JPWO2021002101A1 - - Google Patents

Info

Publication number
JPWO2021002101A1
JPWO2021002101A1 JP2021529905A JP2021529905A JPWO2021002101A1 JP WO2021002101 A1 JPWO2021002101 A1 JP WO2021002101A1 JP 2021529905 A JP2021529905 A JP 2021529905A JP 2021529905 A JP2021529905 A JP 2021529905A JP WO2021002101 A1 JPWO2021002101 A1 JP WO2021002101A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021529905A
Other languages
Japanese (ja)
Other versions
JP7243830B2 (ja
JPWO2021002101A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021002101A1 publication Critical patent/JPWO2021002101A1/ja
Publication of JPWO2021002101A5 publication Critical patent/JPWO2021002101A5/ja
Application granted granted Critical
Publication of JP7243830B2 publication Critical patent/JP7243830B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009Special features
    • F04B43/0054Special features particularities of the flexible members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/1037Flap valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16Casings; Cylinders; Cylinder liners or heads; Fluid connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021529905A 2019-07-03 2020-05-14 流体制御装置 Active JP7243830B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019124101 2019-07-03
JP2019124101 2019-07-03
PCT/JP2020/019176 WO2021002101A1 (ja) 2019-07-03 2020-05-14 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021002101A1 true JPWO2021002101A1 (https=) 2021-01-07
JPWO2021002101A5 JPWO2021002101A5 (https=) 2022-03-22
JP7243830B2 JP7243830B2 (ja) 2023-03-22

Family

ID=74101001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021529905A Active JP7243830B2 (ja) 2019-07-03 2020-05-14 流体制御装置

Country Status (5)

Country Link
US (1) US12140134B2 (https=)
JP (1) JP7243830B2 (https=)
CN (1) CN114127421B (https=)
GB (1) GB2599820B (https=)
WO (1) WO2021002101A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
JP2008527232A (ja) * 2004-12-30 2008-07-24 アダプティブエナジー・リミテッド・ライアビリティー・カンパニー ポンプ用のアクティブバルブおよびアクティブなバルブ制御
WO2016013390A1 (ja) * 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090182261A1 (en) * 2008-01-11 2009-07-16 Seiko Epson Corporation Fluid Ejecting Apparatus, Surgical Operation Instrument
CN101520038B (zh) * 2008-02-26 2011-07-20 研能科技股份有限公司 微液滴流体输送装置
JP5309786B2 (ja) * 2008-08-21 2013-10-09 株式会社リコー マイクロバルブ、マイクロポンプ、及びマイクロバルブの製造方法
JP2010216398A (ja) * 2009-03-17 2010-09-30 Tdk Corp 圧電ポンプ
US20140248170A1 (en) * 2011-09-27 2014-09-04 Kikuchiseisakusho Co., Ltd. Microdiaphragm pump
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
DE102015215738A1 (de) * 2015-08-18 2017-02-23 Continental Reifen Deutschland Gmbh Fahrzeugluftreifen
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2021171917A1 (ja) * 2020-02-26 2021-09-02 株式会社村田製作所 流体制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008527232A (ja) * 2004-12-30 2008-07-24 アダプティブエナジー・リミテッド・ライアビリティー・カンパニー ポンプ用のアクティブバルブおよびアクティブなバルブ制御
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
WO2016013390A1 (ja) * 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置

Also Published As

Publication number Publication date
JP7243830B2 (ja) 2023-03-22
CN114127421B (zh) 2023-07-07
GB2599820A (en) 2022-04-13
US12140134B2 (en) 2024-11-12
WO2021002101A1 (ja) 2021-01-07
GB2599820B (en) 2023-04-26
CN114127421A (zh) 2022-03-01
US20220120268A1 (en) 2022-04-21

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