JPS6415789U - - Google Patents

Info

Publication number
JPS6415789U
JPS6415789U JP10988387U JP10988387U JPS6415789U JP S6415789 U JPS6415789 U JP S6415789U JP 10988387 U JP10988387 U JP 10988387U JP 10988387 U JP10988387 U JP 10988387U JP S6415789 U JPS6415789 U JP S6415789U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
check valve
side check
valve
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10988387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10988387U priority Critical patent/JPS6415789U/ja
Publication of JPS6415789U publication Critical patent/JPS6415789U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Description

【図面の簡単な説明】
第１図は本考案ポンプの一実施例を示す断面図
、第２図は従来ポンプの一例を示す断面図である
。 １……ケーシング、２……圧電振動子、３，４
……電極、５……吸込み側逆止弁、６……吐出側
逆止弁、７……吸込み流路、８……吐出流路、９
……圧電膜、１０……弾性のあるエラストマー。

Claims (1)

    【実用新案登録請求の範囲】
  1. ケーシング内に圧電振動子の周部を固定し、こ
    の圧電振動子の電極間に交流電圧を印加して当該
    圧電振動子を振動させることにより流体を吸込み
    側逆止弁を通して吸い込み、吐出側逆止弁を通し
    て吐出する圧電振動子ポンプにおいて、圧電振動
    子を肉厚０．８mm以上のエラストマーで被覆して
    なる圧電振動子ポンプ。
JP10988387U 1987-07-17 1987-07-17 Pending JPS6415789U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10988387U JPS6415789U (ja) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10988387U JPS6415789U (ja) 1987-07-17 1987-07-17

Publications (1)

Publication Number Publication Date
JPS6415789U true JPS6415789U (ja) 1989-01-26

Family

ID=31346536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10988387U Pending JPS6415789U (ja) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPS6415789U (ja)

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