JPWO2021261395A5 - - Google Patents

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Publication number
JPWO2021261395A5
JPWO2021261395A5 JP2022531937A JP2022531937A JPWO2021261395A5 JP WO2021261395 A5 JPWO2021261395 A5 JP WO2021261395A5 JP 2022531937 A JP2022531937 A JP 2022531937A JP 2022531937 A JP2022531937 A JP 2022531937A JP WO2021261395 A5 JPWO2021261395 A5 JP WO2021261395A5
Authority
JP
Japan
Prior art keywords
flat plate
frame
actuator according
shape extending
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022531937A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021261395A1 (https=
JP7364078B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2021/023199 external-priority patent/WO2021261395A1/ja
Publication of JPWO2021261395A1 publication Critical patent/JPWO2021261395A1/ja
Publication of JPWO2021261395A5 publication Critical patent/JPWO2021261395A5/ja
Priority to JP2023172425A priority Critical patent/JP7626180B2/ja
Application granted granted Critical
Publication of JP7364078B2 publication Critical patent/JP7364078B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022531937A 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置 Active JP7364078B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023172425A JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020107697 2020-06-23
JP2020107697 2020-06-23
PCT/JP2021/023199 WO2021261395A1 (ja) 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023172425A Division JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021261395A1 JPWO2021261395A1 (https=) 2021-12-30
JPWO2021261395A5 true JPWO2021261395A5 (https=) 2023-03-10
JP7364078B2 JP7364078B2 (ja) 2023-10-18

Family

ID=79281282

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022531937A Active JP7364078B2 (ja) 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置
JP2023172425A Active JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023172425A Active JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Country Status (4)

Country Link
US (1) US12467446B2 (https=)
JP (2) JP7364078B2 (https=)
CN (1) CN115702291A (https=)
WO (1) WO2021261395A1 (https=)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
CA2654688C (en) * 2006-12-09 2011-07-26 Murata Manufacturing Co., Ltd. Piezoelectric pump
JP5170073B2 (ja) * 2009-12-24 2013-03-27 セイコーエプソン株式会社 接合体の形成方法、接合体およびインクジェット記録ヘッド
KR101244643B1 (ko) * 2010-04-30 2013-03-18 주식회사 리한도어 엑추에이터 어셈블리
EP2698537B1 (en) 2011-04-11 2018-10-17 Murata Manufacturing Co., Ltd. Actuator-support structure and pump device
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5692468B2 (ja) * 2012-08-10 2015-04-01 株式会社村田製作所 ブロア
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
EP3604810B1 (en) * 2014-02-21 2023-06-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
CN107532584B (zh) * 2015-05-08 2019-12-27 株式会社村田制作所 泵和流体控制装置
CN205779588U (zh) * 2016-06-24 2016-12-07 研能科技股份有限公司 压电致动器结构
JP6662496B2 (ja) * 2017-07-14 2020-03-11 株式会社村田製作所 振動構造、振動装置、および触覚提示装置
WO2019124029A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ
US11536260B2 (en) * 2018-09-17 2022-12-27 Microjet Technology Co., Ltd. Micro-electromechanical system pump
CN111629842B (zh) * 2018-12-27 2021-09-10 株式会社村田制作所 振动构造体和振动产生装置
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置

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