JPH038680U - - Google Patents

Info

Publication number
JPH038680U
JPH038680U JP6747989U JP6747989U JPH038680U JP H038680 U JPH038680 U JP H038680U JP 6747989 U JP6747989 U JP 6747989U JP 6747989 U JP6747989 U JP 6747989U JP H038680 U JPH038680 U JP H038680U
Authority
JP
Japan
Prior art keywords
vibrating diaphragm
check valve
casing
side check
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6747989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6747989U priority Critical patent/JPH038680U/ja
Publication of JPH038680U publication Critical patent/JPH038680U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Description

【図面の簡単な説明】
第1図は本考案圧電ポンプの一実施例の構成を
示す断面図、第2図は従来圧電ポンプの一例の構
成を示す断面図である。 1……ケーシング、2……(膜状)圧電振動子
、3a,3b……(膜状)電極、4……吸込み口
、5……吸入み側チエツク弁(傘型弁)、6……
吐出側チエツク弁(傘型弁)、7……吐出口、8
……接着剤、9……弾性体層、10……圧電膜、
11a,11b……リード線、12,13……通
路、14……振動ダイアフラム。

Claims (1)

    【実用新案登録請求の範囲】
  1. ケーシング1内に振動ダイアフラム14を一体
    に形成し、この振動ダイアフラム14の一面に圧
    電振動子2を取付け、振動ダイアフラム14の他
    面に対向するケーシング部には吸込み口4及び吐
    出口7にそれぞれ連通される通路12,13を開
    閉する吸込み側チエツク弁5及び吐出側チエツク
    弁6を設けてなる圧電ポンプ。
JP6747989U 1989-06-09 1989-06-09 Pending JPH038680U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6747989U JPH038680U (ja) 1989-06-09 1989-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6747989U JPH038680U (ja) 1989-06-09 1989-06-09

Publications (1)

Publication Number Publication Date
JPH038680U true JPH038680U (ja) 1991-01-28

Family

ID=31601088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6747989U Pending JPH038680U (ja) 1989-06-09 1989-06-09

Country Status (1)

Country Link
JP (1) JPH038680U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108246A1 (ja) * 2006-03-22 2007-09-27 Murata Manufacturing Co., Ltd. 圧電マイクロポンプ
US8066494B2 (en) 2006-03-29 2011-11-29 Murata Manufacturing Co., Ltd. Micropump
JP2016065553A (ja) * 2014-09-22 2016-04-28 東芝テック株式会社 逆止弁機構およびそれを用いたポンプ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120448A (en) * 1981-01-19 1982-07-27 Ricoh Co Ltd High-frequency minute flow pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120448A (en) * 1981-01-19 1982-07-27 Ricoh Co Ltd High-frequency minute flow pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108246A1 (ja) * 2006-03-22 2007-09-27 Murata Manufacturing Co., Ltd. 圧電マイクロポンプ
US8454327B2 (en) 2006-03-22 2013-06-04 Murata Manufacturing Co., Ltd. Piezoelectric micropump
US8066494B2 (en) 2006-03-29 2011-11-29 Murata Manufacturing Co., Ltd. Micropump
JP2016065553A (ja) * 2014-09-22 2016-04-28 東芝テック株式会社 逆止弁機構およびそれを用いたポンプ装置

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