CN117307453A - 流体控制装置 - Google Patents

流体控制装置 Download PDF

Info

Publication number
CN117307453A
CN117307453A CN202311100524.3A CN202311100524A CN117307453A CN 117307453 A CN117307453 A CN 117307453A CN 202311100524 A CN202311100524 A CN 202311100524A CN 117307453 A CN117307453 A CN 117307453A
Authority
CN
China
Prior art keywords
main
control device
film
fluid control
main plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311100524.3A
Other languages
English (en)
Chinese (zh)
Inventor
田中伸拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN117307453A publication Critical patent/CN117307453A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202311100524.3A 2019-07-03 2020-05-14 流体控制装置 Pending CN117307453A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2019-124102 2019-07-03
JP2019124102 2019-07-03
PCT/JP2020/019175 WO2021002100A1 (ja) 2019-07-03 2020-05-14 流体制御装置
CN202080048411.1A CN114041013B (zh) 2019-07-03 2020-05-14 流体控制装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN202080048411.1A Division CN114041013B (zh) 2019-07-03 2020-05-14 流体控制装置

Publications (1)

Publication Number Publication Date
CN117307453A true CN117307453A (zh) 2023-12-29

Family

ID=74100668

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202311100524.3A Pending CN117307453A (zh) 2019-07-03 2020-05-14 流体控制装置
CN202080048411.1A Active CN114041013B (zh) 2019-07-03 2020-05-14 流体控制装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202080048411.1A Active CN114041013B (zh) 2019-07-03 2020-05-14 流体控制装置

Country Status (4)

Country Link
US (1) US11821414B2 (https=)
JP (1) JP7243829B2 (https=)
CN (2) CN117307453A (https=)
WO (1) WO2021002100A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7435785B2 (ja) * 2020-07-17 2024-02-21 株式会社村田製作所 流体制御装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2273133A (en) * 1992-12-04 1994-06-08 William Alexander Courtney Electromagnetic displacement pump.
US20090010780A1 (en) * 2006-03-29 2009-01-08 Murata Manufacturing Co., Ltd. Micropump
CN101589233A (zh) * 2007-01-23 2009-11-25 日本电气株式会社 隔膜泵
JP2015522123A (ja) * 2012-07-05 2015-08-03 ケーシーアイ ライセンシング インコーポレイテッド ディスクポンプキャビティの共振周波数を調整するためのシステムおよび方法
WO2016013390A1 (ja) * 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置
CN107575365A (zh) * 2017-09-30 2018-01-12 苏州攀特电陶科技股份有限公司 压电泵及电子产品
CN107735573A (zh) * 2015-04-27 2018-02-23 株式会社村田制作所 泵
WO2019073739A1 (ja) * 2017-10-10 2019-04-18 株式会社村田製作所 ポンプ、流体制御装置
CN112789407A (zh) * 2018-11-27 2021-05-11 株式会社村田制作所 泵

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
CN201057136Y (zh) * 2007-05-25 2008-05-07 吉林大学 压电振子主动阀式压电泵
WO2016009870A1 (ja) 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
CN108278196B (zh) * 2017-01-05 2022-05-17 研能科技股份有限公司 流体控制装置
JP2019031946A (ja) * 2017-08-09 2019-02-28 株式会社村田製作所 流体制御装置、血圧計、搾乳器、および、陰圧閉鎖療法装置
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
WO2020195075A1 (ja) * 2019-03-27 2020-10-01 株式会社村田製作所 圧電ポンプ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2273133A (en) * 1992-12-04 1994-06-08 William Alexander Courtney Electromagnetic displacement pump.
US20090010780A1 (en) * 2006-03-29 2009-01-08 Murata Manufacturing Co., Ltd. Micropump
CN101589233A (zh) * 2007-01-23 2009-11-25 日本电气株式会社 隔膜泵
JP2015522123A (ja) * 2012-07-05 2015-08-03 ケーシーアイ ライセンシング インコーポレイテッド ディスクポンプキャビティの共振周波数を調整するためのシステムおよび方法
WO2016013390A1 (ja) * 2014-07-25 2016-01-28 株式会社村田製作所 流体制御装置
CN107735573A (zh) * 2015-04-27 2018-02-23 株式会社村田制作所 泵
CN107575365A (zh) * 2017-09-30 2018-01-12 苏州攀特电陶科技股份有限公司 压电泵及电子产品
WO2019073739A1 (ja) * 2017-10-10 2019-04-18 株式会社村田製作所 ポンプ、流体制御装置
CN112789407A (zh) * 2018-11-27 2021-05-11 株式会社村田制作所 泵

Also Published As

Publication number Publication date
CN114041013B (zh) 2023-09-19
CN114041013A (zh) 2022-02-11
WO2021002100A1 (ja) 2021-01-07
JP7243829B2 (ja) 2023-03-22
US20220074401A1 (en) 2022-03-10
US11821414B2 (en) 2023-11-21
JPWO2021002100A1 (https=) 2021-01-07

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