JPWO2021002100A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2021002100A5
JPWO2021002100A5 JP2021529904A JP2021529904A JPWO2021002100A5 JP WO2021002100 A5 JPWO2021002100 A5 JP WO2021002100A5 JP 2021529904 A JP2021529904 A JP 2021529904A JP 2021529904 A JP2021529904 A JP 2021529904A JP WO2021002100 A5 JPWO2021002100 A5 JP WO2021002100A5
Authority
JP
Japan
Prior art keywords
main surface
main plate
central portion
pump chamber
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021529904A
Other languages
English (en)
Japanese (ja)
Other versions
JP7243829B2 (ja
JPWO2021002100A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2020/019175 external-priority patent/WO2021002100A1/ja
Publication of JPWO2021002100A1 publication Critical patent/JPWO2021002100A1/ja
Publication of JPWO2021002100A5 publication Critical patent/JPWO2021002100A5/ja
Application granted granted Critical
Publication of JP7243829B2 publication Critical patent/JP7243829B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021529904A 2019-07-03 2020-05-14 流体制御装置 Active JP7243829B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019124102 2019-07-03
JP2019124102 2019-07-03
PCT/JP2020/019175 WO2021002100A1 (ja) 2019-07-03 2020-05-14 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021002100A1 JPWO2021002100A1 (https=) 2021-01-07
JPWO2021002100A5 true JPWO2021002100A5 (https=) 2022-03-04
JP7243829B2 JP7243829B2 (ja) 2023-03-22

Family

ID=74100668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021529904A Active JP7243829B2 (ja) 2019-07-03 2020-05-14 流体制御装置

Country Status (4)

Country Link
US (1) US11821414B2 (https=)
JP (1) JP7243829B2 (https=)
CN (2) CN117307453A (https=)
WO (1) WO2021002100A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7435785B2 (ja) * 2020-07-17 2024-02-21 株式会社村田製作所 流体制御装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2273133B (en) * 1992-12-04 1995-10-18 William Alexander Courtney Displacement pump
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
JP5407333B2 (ja) * 2007-01-23 2014-02-05 日本電気株式会社 ダイヤフラムポンプ
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
CA2878279C (en) * 2012-07-05 2020-06-30 Kci Licensing, Inc. Systems and methods for regulating the resonant frequency of a disc pump cavity
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
CN107735573B (zh) * 2015-04-27 2020-10-27 株式会社村田制作所 泵
CN108278196B (zh) * 2017-01-05 2022-05-17 研能科技股份有限公司 流体控制装置
JP2019031946A (ja) * 2017-08-09 2019-02-28 株式会社村田製作所 流体制御装置、血圧計、搾乳器、および、陰圧閉鎖療法装置
CN107575365B (zh) * 2017-09-30 2023-05-26 苏州攀特电陶科技股份有限公司 压电泵及电子产品
WO2019073739A1 (ja) * 2017-10-10 2019-04-18 株式会社村田製作所 ポンプ、流体制御装置
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2020111064A1 (ja) * 2018-11-27 2020-06-04 株式会社村田製作所 ポンプ
WO2020195075A1 (ja) * 2019-03-27 2020-10-01 株式会社村田製作所 圧電ポンプ

Similar Documents

Publication Publication Date Title
US9951879B2 (en) Valve and fluid control apparatus
JP6520993B2 (ja) ポンプ
JP6741176B2 (ja) ポンプおよび流体制御装置
US11725646B2 (en) Fluid control device
US12313054B2 (en) Fluid control device
US11293428B2 (en) Pump and fluid control device
TWI810920B (zh) 閥及流體控制裝置
JP6633953B2 (ja) マイクロホン
JP2005188355A (ja) ダイアフラムポンプ
EP1947339B1 (en) Pump using unimorph vibration diaphragm
JPWO2021002100A5 (https=)
EP3579578B1 (en) Miniature receiver
JP7243829B2 (ja) 流体制御装置
JPWO2022230676A5 (https=)
JPWO2017195475A1 (ja) バルブ、流体制御装置および血圧計
JP7616233B2 (ja) 流体制御装置
JP7243830B2 (ja) 流体制御装置
JP2000075110A (ja) 可変焦点レンズ
JPWO2019130853A1 (ja) ポンプおよび流体制御装置
JPWO2021002101A5 (https=)
KR100509560B1 (ko) 일렉트릿 콘덴서 마이크로폰 조립체
CN114746650B (zh) 致动器以及流体控制装置
US11317220B2 (en) Structure of micro-electro-mechanical-system microphone
TW202526205A (zh) 閥、流體控制裝置
WO2024135219A1 (ja) 流体制御装置