JP7243830B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

Info

Publication number
JP7243830B2
JP7243830B2 JP2021529905A JP2021529905A JP7243830B2 JP 7243830 B2 JP7243830 B2 JP 7243830B2 JP 2021529905 A JP2021529905 A JP 2021529905A JP 2021529905 A JP2021529905 A JP 2021529905A JP 7243830 B2 JP7243830 B2 JP 7243830B2
Authority
JP
Japan
Prior art keywords
film
control device
fluid control
movable
main plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021529905A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021002101A1 (https=
JPWO2021002101A5 (https=
Inventor
伸拓 田中
友徳 川端
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021002101A1 publication Critical patent/JPWO2021002101A1/ja
Publication of JPWO2021002101A5 publication Critical patent/JPWO2021002101A5/ja
Application granted granted Critical
Publication of JP7243830B2 publication Critical patent/JP7243830B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021529905A 2019-07-03 2020-05-14 流体制御装置 Active JP7243830B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019124101 2019-07-03
JP2019124101 2019-07-03
PCT/JP2020/019176 WO2021002101A1 (ja) 2019-07-03 2020-05-14 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021002101A1 JPWO2021002101A1 (https=) 2021-01-07
JPWO2021002101A5 JPWO2021002101A5 (https=) 2022-03-22
JP7243830B2 true JP7243830B2 (ja) 2023-03-22

Family

ID=74101001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021529905A Active JP7243830B2 (ja) 2019-07-03 2020-05-14 流体制御装置

Country Status (5)

Country Link
US (1) US12140134B2 (https=)
JP (1) JP7243830B2 (https=)
CN (1) CN114127421B (https=)
GB (1) GB2599820B (https=)
WO (1) WO2021002101A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201057136Y (zh) 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
JP2008527232A (ja) 2004-12-30 2008-07-24 アダプティブエナジー・リミテッド・ライアビリティー・カンパニー ポンプ用のアクティブバルブおよびアクティブなバルブ制御
WO2016013390A1 (ja) 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090182261A1 (en) * 2008-01-11 2009-07-16 Seiko Epson Corporation Fluid Ejecting Apparatus, Surgical Operation Instrument
CN101520038B (zh) * 2008-02-26 2011-07-20 研能科技股份有限公司 微液滴流体输送装置
JP5309786B2 (ja) * 2008-08-21 2013-10-09 株式会社リコー マイクロバルブ、マイクロポンプ、及びマイクロバルブの製造方法
JP2010216398A (ja) * 2009-03-17 2010-09-30 Tdk Corp 圧電ポンプ
US20140248170A1 (en) * 2011-09-27 2014-09-04 Kikuchiseisakusho Co., Ltd. Microdiaphragm pump
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
DE102015215738A1 (de) * 2015-08-18 2017-02-23 Continental Reifen Deutschland Gmbh Fahrzeugluftreifen
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008527232A (ja) 2004-12-30 2008-07-24 アダプティブエナジー・リミテッド・ライアビリティー・カンパニー ポンプ用のアクティブバルブおよびアクティブなバルブ制御
CN201057136Y (zh) 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
WO2016013390A1 (ja) 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置

Also Published As

Publication number Publication date
JPWO2021002101A1 (https=) 2021-01-07
CN114127421B (zh) 2023-07-07
GB2599820A (en) 2022-04-13
US12140134B2 (en) 2024-11-12
WO2021002101A1 (ja) 2021-01-07
GB2599820B (en) 2023-04-26
CN114127421A (zh) 2022-03-01
US20220120268A1 (en) 2022-04-21

Similar Documents

Publication Publication Date Title
US11725646B2 (en) Fluid control device
US11041580B2 (en) Valve and fluid control device
US9482217B2 (en) Fluid control device
WO2012140967A1 (ja) アクチュエータ支持構造およびポンプ装置
US12313054B2 (en) Fluid control device
US11293428B2 (en) Pump and fluid control device
US20250172217A1 (en) Fluid control device
JP6319517B2 (ja) ポンプ
JP7243830B2 (ja) 流体制御装置
JP7243829B2 (ja) 流体制御装置
JP6769568B2 (ja) ポンプおよび流体制御装置
JP7616233B2 (ja) 流体制御装置
CN114746650B (zh) 致动器以及流体控制装置
JP7364078B2 (ja) アクチュエータ、および、流体制御装置
WO2024135219A1 (ja) 流体制御装置
JPWO2021002101A5 (https=)
WO2025197617A1 (ja) アクチュエータおよび流体制御装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211227

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20211227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20221206

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230125

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230207

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230220

R150 Certificate of patent or registration of utility model

Ref document number: 7243830

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150