CN115943267B - 流体控制装置 - Google Patents

流体控制装置

Info

Publication number
CN115943267B
CN115943267B CN202180049877.8A CN202180049877A CN115943267B CN 115943267 B CN115943267 B CN 115943267B CN 202180049877 A CN202180049877 A CN 202180049877A CN 115943267 B CN115943267 B CN 115943267B
Authority
CN
China
Prior art keywords
plate
control device
fluid control
flat plate
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180049877.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN115943267A (zh
Inventor
田中伸拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115943267A publication Critical patent/CN115943267A/zh
Application granted granted Critical
Publication of CN115943267B publication Critical patent/CN115943267B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Reciprocating Pumps (AREA)
  • Check Valves (AREA)
CN202180049877.8A 2020-07-17 2021-04-27 流体控制装置 Active CN115943267B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020122530 2020-07-17
JP2020-122530 2020-07-17
JP2020209762 2020-12-18
JP2020-209762 2020-12-18
PCT/JP2021/016807 WO2022014121A1 (ja) 2020-07-17 2021-04-27 流体制御装置

Publications (2)

Publication Number Publication Date
CN115943267A CN115943267A (zh) 2023-04-07
CN115943267B true CN115943267B (zh) 2025-12-12

Family

ID=79554642

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180049877.8A Active CN115943267B (zh) 2020-07-17 2021-04-27 流体控制装置

Country Status (4)

Country Link
US (1) US12247559B2 (https=)
JP (1) JP7435785B2 (https=)
CN (1) CN115943267B (https=)
WO (1) WO2022014121A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197617A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108050051A (zh) * 2014-02-21 2018-05-18 株式会社村田制作所 流体控制装置以及泵
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置

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EP0435653B1 (en) * 1989-12-27 1994-06-01 Seiko Epson Corporation Micropump
JPH05172060A (ja) * 1991-12-25 1993-07-09 Hitachi Ltd 微量ポンプ
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
WO2004081390A1 (de) * 2003-03-11 2004-09-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Normal doppelt geschlossenes mikroventil
DE602004003316T2 (de) * 2003-09-12 2007-03-15 Samsung Electronics Co., Ltd., Suwon Membranpumpe für Kühlluft
JP2009185800A (ja) * 2008-01-09 2009-08-20 Star Micronics Co Ltd ダイヤフラム式エアポンプ
JP5223482B2 (ja) * 2008-06-17 2013-06-26 オムロンヘルスケア株式会社 ダイヤフラムポンプおよび血圧計
CN102884352B (zh) * 2010-03-05 2014-06-18 弗兰霍菲尔运输应用研究公司 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀
AU2012312898B2 (en) * 2011-09-21 2016-11-17 Solventum Intellectual Properties Company Dual -cavity pump
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) * 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
WO2016121717A1 (ja) * 2015-01-28 2016-08-04 株式会社村田製作所 バルブ、流体制御装置
CN107735573B (zh) * 2015-04-27 2020-10-27 株式会社村田制作所 泵
US10487820B2 (en) * 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
CN109069037B (zh) * 2016-05-09 2021-11-16 株式会社村田制作所 阀、流体控制装置以及血压计
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
TWI656517B (zh) * 2017-08-21 2019-04-11 研能科技股份有限公司 具致動傳感模組之裝置
JP6551636B1 (ja) * 2017-12-22 2019-07-31 株式会社村田製作所 バルブ、アプリケーション機器
JP6769568B2 (ja) * 2017-12-26 2020-10-14 株式会社村田製作所 ポンプおよび流体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung
WO2019159448A1 (ja) * 2018-02-13 2019-08-22 株式会社村田製作所 流体制御装置
JP6536770B1 (ja) 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
JP2019190343A (ja) * 2018-04-24 2019-10-31 株式会社村田製作所 ポンプ
JP6952400B2 (ja) * 2018-05-15 2021-10-20 京セラ株式会社 圧電ガスポンプ
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
EP3828414B1 (en) * 2018-11-27 2024-08-14 Murata Manufacturing Co., Ltd. Pump
JP7243829B2 (ja) * 2019-07-03 2023-03-22 株式会社村田製作所 流体制御装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108050051A (zh) * 2014-02-21 2018-05-18 株式会社村田制作所 流体控制装置以及泵
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置

Also Published As

Publication number Publication date
US12247559B2 (en) 2025-03-11
WO2022014121A1 (ja) 2022-01-20
CN115943267A (zh) 2023-04-07
US20230140980A1 (en) 2023-05-11
JPWO2022014121A1 (https=) 2022-01-20
JP7435785B2 (ja) 2024-02-21

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