JP7417495B2 - 樹脂成形装置及び樹脂成形品の製造方法 - Google Patents
樹脂成形装置及び樹脂成形品の製造方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/18—Feeding the material into the injection moulding apparatus, i.e. feeding the non-plastified material into the injection unit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
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- B29C45/2602—Mould construction elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/33—Moulds having transversely, e.g. radially, movable mould parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3433—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3433—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
- B29C2043/3438—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds moving during dispensing over the moulds, e.g. laying up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3466—Feeding the material to the mould or the compression means using rotating supports, e.g. turntables or drums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3483—Feeding the material to the mould or the compression means using band or film carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5875—Measuring, controlling or regulating the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3406—Components, e.g. resistors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3481—Housings or casings incorporating or embedding electric or electronic elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Description
半導体チップが実装された基板等は樹脂封止することにより電子部品として用いられる。成形対象物を樹脂封止する技術としては、コンプレッション方式(圧縮成形)やトランスファ方式等が挙げられる。このコンプレッション方式の1つとして、離型フィルムに液状の樹脂を供給した後、成形型の下型に離型フィルムを載置し、離型フィルム上の液状樹脂に成形対象物を浸し入れて樹脂成形する樹脂封止方法が挙げられる。本実施形態における樹脂成形装置Dはコンプレッション方式を採用しており、樹脂供給モジュール2は、成形型や基板(供給対象物の一例)又は離型フィルムF(供給対象物の一例)に液状の樹脂を供給する装置である。以下において、液状の樹脂から成る液状樹脂Rが供給される供給対象物を離型フィルムFとし、半導体チップ(以下、「チップ」と称する場合がある)が搭載された基板Sを成形対象物の一例として、重力方向を下、重力方向とは反対方向を上として説明する。なお、図1に示すZ方向が上下方向である。
主に図6を用いて、樹脂成形品の製造方法について説明する。
以下、上述した実施形態と同様の部材については、理解を容易にするため、同一の用語、符号を用いて説明する。
<1>上述した実施形態では、樹脂受け部材を有底筒状の樹脂受けカップ26で構成したが、ノズル23bの残液を受け止める部材であれば、板状部材等で構成しても良く、特に限定されない。また、糸切り状態となっているノズル23bの残液が樹脂受けカップ26の側面に付着しないように、樹脂受けカップ26を傾けた姿勢としても良いし、樹脂受けカップ26の下部に液垂れ防止フランジ等を設けても良い。
以下、上述の実施形態において説明した樹脂成形装置D、樹脂成形品の製造方法及び樹脂材料供給方法の概要について説明する。
2B :樹脂回収ユニット
5 :制御部
22 :検知センサ
23b :ノズル
26 :樹脂受けカップ(樹脂受け部材)
27 :アーム
28 :回転機構
29 :移動機構
29a :前後移動機構
29c :シリンダ
30 :位置センサ
35 :型締め機構
D :樹脂成形装置
F :離型フィルム(供給対象物)
LM :下型
M :成形型
Mо :サーボモータ(モータ)
Pa1 :中央位置(第一位置)
Pa2 :ノズル退避位置(第二位置)
Pb :カップ退避位置(退避位置)
R :液状樹脂
UM :上型
Claims (6)
- 供給対象物の樹脂供給領域に液状樹脂を吐出するノズルを含む樹脂供給機構と、
前記ノズルから垂れた前記液状樹脂を受け止める樹脂受け部材と、前記ノズルの下に位置する前記樹脂受け部材を前記ノズルの移動に追従させて移動させる移動機構と、を有する樹脂回収ユニットと、
上型と当該上型に対向する下型とを含む成形型と、
前記供給対象物を前記上型と前記下型との間に配置した状態で前記成形型を型締めする型締め機構と、
少なくとも前記樹脂供給機構及び前記樹脂回収ユニットの作動を制御する制御部と、を備え、
前記樹脂供給機構は、前記供給対象物に前記液状樹脂を吐出した後、前記ノズルを上下させることにより液切りを行って前記供給対象物への前記液状樹脂の供給を終了させ、
前記供給対象物への前記液状樹脂の供給が終了した直後に、前記樹脂回収ユニットは、前記樹脂供給領域外から前記樹脂供給領域内の第一位置にある前記ノズルの下に前記樹脂受け部材を移動させて、前記ノズルから前記樹脂供給領域への前記液状樹脂の落下を防止した状態で、前記樹脂受け部材を前記ノズルの移動に追従させて前記樹脂供給領域外の第二位置まで移動させる樹脂成形装置。 - 前記樹脂回収ユニットは、前記樹脂受け部材を保持するアームを更に有し、
前記樹脂供給機構はモータを有しており、当該モータの駆動力により前記ノズルを移動させ、
前記移動機構はシリンダを有しており、前記アームが前記シリンダ内に供給される流体の流体圧により移動することにより前記樹脂受け部材を前記第一位置から前記第二位置まで移動させる請求項1に記載の樹脂成形装置。 - 前記樹脂回収ユニットは、前記アームを回転させる回転機構を更に有し、
前記移動機構は、前記第一位置と前記第二位置との間で前記樹脂受け部材を直進移動させ、
前記回転機構は、前記アームを回転させて、前記樹脂受け部材を退避位置と前記第一位置又は前記第二位置との間で移動させる請求項2に記載の樹脂成形装置。 - 前記樹脂回収ユニットは、前記アームの移動始端及び移動終端に夫々配置された少なくとも2つの位置センサを更に有し、
前記制御部は、夫々の前記位置センサの検出結果に基づいて演算した前記樹脂受け部材の移動速度が前記ノズルの移動速度と等速になるように、前記流体圧を調整する請求項2又は3に記載の樹脂成形装置。 - 前記樹脂回収ユニットは、前記ノズルを検知する検知センサを更に有し、
前記樹脂受け部材の移動中、前記検知センサが前記ノズルを検知する請求項1~4の何れか一項に記載の樹脂成形装置。 - 請求項1~5の何れか一項に記載の樹脂成形装置を用いた樹脂成形品の製造方法であって、
前記樹脂供給機構を用いて前記供給対象物の樹脂供給領域に前記液状樹脂を吐出した後、前記ノズルを上下させて液切りを行うことにより、前記供給対象物への前記液状樹脂を供給する樹脂供給ステップと、
前記樹脂供給ステップで前記供給対象物に前記液状樹脂を供給した後に、前記樹脂回収ユニットは、前記樹脂供給領域外から前記樹脂供給領域内の前記第一位置に位置する前記ノズルの下に前記樹脂受け部材を移動させ、前記ノズルから垂れた前記液状樹脂を前記樹脂受け部材に回収することにより前記ノズルから前記樹脂供給領域への前記液状樹脂の落下を防止した状態で、前記樹脂受け部材を前記ノズルの移動に追従させて前記樹脂供給領域外の第二位置まで移動させる樹脂回収ステップと、
前記樹脂供給ステップで供給された前記液状樹脂を用いて樹脂成形を行う樹脂成形ステップと、を含む樹脂成形品の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2020144746A JP7417495B2 (ja) | 2020-08-28 | 2020-08-28 | 樹脂成形装置及び樹脂成形品の製造方法 |
TW110130542A TWI781732B (zh) | 2020-08-28 | 2021-08-18 | 樹脂成型裝置及樹脂成型品之製造方法 |
CN202110958002.1A CN114102994A (zh) | 2020-08-28 | 2021-08-20 | 树脂成型装置和树脂成型品的制造方法 |
KR1020210111413A KR102511018B1 (ko) | 2020-08-28 | 2021-08-24 | 수지 성형 장치 및 수지 성형품의 제조 방법 |
US17/411,166 US11999083B2 (en) | 2020-08-28 | 2021-08-25 | Resin molding apparatus and method for producing resin molded product |
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JP2020144746A JP7417495B2 (ja) | 2020-08-28 | 2020-08-28 | 樹脂成形装置及び樹脂成形品の製造方法 |
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