JP7639897B2 - アクチュエータ、および、流体制御装置 - Google Patents

アクチュエータ、および、流体制御装置 Download PDF

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Publication number
JP7639897B2
JP7639897B2 JP2023517436A JP2023517436A JP7639897B2 JP 7639897 B2 JP7639897 B2 JP 7639897B2 JP 2023517436 A JP2023517436 A JP 2023517436A JP 2023517436 A JP2023517436 A JP 2023517436A JP 7639897 B2 JP7639897 B2 JP 7639897B2
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Japan
Prior art keywords
actuator
main plate
main
piezoelectric element
view
Prior art date
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JP2023517436A
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English (en)
Japanese (ja)
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JPWO2022230676A5 (https=
JPWO2022230676A1 (https=
Inventor
友徳 川端
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of JPWO2022230676A1 publication Critical patent/JPWO2022230676A1/ja
Publication of JPWO2022230676A5 publication Critical patent/JPWO2022230676A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2023517436A 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置 Active JP7639897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021074739 2021-04-27
JP2021074739 2021-04-27
PCT/JP2022/017807 WO2022230676A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022230676A1 JPWO2022230676A1 (https=) 2022-11-03
JPWO2022230676A5 JPWO2022230676A5 (https=) 2024-02-01
JP7639897B2 true JP7639897B2 (ja) 2025-03-05

Family

ID=83847462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517436A Active JP7639897B2 (ja) 2021-04-27 2022-04-14 アクチュエータ、および、流体制御装置

Country Status (4)

Country Link
US (1) US20240052823A1 (https=)
JP (1) JP7639897B2 (https=)
CN (1) CN117177821A (https=)
WO (1) WO2022230676A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042840A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ、および、流体制御装置
WO2026042841A1 (ja) * 2024-08-23 2026-02-26 株式会社村田製作所 アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009293507A (ja) 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
WO2016181833A1 (ja) 2015-05-08 2016-11-17 株式会社村田製作所 ポンプ、流体制御装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2307066A (en) * 1940-05-03 1943-01-05 Charles L Paulus Diaphragm
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
JPS6431480A (en) * 1987-07-27 1989-02-01 Nec Corp Piezoelectric vibration plate
JP2003326226A (ja) * 2002-05-08 2003-11-18 Seratekku:Kk 超音波振動子及びそれを用いた超音波洗浄器
EP2557312B1 (en) * 2010-05-21 2019-11-13 Murata Manufacturing Co., Ltd. Fluid pump
TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
TWI553230B (zh) * 2014-09-15 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
WO2016063136A1 (en) * 2014-10-21 2016-04-28 Handa Hisayuki System and method for efficient cryogenic carbon dioxide capture from flue gas
JP7120196B2 (ja) * 2019-09-30 2022-08-17 株式会社村田製作所 流体制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009293507A (ja) 2008-06-05 2009-12-17 Alps Electric Co Ltd 圧電ポンプ
WO2016181833A1 (ja) 2015-05-08 2016-11-17 株式会社村田製作所 ポンプ、流体制御装置

Also Published As

Publication number Publication date
WO2022230676A1 (ja) 2022-11-03
JPWO2022230676A1 (https=) 2022-11-03
US20240052823A1 (en) 2024-02-15
CN117177821A (zh) 2023-12-05

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