JP7428211B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7428211B2 JP7428211B2 JP2022120643A JP2022120643A JP7428211B2 JP 7428211 B2 JP7428211 B2 JP 7428211B2 JP 2022120643 A JP2022120643 A JP 2022120643A JP 2022120643 A JP2022120643 A JP 2022120643A JP 7428211 B2 JP7428211 B2 JP 7428211B2
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- General Physics & Mathematics (AREA)
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Description
[先行技術文献]
[特許文献]
[特許文献1] 特開2015-135954号公報
本例では、トランジスタ部70を半導体基板の下面側に投影した領域には、コレクタ領域22が設けられる。境界メサ部94‐1を半導体基板の下面側に投影した領域には、コレクタ領域22が設けられてよく、トランジスタ部70のコレクタ領域22が延伸して設けられてよい。この場合、境界メサ部94-1をトランジスタ部70の一部としてもよい。
コレクタ領域22のY軸正方向の端部P1を上面に投影した位置から、コンタクト領域15までの長さAは、ベース領域14の深さより長くてよく、ベース領域14からコレクタ領域22までの深さ方向の長さより長くてよい。本例では、100μmである。
蓄積領域16のY軸方向における外側の端部からゲート配線51のY軸方向における外側の端部までの長さL2は、ゲート配線51のY軸方向における外側の端部からライフタイムキラー領域19のY軸方向外側の端部までの長さL3より長くてよい。
トランジスタ部70‐1のコンタクト領域15のうち、ゲートトレンチ部40の第2部分48に隣接する端から、トランジスタ部70‐2のコンタクト領域15のうち、ゲートトレンチ部40の第2部分48に隣接する端までの、ゲートトレンチ部40の第2部分48を含む領域を、第2境界部74としてよい。
トランジスタ部70‐3のコンタクト領域15のうち、ゲートトレンチ部40の第2部分48に隣接する端から、ダイオード部80のダミートレンチ部30の第2部分38までの、ゲートトレンチ部40の第2部分48を含む領域を、第3境界部76としてよい。
図18に示すライフタイムキラー領域19は、再結合中心の濃度が極大(ピーク)となる位置を含んでよい。また、ライフタイムキラー領域19の深さ方向の幅は、導入されたヘリウム、点欠陥あるいは再結合中心のピーク濃度の半値全幅であってよい。再結合中心の濃度分布は、ピークを含む山型の分布形状を備えてよい。
Claims (12)
- 上面において第1方向に延伸するトレンチ部を有する半導体基板と、前記半導体基板の前記上面に設けられ、前記第1方向に沿って形成されたコンタクトホールを有する層間絶縁膜と、を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記ドリフト領域と前記半導体基板の前記上面との間に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
を有し、
前記第1方向において、前記蓄積領域の端部は、前記コンタクトホールの端部よりも内側に設けられている
半導体装置。 - 前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域を更に備え、
前記ベース領域の少なくとも一部は、前記第1高濃度領域の下方に設けられ、
前記第1方向において、前記蓄積領域の端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられている
請求項1に記載の半導体装置。 - 半導体基板を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域と、
少なくとも一部が前記第1高濃度領域の下方に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
前記半導体基板の上面において第1方向に延伸するトレンチ部と、
を有し、
前記第1方向において、前記蓄積領域の端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられており、
前記半導体基板の上面視において、前記第1方向における前記蓄積領域の端部は、前記ベース領域の端部よりも内側に設けられ、且つ、前記ベース領域と重なる
半導体装置。 - 上面において第1方向に延伸するトレンチ部を有する半導体基板と、前記半導体基板の前記上面に設けられ、前記第1方向に沿って形成されたコンタクトホールを有する層間絶縁膜と、を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域と、
少なくとも一部が前記第1高濃度領域の下方に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
を有し、
前記第1方向において、前記蓄積領域の端部は、外側ほど浅い位置に設けられている
半導体装置。 - 半導体基板を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域と、
少なくとも一部が前記第1高濃度領域の下方に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
前記半導体基板の上面において第1方向に延伸するトレンチ部と、
を有し、
前記第1方向において、前記蓄積領域の端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられており、
前記トレンチ部は、ゲートトレンチ部を含み、
前記ゲートトレンチ部は、前記第1方向に延伸する第1部分と、複数の前記第1部分が配列される第2方向に延伸し前記第1部分の端部に接続する第2部分と、を有し、
前記第2部分は、3つ以上の前記第1部分の端部に接続する
半導体装置。 - 半導体基板を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域と、
少なくとも一部が前記第1高濃度領域の下方に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
前記半導体基板の上面において第1方向に延伸するトレンチ部と、
を有し、
前記第1方向において、前記蓄積領域の端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられており、
前記トレンチ部は、ダミートレンチ部を含み、
前記ダミートレンチ部は、前記第1方向に延伸する第1部分と、複数の前記第1部分が配列される第2方向に延伸し当該ダミートレンチ部の前記第1部分の端部に接続する第2部分と、を有し、
前記ダミートレンチ部の前記第2部分は、3つ以上の前記ダミートレンチ部の前記第1部分の端部に接続する
半導体装置。 - 半導体基板を備える半導体装置であって、
前記半導体基板は、
第1導電型のドリフト領域と、
前記半導体基板の上面側に選択的に設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の第1高濃度領域と、
少なくとも一部が前記第1高濃度領域の下方に設けられた第2導電型のベース領域と、
前記ドリフト領域と前記ベース領域との間とに設けられ、前記ドリフト領域よりも高いドーピング濃度を有する第1導電型の蓄積領域と、
前記半導体基板の上面において第1方向に延伸するトレンチ部と、
前記半導体基板の前記上面に設けられ、前記第1方向に沿って形成されたコンタクトホールを有する層間絶縁膜と、
前記半導体基板の上面側に選択的に設けられ、前記ベース領域よりも高いドーピング濃度を有する第2導電型の第2高濃度領域と、
を有し、
前記コンタクトホールは、上面視において、前記第1高濃度領域と重なっており、
前記第1方向において、前記蓄積領域の端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられており、且つ、前記コンタクトホールと重なる前記第2高濃度領域のうち最も外側に位置する前記第2高濃度領域の端部よりも内側に設けられている
半導体装置。 - 前記半導体基板の前記上面に設けられ、前記第1方向に沿って形成されたコンタクトホールを有する層間絶縁膜を更に備え、
前記第1方向における前記コンタクトホールの端部は、最も外側に位置する前記第1高濃度領域よりも外側に設けられている
請求項3、5または6のいずれか1項に記載の半導体装置。 - 前記半導体基板の前記上面に設けられ、前記第1方向に沿って形成されたコンタクトホールを有する層間絶縁膜を更に備え、
前記コンタクトホールの前記第1方向の端部は、前記第2方向において隣り合う前記ダミートレンチ部の前記第1方向の端部よりも内側に設けられている
請求項6に記載の半導体装置。 - 前記半導体基板は、裏面側に第2導電型の下面側半導体領域を有し、
前記下面側半導体領域は、少なくとも、前記第1方向における前記コンタクトホールの前記端部の直下に設けられている
請求項1、2、4または7から9のいずれか1項に記載の半導体装置。 - 前記下面側半導体領域は、少なくとも、前記第1方向における前記コンタクトホールの前記端部の直下から前記第1方向における前記蓄積領域の前記端部の直下まで連続して設けられている
請求項10に記載の半導体装置。 - 前記第1方向において前記ベース領域よりも外側に設けられ、前記トレンチ部よりも深くまで形成された第2導電型のウェル領域を有し、
前記第1方向において、前記コンタクトホールの端部は、前記ウェル領域よりも内側に設けられている
請求項1、2、4または7から11のいずれか1項に記載の半導体装置。
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JP2016001719A (ja) | 2014-05-22 | 2016-01-07 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2016092177A (ja) | 2014-11-04 | 2016-05-23 | トヨタ自動車株式会社 | 半導体装置 |
WO2016113865A1 (ja) | 2015-01-14 | 2016-07-21 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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JP2024028563A (ja) | 2024-03-04 |
CN107958906A (zh) | 2018-04-24 |
US20200161423A1 (en) | 2020-05-21 |
JP7114873B2 (ja) | 2022-08-09 |
US20180108737A1 (en) | 2018-04-19 |
CN107958906B (zh) | 2023-06-23 |
US10991801B2 (en) | 2021-04-27 |
US10559663B2 (en) | 2020-02-11 |
JP2022141955A (ja) | 2022-09-29 |
JP2018174295A (ja) | 2018-11-08 |
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