CN117177821A - 致动器以及流体控制装置 - Google Patents

致动器以及流体控制装置 Download PDF

Info

Publication number
CN117177821A
CN117177821A CN202280029297.7A CN202280029297A CN117177821A CN 117177821 A CN117177821 A CN 117177821A CN 202280029297 A CN202280029297 A CN 202280029297A CN 117177821 A CN117177821 A CN 117177821A
Authority
CN
China
Prior art keywords
actuator
main
main surface
center
main plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280029297.7A
Other languages
English (en)
Chinese (zh)
Inventor
川端友德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN117177821A publication Critical patent/CN117177821A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202280029297.7A 2021-04-27 2022-04-14 致动器以及流体控制装置 Pending CN117177821A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-074739 2021-04-27
JP2021074739 2021-04-27
PCT/JP2022/017807 WO2022230676A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置

Publications (1)

Publication Number Publication Date
CN117177821A true CN117177821A (zh) 2023-12-05

Family

ID=83847462

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280029297.7A Pending CN117177821A (zh) 2021-04-27 2022-04-14 致动器以及流体控制装置

Country Status (4)

Country Link
US (1) US20240052823A1 (https=)
JP (1) JP7639897B2 (https=)
CN (1) CN117177821A (https=)
WO (1) WO2022230676A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042840A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ、および、流体制御装置
WO2026042841A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
CN102597520A (zh) * 2010-05-21 2012-07-18 株式会社村田制作所 流体泵
CN107532584A (zh) * 2015-05-08 2018-01-02 株式会社村田制作所 泵和流体控制装置
US20210095659A1 (en) * 2019-09-30 2021-04-01 Murata Manufacturing Co., Ltd. Fluid control device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2307066A (en) * 1940-05-03 1943-01-05 Charles L Paulus Diaphragm
JP2003326226A (ja) * 2002-05-08 2003-11-18 Seratekku:Kk 超音波振動子及びそれを用いた超音波洗浄器
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
TWI553230B (zh) * 2014-09-15 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2009293507A (ja) * 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
CN102597520A (zh) * 2010-05-21 2012-07-18 株式会社村田制作所 流体泵
CN107532584A (zh) * 2015-05-08 2018-01-02 株式会社村田制作所 泵和流体控制装置
US20210095659A1 (en) * 2019-09-30 2021-04-01 Murata Manufacturing Co., Ltd. Fluid control device

Also Published As

Publication number Publication date
JP7639897B2 (ja) 2025-03-05
WO2022230676A1 (ja) 2022-11-03
JPWO2022230676A1 (https=) 2022-11-03
US20240052823A1 (en) 2024-02-15

Similar Documents

Publication Publication Date Title
US11265657B2 (en) Piezoelectric MEMS microphone
JP7460343B2 (ja) トランスデューサ
CN103958079B (zh) 具有环形塌陷区域的预塌陷电容式微机械换能器元件
CN117177821A (zh) 致动器以及流体控制装置
JP5798699B1 (ja) 電気音響変換装置
US12313054B2 (en) Fluid control device
WO2012050172A1 (ja) 超音波トランスデューサおよびそれを用いた超音波診断装置
US10178472B1 (en) Omnidirectional acoustic sensor
US20100007244A1 (en) Piezoelectric Motor and Method of Manufacturing the Same
JP2020195248A (ja) アクチュエータ
WO2019073739A1 (ja) ポンプ、流体制御装置
US11664745B2 (en) Ultrasonic actuator for a rotary drive
US20230364645A1 (en) Ultrasonic motor
US20160133824A1 (en) Actuator
JP7616233B2 (ja) 流体制御装置
CN114041013B (zh) 流体控制装置
CN114746650B (zh) 致动器以及流体控制装置
CN115943267A (zh) 流体控制装置
JP7243830B2 (ja) 流体制御装置
KR102590942B1 (ko) 적층형 링형 압전체 및 그의 제조 방법
US20240223109A1 (en) Ultrasonic motor
WO2025197617A1 (ja) アクチュエータおよび流体制御装置
KR20240160093A (ko) Mems 소자
CN120569562A (zh) 流体控制装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination