JPWO2022230676A5 - - Google Patents

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Publication number
JPWO2022230676A5
JPWO2022230676A5 JP2023517436A JP2023517436A JPWO2022230676A5 JP WO2022230676 A5 JPWO2022230676 A5 JP WO2022230676A5 JP 2023517436 A JP2023517436 A JP 2023517436A JP 2023517436 A JP2023517436 A JP 2023517436A JP WO2022230676 A5 JPWO2022230676 A5 JP WO2022230676A5
Authority
JP
Japan
Prior art keywords
main surface
main plate
actuator according
main
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023517436A
Other languages
English (en)
Japanese (ja)
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JP7639897B2 (ja
JPWO2022230676A1 (https=
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Publication date
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Priority claimed from PCT/JP2022/017807 external-priority patent/WO2022230676A1/ja
Publication of JPWO2022230676A1 publication Critical patent/JPWO2022230676A1/ja
Publication of JPWO2022230676A5 publication Critical patent/JPWO2022230676A5/ja
Application granted granted Critical
Publication of JP7639897B2 publication Critical patent/JP7639897B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023517436A 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置 Active JP7639897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021074739 2021-04-27
JP2021074739 2021-04-27
PCT/JP2022/017807 WO2022230676A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022230676A1 JPWO2022230676A1 (https=) 2022-11-03
JPWO2022230676A5 true JPWO2022230676A5 (https=) 2024-02-01
JP7639897B2 JP7639897B2 (ja) 2025-03-05

Family

ID=83847462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517436A Active JP7639897B2 (ja) 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置

Country Status (4)

Country Link
US (1) US20240052823A1 (https=)
JP (1) JP7639897B2 (https=)
CN (1) CN117177821A (https=)
WO (1) WO2022230676A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042840A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ、および、流体制御装置
WO2026042841A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2307066A (en) * 1940-05-03 1943-01-05 Charles L Paulus Diaphragm
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2003326226A (ja) * 2002-05-08 2003-11-18 Seratekku:Kk 超音波振動子及びそれを用いた超音波洗浄器
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
EP2557312B1 (en) * 2010-05-21 2019-11-13 Murata Manufacturing Co., Ltd. Fluid pump
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
TWI553230B (zh) * 2014-09-15 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
CN107532584B (zh) * 2015-05-08 2019-12-27 株式会社村田制作所 泵和流体控制装置
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置

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