JP7364078B2 - アクチュエータ、および、流体制御装置 - Google Patents

アクチュエータ、および、流体制御装置 Download PDF

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Publication number
JP7364078B2
JP7364078B2 JP2022531937A JP2022531937A JP7364078B2 JP 7364078 B2 JP7364078 B2 JP 7364078B2 JP 2022531937 A JP2022531937 A JP 2022531937A JP 2022531937 A JP2022531937 A JP 2022531937A JP 7364078 B2 JP7364078 B2 JP 7364078B2
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JP
Japan
Prior art keywords
flat plate
frame
actuator
opening
peripheral end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022531937A
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English (en)
Japanese (ja)
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JPWO2021261395A5 (https=
JPWO2021261395A1 (https=
Inventor
友徳 川端
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021261395A1 publication Critical patent/JPWO2021261395A1/ja
Publication of JPWO2021261395A5 publication Critical patent/JPWO2021261395A5/ja
Priority to JP2023172425A priority Critical patent/JP7626180B2/ja
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Publication of JP7364078B2 publication Critical patent/JP7364078B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Actuator (AREA)
JP2022531937A 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置 Active JP7364078B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023172425A JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020107697 2020-06-23
JP2020107697 2020-06-23
PCT/JP2021/023199 WO2021261395A1 (ja) 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023172425A Division JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Publications (3)

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JPWO2021261395A1 JPWO2021261395A1 (https=) 2021-12-30
JPWO2021261395A5 JPWO2021261395A5 (https=) 2023-03-10
JP7364078B2 true JP7364078B2 (ja) 2023-10-18

Family

ID=79281282

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022531937A Active JP7364078B2 (ja) 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置
JP2023172425A Active JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Family Applications After (1)

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JP2023172425A Active JP7626180B2 (ja) 2020-06-23 2023-10-04 アクチュエータ、および、流体制御装置

Country Status (4)

Country Link
US (1) US12467446B2 (https=)
JP (2) JP7364078B2 (https=)
CN (1) CN115702291A (https=)
WO (1) WO2021261395A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016181833A1 (ja) 2015-05-08 2016-11-17 株式会社村田製作所 ポンプ、流体制御装置
WO2019013164A1 (ja) 2017-07-14 2019-01-17 株式会社村田製作所 振動構造、振動装置、および触覚提示装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
CA2654688C (en) * 2006-12-09 2011-07-26 Murata Manufacturing Co., Ltd. Piezoelectric pump
JP5170073B2 (ja) * 2009-12-24 2013-03-27 セイコーエプソン株式会社 接合体の形成方法、接合体およびインクジェット記録ヘッド
KR101244643B1 (ko) * 2010-04-30 2013-03-18 주식회사 리한도어 엑추에이터 어셈블리
EP2698537B1 (en) 2011-04-11 2018-10-17 Murata Manufacturing Co., Ltd. Actuator-support structure and pump device
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5692468B2 (ja) * 2012-08-10 2015-04-01 株式会社村田製作所 ブロア
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
EP3604810B1 (en) * 2014-02-21 2023-06-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
CN205779588U (zh) * 2016-06-24 2016-12-07 研能科技股份有限公司 压电致动器结构
WO2019124029A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ
US11536260B2 (en) * 2018-09-17 2022-12-27 Microjet Technology Co., Ltd. Micro-electromechanical system pump
CN111629842B (zh) * 2018-12-27 2021-09-10 株式会社村田制作所 振动构造体和振动产生装置
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016181833A1 (ja) 2015-05-08 2016-11-17 株式会社村田製作所 ポンプ、流体制御装置
WO2019013164A1 (ja) 2017-07-14 2019-01-17 株式会社村田製作所 振動構造、振動装置、および触覚提示装置

Also Published As

Publication number Publication date
WO2021261395A1 (ja) 2021-12-30
US12467446B2 (en) 2025-11-11
CN115702291A (zh) 2023-02-14
JP7626180B2 (ja) 2025-02-04
JP2024001137A (ja) 2024-01-09
JPWO2021261395A1 (https=) 2021-12-30
US20230108606A1 (en) 2023-04-06

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