CN115702291A - 致动器和流体控制装置 - Google Patents

致动器和流体控制装置 Download PDF

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Publication number
CN115702291A
CN115702291A CN202180043966.1A CN202180043966A CN115702291A CN 115702291 A CN115702291 A CN 115702291A CN 202180043966 A CN202180043966 A CN 202180043966A CN 115702291 A CN115702291 A CN 115702291A
Authority
CN
China
Prior art keywords
plate
actuator
opening
peripheral end
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180043966.1A
Other languages
English (en)
Chinese (zh)
Inventor
川端友德
田中伸拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115702291A publication Critical patent/CN115702291A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Actuator (AREA)
CN202180043966.1A 2020-06-23 2021-06-18 致动器和流体控制装置 Pending CN115702291A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-107697 2020-06-23
JP2020107697 2020-06-23
PCT/JP2021/023199 WO2021261395A1 (ja) 2020-06-23 2021-06-18 アクチュエータ、および、流体制御装置

Publications (1)

Publication Number Publication Date
CN115702291A true CN115702291A (zh) 2023-02-14

Family

ID=79281282

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180043966.1A Pending CN115702291A (zh) 2020-06-23 2021-06-18 致动器和流体控制装置

Country Status (4)

Country Link
US (1) US12467446B2 (https=)
JP (2) JP7364078B2 (https=)
CN (1) CN115702291A (https=)
WO (1) WO2021261395A1 (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2010120088A (ja) * 2009-12-24 2010-06-03 Seiko Epson Corp 接合体の形成方法および接合体
KR20110120993A (ko) * 2010-04-30 2011-11-07 대기오토모티브 주식회사 엑추에이터 어셈블리
US20130266461A1 (en) * 2011-04-11 2013-10-10 Murata Manufacturing Co., Ltd. Actuator support structure and pump device
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
CN205779588U (zh) * 2016-06-24 2016-12-07 研能科技股份有限公司 压电致动器结构
CN107532584A (zh) * 2015-05-08 2018-01-02 株式会社村田制作所 泵和流体控制装置
CN108050051A (zh) * 2014-02-21 2018-05-18 株式会社村田制作所 流体控制装置以及泵
US20190155391A1 (en) * 2017-07-14 2019-05-23 Murata Manufacturing Co., Ltd. Vibration structure, vibration device, and tactile sense presentation device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2654688C (en) * 2006-12-09 2011-07-26 Murata Manufacturing Co., Ltd. Piezoelectric pump
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5692468B2 (ja) * 2012-08-10 2015-04-01 株式会社村田製作所 ブロア
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
WO2019124029A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ
US11536260B2 (en) * 2018-09-17 2022-12-27 Microjet Technology Co., Ltd. Micro-electromechanical system pump
CN111629842B (zh) * 2018-12-27 2021-09-10 株式会社村田制作所 振动构造体和振动产生装置
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2010120088A (ja) * 2009-12-24 2010-06-03 Seiko Epson Corp 接合体の形成方法および接合体
KR20110120993A (ko) * 2010-04-30 2011-11-07 대기오토모티브 주식회사 엑추에이터 어셈블리
US20130266461A1 (en) * 2011-04-11 2013-10-10 Murata Manufacturing Co., Ltd. Actuator support structure and pump device
CN108050051A (zh) * 2014-02-21 2018-05-18 株式会社村田制作所 流体控制装置以及泵
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
CN107532584A (zh) * 2015-05-08 2018-01-02 株式会社村田制作所 泵和流体控制装置
US20180051686A1 (en) * 2015-05-08 2018-02-22 Murata Manufacturing Co., Ltd. Pump and fluid control device
CN205779588U (zh) * 2016-06-24 2016-12-07 研能科技股份有限公司 压电致动器结构
US20190155391A1 (en) * 2017-07-14 2019-05-23 Murata Manufacturing Co., Ltd. Vibration structure, vibration device, and tactile sense presentation device

Also Published As

Publication number Publication date
WO2021261395A1 (ja) 2021-12-30
US12467446B2 (en) 2025-11-11
JP7626180B2 (ja) 2025-02-04
JP2024001137A (ja) 2024-01-09
JPWO2021261395A1 (https=) 2021-12-30
JP7364078B2 (ja) 2023-10-18
US20230108606A1 (en) 2023-04-06

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