JPWO2022014121A1 - - Google Patents

Info

Publication number
JPWO2022014121A1
JPWO2022014121A1 JP2022536142A JP2022536142A JPWO2022014121A1 JP WO2022014121 A1 JPWO2022014121 A1 JP WO2022014121A1 JP 2022536142 A JP2022536142 A JP 2022536142A JP 2022536142 A JP2022536142 A JP 2022536142A JP WO2022014121 A1 JPWO2022014121 A1 JP WO2022014121A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022536142A
Other languages
Japanese (ja)
Other versions
JP7435785B2 (ja
JPWO2022014121A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022014121A1 publication Critical patent/JPWO2022014121A1/ja
Publication of JPWO2022014121A5 publication Critical patent/JPWO2022014121A5/ja
Application granted granted Critical
Publication of JP7435785B2 publication Critical patent/JP7435785B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Reciprocating Pumps (AREA)
  • Check Valves (AREA)
JP2022536142A 2020-07-17 2021-04-27 流体制御装置 Active JP7435785B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020122530 2020-07-17
JP2020122530 2020-07-17
JP2020209762 2020-12-18
JP2020209762 2020-12-18
PCT/JP2021/016807 WO2022014121A1 (ja) 2020-07-17 2021-04-27 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022014121A1 true JPWO2022014121A1 (https=) 2022-01-20
JPWO2022014121A5 JPWO2022014121A5 (https=) 2023-03-28
JP7435785B2 JP7435785B2 (ja) 2024-02-21

Family

ID=79554642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022536142A Active JP7435785B2 (ja) 2020-07-17 2021-04-27 流体制御装置

Country Status (4)

Country Link
US (1) US12247559B2 (https=)
JP (1) JP7435785B2 (https=)
CN (1) CN115943267B (https=)
WO (1) WO2022014121A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197617A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05172060A (ja) * 1991-12-25 1993-07-09 Hitachi Ltd 微量ポンプ
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
JP2009299871A (ja) * 2008-06-17 2009-12-24 Omron Healthcare Co Ltd 逆止弁構造、ダイヤフラムポンプおよび血圧計
JP2017133508A (ja) * 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型空気圧動力装置
WO2019159448A1 (ja) * 2018-02-13 2019-08-22 株式会社村田製作所 流体制御装置
WO2019221121A1 (ja) * 2018-05-15 2019-11-21 京セラ株式会社 圧電ガスポンプ
WO2019230159A1 (ja) * 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0435653B1 (en) * 1989-12-27 1994-06-01 Seiko Epson Corporation Micropump
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
WO2004081390A1 (de) * 2003-03-11 2004-09-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Normal doppelt geschlossenes mikroventil
DE602004003316T2 (de) * 2003-09-12 2007-03-15 Samsung Electronics Co., Ltd., Suwon Membranpumpe für Kühlluft
JP2009185800A (ja) * 2008-01-09 2009-08-20 Star Micronics Co Ltd ダイヤフラム式エアポンプ
CN102884352B (zh) * 2010-03-05 2014-06-18 弗兰霍菲尔运输应用研究公司 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀
AU2012312898B2 (en) * 2011-09-21 2016-11-17 Solventum Intellectual Properties Company Dual -cavity pump
EP3604810B1 (en) * 2014-02-21 2023-06-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) * 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
WO2016121717A1 (ja) * 2015-01-28 2016-08-04 株式会社村田製作所 バルブ、流体制御装置
CN107735573B (zh) * 2015-04-27 2020-10-27 株式会社村田制作所 泵
CN109069037B (zh) * 2016-05-09 2021-11-16 株式会社村田制作所 阀、流体控制装置以及血压计
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
TWI656517B (zh) * 2017-08-21 2019-04-11 研能科技股份有限公司 具致動傳感模組之裝置
JP6551636B1 (ja) * 2017-12-22 2019-07-31 株式会社村田製作所 バルブ、アプリケーション機器
JP6769568B2 (ja) * 2017-12-26 2020-10-14 株式会社村田製作所 ポンプおよび流体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung
JP6536770B1 (ja) 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
JP2019190343A (ja) * 2018-04-24 2019-10-31 株式会社村田製作所 ポンプ
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置
EP3828414B1 (en) * 2018-11-27 2024-08-14 Murata Manufacturing Co., Ltd. Pump
JP7243829B2 (ja) * 2019-07-03 2023-03-22 株式会社村田製作所 流体制御装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05172060A (ja) * 1991-12-25 1993-07-09 Hitachi Ltd 微量ポンプ
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
JP2009299871A (ja) * 2008-06-17 2009-12-24 Omron Healthcare Co Ltd 逆止弁構造、ダイヤフラムポンプおよび血圧計
JP2017133508A (ja) * 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型空気圧動力装置
WO2019159448A1 (ja) * 2018-02-13 2019-08-22 株式会社村田製作所 流体制御装置
WO2019221121A1 (ja) * 2018-05-15 2019-11-21 京セラ株式会社 圧電ガスポンプ
WO2019230159A1 (ja) * 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
US12247559B2 (en) 2025-03-11
WO2022014121A1 (ja) 2022-01-20
CN115943267A (zh) 2023-04-07
US20230140980A1 (en) 2023-05-11
JP7435785B2 (ja) 2024-02-21
CN115943267B (zh) 2025-12-12

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