JP7194362B2 - 共振装置及び共振装置製造方法 - Google Patents
共振装置及び共振装置製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title 1
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 239000010408 film Substances 0.000 description 25
- 239000000758 substrate Substances 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 239000010409 thin film Substances 0.000 description 9
- 238000005452 bending Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- -1 scandium aluminum Chemical compound 0.000 description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
- H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02283—Vibrating means
- H03H2009/0233—Vibrating means comprising perforations
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
まず、図1を参照しつつ、本発明の一実施形態に係る共振装置の概略構成について説明する。図1は、本発明の一実施形態に係る共振装置10の構造を概略的に示す分解斜視図である。
図10は、図4に示した貫通孔27の周辺の構成の第1変形例を示す要部拡大平面図である。なお、第1変形例において、図4に示した貫通孔27と同一の構成については、同一の符号を付し、その説明を適宜省略する。また、同様の構成による同様の作用効果については、逐次言及しない。
図11は、図4に示した貫通孔27の周辺の構成の第2変形例を示す要部拡大平面図である。なお、第2変形例において、図4に示した貫通孔27と同一の構成については、同一の符号を付し、その説明を適宜省略する。また、同様の構成による同様の作用効果については、逐次言及しない。
Claims (7)
- 輪郭振動する振動部と、
前記振動部の少なくとも一部を囲むように形成される保持部と、
第1方向に沿って延在し、前記振動部と前記保持部とを接続する支持部と、を備え、
前記振動部は、前記支持部との間に連結部が形成されるように、前記第1方向に直交する第2方向に沿って延在する貫通孔を含み、
前記貫通孔における前記第2方向の長さは、前記連結部における第1方向の長さより大きく、
前記連結部における第1方向の長さに対する前記貫通孔における前記第2方向の長さの比率が、6.0以上8.3以下である、
共振子。 - 前記振動部は、複数の振動領域であって、各振動領域が隣り合う他の振動領域に対して逆位相で振動する、複数の振動領域を含む、
請求項1に記載の共振子。 - 前記振動部は、2以上の偶数の前記振動領域を含み、
前記支持部における前記第2方向の中心線は、該支持部が接続された前記振動領域における前記第2方向の中心線からずれている、
請求項2に記載の共振子。 - 前記支持部が接続された前記振動領域は、前記貫通孔を含み、
前記支持部における前記第2方向の中心線は、該支持部が接続された前記振動領域の前記貫通孔における前記第2方向の中心線に一致している、
請求項2又は3に記載の共振子。 - 前記支持部における前記第2方向の中心線は、該支持部が接続された前記振動領域における変位最小点に一致している、
請求項2から4のいずれか一項に記載の共振子。 - 前記貫通孔は、前記第2方向に沿って配置された複数の孔を含む、
請求項1から5のいずれか一項に記載の共振子。 - 請求項1から6のいずれか一項に記載の共振子と、
蓋体と、を備える、
共振装置。
Applications Claiming Priority (3)
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JP2019079391 | 2019-04-18 | ||
JP2019079391 | 2019-04-18 | ||
PCT/JP2019/049978 WO2020213213A1 (ja) | 2019-04-18 | 2019-12-20 | 共振装置及び共振装置製造方法 |
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JPWO2020213213A1 JPWO2020213213A1 (ja) | 2020-10-22 |
JP7194362B2 true JP7194362B2 (ja) | 2022-12-22 |
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US (1) | US11411546B2 (ja) |
JP (1) | JP7194362B2 (ja) |
CN (1) | CN113631499A (ja) |
WO (1) | WO2020213213A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004135357A (ja) | 2002-09-19 | 2004-04-30 | Piedekku Gijutsu Kenkyusho:Kk | 水晶振動子、水晶ユニット、水晶発振器とそれらの製造方法 |
JP2005094734A (ja) | 2003-06-30 | 2005-04-07 | Piedekku Gijutsu Kenkyusho:Kk | 振動子と振動子ユニットと発振器と電子機器 |
JP2010232943A (ja) | 2009-03-27 | 2010-10-14 | Epson Toyocom Corp | 輪郭振動片 |
JP2012156592A (ja) | 2011-01-21 | 2012-08-16 | Seiko Epson Corp | 圧電振動片、圧電振動子、電子デバイス |
JP2013143651A (ja) | 2012-01-10 | 2013-07-22 | Nippon Dempa Kogyo Co Ltd | ディスク振動子及び電子部品 |
WO2016114237A1 (ja) | 2015-01-16 | 2016-07-21 | 株式会社村田製作所 | 共振子 |
WO2016159016A1 (ja) | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振子 |
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JP3114526B2 (ja) * | 1994-10-17 | 2000-12-04 | 株式会社村田製作所 | チップ型圧電共振部品 |
CN101595640A (zh) * | 2007-02-13 | 2009-12-02 | 株式会社大真空 | 压电谐振器装置 |
JP6003194B2 (ja) * | 2012-04-27 | 2016-10-05 | セイコーエプソン株式会社 | ベース基板、電子デバイスおよびベース基板の製造方法 |
WO2016006433A1 (ja) | 2014-07-10 | 2016-01-14 | 株式会社村田製作所 | 振動装置 |
WO2016063863A1 (ja) * | 2014-10-22 | 2016-04-28 | 株式会社村田製作所 | 共振子及び共振装置 |
CN109075767B (zh) * | 2016-05-26 | 2022-04-29 | 株式会社村田制作所 | 谐振子以及谐振装置 |
CN108471297A (zh) * | 2018-03-21 | 2018-08-31 | 东南大学 | 具有通孔结构的低热弹性阻尼两端固定微梁谐振器 |
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2019
- 2019-12-20 WO PCT/JP2019/049978 patent/WO2020213213A1/ja active Application Filing
- 2019-12-20 CN CN201980094545.4A patent/CN113631499A/zh active Pending
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004135357A (ja) | 2002-09-19 | 2004-04-30 | Piedekku Gijutsu Kenkyusho:Kk | 水晶振動子、水晶ユニット、水晶発振器とそれらの製造方法 |
JP2005094734A (ja) | 2003-06-30 | 2005-04-07 | Piedekku Gijutsu Kenkyusho:Kk | 振動子と振動子ユニットと発振器と電子機器 |
JP2010232943A (ja) | 2009-03-27 | 2010-10-14 | Epson Toyocom Corp | 輪郭振動片 |
JP2012156592A (ja) | 2011-01-21 | 2012-08-16 | Seiko Epson Corp | 圧電振動片、圧電振動子、電子デバイス |
JP2013143651A (ja) | 2012-01-10 | 2013-07-22 | Nippon Dempa Kogyo Co Ltd | ディスク振動子及び電子部品 |
WO2016114237A1 (ja) | 2015-01-16 | 2016-07-21 | 株式会社村田製作所 | 共振子 |
WO2016159016A1 (ja) | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振子 |
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US11411546B2 (en) | 2022-08-09 |
WO2020213213A1 (ja) | 2020-10-22 |
CN113631499A (zh) | 2021-11-09 |
JPWO2020213213A1 (ja) | 2020-10-22 |
US20210384882A1 (en) | 2021-12-09 |
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