JPWO2021002101A5 - - Google Patents

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Publication number
JPWO2021002101A5
JPWO2021002101A5 JP2021529905A JP2021529905A JPWO2021002101A5 JP WO2021002101 A5 JPWO2021002101 A5 JP WO2021002101A5 JP 2021529905 A JP2021529905 A JP 2021529905A JP 2021529905 A JP2021529905 A JP 2021529905A JP WO2021002101 A5 JPWO2021002101 A5 JP WO2021002101A5
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JP
Japan
Prior art keywords
film
control device
fluid control
view
space
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Application number
JP2021529905A
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English (en)
Japanese (ja)
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JP7243830B2 (ja
JPWO2021002101A1 (https=
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Priority claimed from PCT/JP2020/019176 external-priority patent/WO2021002101A1/ja
Publication of JPWO2021002101A1 publication Critical patent/JPWO2021002101A1/ja
Publication of JPWO2021002101A5 publication Critical patent/JPWO2021002101A5/ja
Application granted granted Critical
Publication of JP7243830B2 publication Critical patent/JP7243830B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021529905A 2019-07-03 2020-05-14 流体制御装置 Active JP7243830B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019124101 2019-07-03
JP2019124101 2019-07-03
PCT/JP2020/019176 WO2021002101A1 (ja) 2019-07-03 2020-05-14 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021002101A1 JPWO2021002101A1 (https=) 2021-01-07
JPWO2021002101A5 true JPWO2021002101A5 (https=) 2022-03-22
JP7243830B2 JP7243830B2 (ja) 2023-03-22

Family

ID=74101001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021529905A Active JP7243830B2 (ja) 2019-07-03 2020-05-14 流体制御装置

Country Status (5)

Country Link
US (1) US12140134B2 (https=)
JP (1) JP7243830B2 (https=)
CN (1) CN114127421B (https=)
GB (1) GB2599820B (https=)
WO (1) WO2021002101A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
US20090182261A1 (en) * 2008-01-11 2009-07-16 Seiko Epson Corporation Fluid Ejecting Apparatus, Surgical Operation Instrument
CN101520038B (zh) * 2008-02-26 2011-07-20 研能科技股份有限公司 微液滴流体输送装置
JP5309786B2 (ja) * 2008-08-21 2013-10-09 株式会社リコー マイクロバルブ、マイクロポンプ、及びマイクロバルブの製造方法
JP2010216398A (ja) * 2009-03-17 2010-09-30 Tdk Corp 圧電ポンプ
US20140248170A1 (en) * 2011-09-27 2014-09-04 Kikuchiseisakusho Co., Ltd. Microdiaphragm pump
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) * 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
DE102015215738A1 (de) * 2015-08-18 2017-02-23 Continental Reifen Deutschland Gmbh Fahrzeugluftreifen
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

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