JP4793441B2 - 圧電マイクロポンプ - Google Patents
圧電マイクロポンプ Download PDFInfo
- Publication number
- JP4793441B2 JP4793441B2 JP2008506195A JP2008506195A JP4793441B2 JP 4793441 B2 JP4793441 B2 JP 4793441B2 JP 2008506195 A JP2008506195 A JP 2008506195A JP 2008506195 A JP2008506195 A JP 2008506195A JP 4793441 B2 JP4793441 B2 JP 4793441B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- diaphragm
- pump chamber
- piezoelectric
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 description 29
- 239000007788 liquid Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 8
- 229920001971 elastomer Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007779 soft material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Description
1 底板
1a 凹部(振動室)
1a1 底壁(支持部材)
1d 枕部(支持部材)
2 圧電素子
3 ダイヤフラム
3a 余白部
4 枠体
5 天板
6 ポンプ室
7 流入通路
8 排出通路
10,11 逆止弁
Claims (5)
- ポンプ室をダイヤフラムで隔離し、ダイヤフラムの背面に圧電素子を配置し、圧電素子の屈曲変形によりダイヤフラムを追従変形させ、ポンプ室を容積変化させてポンプ室内の流体を輸送する圧電マイクロポンプにおいて、
上記圧電素子の背面に当接してこれを支持する支持部材が設けられ、
上記圧電素子は上記ダイヤフラムの可変位領域より小形に形成されており、上記ダイヤフラムには上記圧電素子より外周側の全周に亘って、上記圧電素子が配置されていない余白部が設けられていることを特徴とする圧電マイクロポンプ。 - 上記支持部材は、非駆動時における上記圧電素子の背面全面を支持する平面部材であることを特徴とする請求項1に記載の圧電マイクロポンプ。
- 上記圧電素子は長方形に形成され、上記支持部材は上記圧電素子の長手方向両端部の背面を支持し、上記圧電素子の中央部背面側には上記圧電素子が屈曲変形可能な空間が設けられていることを特徴とする請求項1に記載の圧電マイクロポンプ。
- 上記圧電素子は上記ダイヤフラムに面接着されていることを特徴とする請求項1ないし3のいずれかに記載の圧電マイクロポンプ。
- 上記ダイヤフラムと上記支持部材との厚み方向隙間は、上記圧電素子の厚みより狭く設定されており、上記圧電素子は上記ダイヤフラムの弾性によって上記支持部材に押し付けられていることを特徴とする請求項1ないし4のいずれかに記載の圧電マイクロポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008506195A JP4793441B2 (ja) | 2006-03-22 | 2007-02-09 | 圧電マイクロポンプ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006079424 | 2006-03-22 | ||
JP2006079424 | 2006-03-22 | ||
PCT/JP2007/052323 WO2007108246A1 (ja) | 2006-03-22 | 2007-02-09 | 圧電マイクロポンプ |
JP2008506195A JP4793441B2 (ja) | 2006-03-22 | 2007-02-09 | 圧電マイクロポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007108246A1 JPWO2007108246A1 (ja) | 2009-08-06 |
JP4793441B2 true JP4793441B2 (ja) | 2011-10-12 |
Family
ID=38522283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008506195A Active JP4793441B2 (ja) | 2006-03-22 | 2007-02-09 | 圧電マイクロポンプ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8454327B2 (ja) |
JP (1) | JP4793441B2 (ja) |
CN (1) | CN101427026A (ja) |
DE (1) | DE112007000669B4 (ja) |
WO (1) | WO2007108246A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5494658B2 (ja) * | 2009-05-25 | 2014-05-21 | 株式会社村田製作所 | バルブ、流体装置及び流体供給装置 |
FR2952135B1 (fr) * | 2009-11-04 | 2013-02-22 | Seb Sa | Procede de pilotage d'une pompe piezoelectrique d'appareil electromenager et appareil electromenager mettant en oeuvre un tel procede |
US8404132B2 (en) * | 2011-03-31 | 2013-03-26 | Fujifilm Corporation | Forming a membrane having curved features |
CN103339380B (zh) * | 2011-10-11 | 2015-11-25 | 株式会社村田制作所 | 流体控制装置、流体控制装置的调节方法 |
AU2013216990A1 (en) * | 2012-02-10 | 2014-07-24 | Kci Licensing, Inc. | Systems and methods for regulating the temperature of a disc pump system |
CN103362786B (zh) * | 2013-07-12 | 2018-07-13 | 重庆中镭科技有限公司 | 一种压电微型隔膜泵 |
DE102014013152A1 (de) * | 2014-09-04 | 2016-03-10 | Fresenius Medical Care Deutschland Gmbh | Verfahren zur Bestimmung eines Systemkompressibilitätswertes eines medizinischen Membranpumpenantriebs |
JP2017002942A (ja) * | 2015-06-05 | 2017-01-05 | 株式会社ジェイテクト | 転がり軸受装置 |
TWI651110B (zh) * | 2017-08-22 | 2019-02-21 | 研能科技股份有限公司 | 空氣過濾防護器 |
CN109882388B (zh) * | 2019-03-01 | 2020-06-30 | 浙江师范大学 | 一种累积压缩式微型空压机 |
EP3754733A1 (en) | 2019-06-19 | 2020-12-23 | Albert-Ludwigs-Universität Freiburg | Piezoelectric actuator and microfluidic device |
CN110594137A (zh) * | 2019-10-28 | 2019-12-20 | 南京航空航天大学 | 一种板式无阀压电泵及其工作方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH038680A (ja) * | 1989-06-05 | 1991-01-16 | Hitachi Elevator Eng & Service Co Ltd | エレベータの作業応援要請装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2928409A (en) * | 1955-01-31 | 1960-03-15 | Textron Inc | Non-magnetic electro hydraulic transfer valve |
US3107630A (en) * | 1955-01-31 | 1963-10-22 | Textron Inc | Non-magnetic electro-hydraulic pump |
US4430529A (en) * | 1980-12-24 | 1984-02-07 | Murata Manufacturing Co., Ltd. | Piezoelectric loudspeaker |
JPH0167479U (ja) | 1987-10-21 | 1989-04-28 | ||
JPH038680U (ja) * | 1989-06-09 | 1991-01-28 | ||
JP2000314381A (ja) * | 1999-03-03 | 2000-11-14 | Ngk Insulators Ltd | ポンプ |
JP2001065461A (ja) * | 1999-08-26 | 2001-03-16 | Matsushita Electric Works Ltd | 圧電ダイヤフラムポンプ及びこれを用いた血圧計及び圧電ダイヤフラムポンプの製造方法 |
TW558611B (en) * | 2001-07-18 | 2003-10-21 | Matsushita Electric Ind Co Ltd | Small pump, cooling system and portable equipment |
JP2003214349A (ja) | 2002-01-24 | 2003-07-30 | Matsushita Electric Ind Co Ltd | マイクロポンプおよびその製作方法 |
US6827559B2 (en) * | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
US7048519B2 (en) * | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
JP4678135B2 (ja) * | 2003-06-17 | 2011-04-27 | セイコーエプソン株式会社 | ポンプ |
US7484940B2 (en) * | 2004-04-28 | 2009-02-03 | Kinetic Ceramics, Inc. | Piezoelectric fluid pump |
EP1841966B1 (en) * | 2005-01-26 | 2010-04-28 | Panasonic Electric Works Co., Ltd. | Piezoelectric-driven diaphragm pump |
-
2007
- 2007-02-09 DE DE112007000669T patent/DE112007000669B4/de active Active
- 2007-02-09 JP JP2008506195A patent/JP4793441B2/ja active Active
- 2007-02-09 CN CNA2007800141332A patent/CN101427026A/zh active Pending
- 2007-02-09 WO PCT/JP2007/052323 patent/WO2007108246A1/ja active Application Filing
-
2008
- 2008-09-22 US US12/234,858 patent/US8454327B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH038680A (ja) * | 1989-06-05 | 1991-01-16 | Hitachi Elevator Eng & Service Co Ltd | エレベータの作業応援要請装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112007000669T5 (de) | 2009-01-29 |
US20090010779A1 (en) | 2009-01-08 |
JPWO2007108246A1 (ja) | 2009-08-06 |
CN101427026A (zh) | 2009-05-06 |
WO2007108246A1 (ja) | 2007-09-27 |
US8454327B2 (en) | 2013-06-04 |
DE112007000669B4 (de) | 2013-07-04 |
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