja) 2018-02-13 2019-08-22 株式会社村田製作所 流体制御装置
WO2019221121A1 (ja) 2018-05-15 2019-11-21 京セラ株式会社 圧電ガスポンプ
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0435653B1 (en) * 1989-12-27 1994-06-01 Seiko Epson Corporation Micropump
JPH05172060A (ja) * 1991-12-25 1993-07-09 Hitachi Ltd 微量ポンプ
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
WO2004081390A1 (de) * 2003-03-11 2004-09-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Normal doppelt geschlossenes mikroventil
DE602004003316T2 (de) * 2003-09-12 2007-03-15 Samsung Electronics Co., Ltd., Suwon Membranpumpe für Kühlluft
JP2009185800A (ja) * 2008-01-09 2009-08-20 Star Micronics Co Ltd ダイヤフラム式エアポンプ
CN102884352B (zh) * 2010-03-05 2014-06-18 弗兰霍菲尔运输应用研究公司 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀
AU2012312898B2 (en) * 2011-09-21 2016-11-17 Solventum Intellectual Properties Company Dual -cavity pump
EP3604810B1 (en) * 2014-02-21 2023-06-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) * 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
WO2016121717A1 (ja) * 2015-01-28 2016-08-04 株式会社村田製作所 バルブ、流体制御装置
CN107735573B (zh) * 2015-04-27 2020-10-27 株式会社村田制作所 泵
CN109069037B (zh) * 2016-05-09 2021-11-16 株式会社村田制作所 阀、流体控制装置以及血压计
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
TWI656517B (zh) * 2017-08-21 2019-04-11 研能科技股份有限公司 具致動傳感模組之裝置
JP6551636B1 (ja) * 2017-12-22 2019-07-31 株式会社村田製作所 バルブ、アプリケーション機器
JP6769568B2 (ja) * 2017-12-26 2020-10-14 株式会社村田製作所 ポンプおよび流体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung
JP6536770B1 (ja) 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
JP2019190343A (ja) * 2018-04-24 2019-10-31 株式会社村田製作所 ポンプ
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置
EP3828414B1 (en) * 2018-11-27 2024-08-14 Murata Manufacturing Co., Ltd. Pump
JP7243829B2 (ja) * 2019-07-03 2023-03-22 株式会社村田製作所 流体制御装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009299871A (ja) 2008-06-17 2009-12-24 Omron Healthcare Co Ltd 逆止弁構造、ダイヤフラムポンプおよび血圧計
JP2017133508A (ja) 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型空気圧動力装置
WO2019159448A1 (ja) 2018-02-13 2019-08-22 株式会社村田製作所 流体制御装置
WO2019221121A1 (ja) 2018-05-15 2019-11-21 京セラ株式会社 圧電ガスポンプ
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
US12247559B2 (en) 2025-03-11
WO2022014121A1 (ja) 2022-01-20
CN115943267A (zh) 2023-04-07
US20230140980A1 (en) 2023-05-11
JPWO2022014121A1 (https=) 2022-01-20
CN115943267B (zh) 2025-12-12

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