CN114127421B - 流体控制装置 - Google Patents

流体控制装置 Download PDF

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Publication number
CN114127421B
CN114127421B CN202080048399.4A CN202080048399A CN114127421B CN 114127421 B CN114127421 B CN 114127421B CN 202080048399 A CN202080048399 A CN 202080048399A CN 114127421 B CN114127421 B CN 114127421B
Authority
CN
China
Prior art keywords
film
control device
fluid control
movable
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080048399.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN114127421A (zh
Inventor
田中伸拓
川端友德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN114127421A publication Critical patent/CN114127421A/zh
Application granted granted Critical
Publication of CN114127421B publication Critical patent/CN114127421B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202080048399.4A 2019-07-03 2020-05-14 流体控制装置 Active CN114127421B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019124101 2019-07-03
JP2019-124101 2019-07-03
PCT/JP2020/019176 WO2021002101A1 (ja) 2019-07-03 2020-05-14 流体制御装置

Publications (2)

Publication Number Publication Date
CN114127421A CN114127421A (zh) 2022-03-01
CN114127421B true CN114127421B (zh) 2023-07-07

Family

ID=74101001

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080048399.4A Active CN114127421B (zh) 2019-07-03 2020-05-14 流体控制装置

Country Status (5)

Country Link
US (1) US12140134B2 (https=)
JP (1) JP7243830B2 (https=)
CN (1) CN114127421B (https=)
GB (1) GB2599820B (https=)
WO (1) WO2021002101A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
US20090182261A1 (en) * 2008-01-11 2009-07-16 Seiko Epson Corporation Fluid Ejecting Apparatus, Surgical Operation Instrument
CN101520038B (zh) * 2008-02-26 2011-07-20 研能科技股份有限公司 微液滴流体输送装置
JP5309786B2 (ja) * 2008-08-21 2013-10-09 株式会社リコー マイクロバルブ、マイクロポンプ、及びマイクロバルブの製造方法
JP2010216398A (ja) * 2009-03-17 2010-09-30 Tdk Corp 圧電ポンプ
US20140248170A1 (en) * 2011-09-27 2014-09-04 Kikuchiseisakusho Co., Ltd. Microdiaphragm pump
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
JP6103151B2 (ja) * 2014-07-25 2017-03-29 株式会社村田製作所 気体制御装置
DE102015215738A1 (de) * 2015-08-18 2017-02-23 Continental Reifen Deutschland Gmbh Fahrzeugluftreifen
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Also Published As

Publication number Publication date
JP7243830B2 (ja) 2023-03-22
JPWO2021002101A1 (https=) 2021-01-07
GB2599820A (en) 2022-04-13
US12140134B2 (en) 2024-11-12
WO2021002101A1 (ja) 2021-01-07
GB2599820B (en) 2023-04-26
CN114127421A (zh) 2022-03-01
US20220120268A1 (en) 2022-04-21

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