JP7333819B2 - 向上されたドレイン電流ドリフト及び/又は漏れ電流性能を有する高電子移動度トランジスタ - Google Patents
向上されたドレイン電流ドリフト及び/又は漏れ電流性能を有する高電子移動度トランジスタ Download PDFInfo
- Publication number
- JP7333819B2 JP7333819B2 JP2021538969A JP2021538969A JP7333819B2 JP 7333819 B2 JP7333819 B2 JP 7333819B2 JP 2021538969 A JP2021538969 A JP 2021538969A JP 2021538969 A JP2021538969 A JP 2021538969A JP 7333819 B2 JP7333819 B2 JP 7333819B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- barrier layer
- contact
- passivation layer
- percentage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002161 passivation Methods 0.000 claims description 197
- 230000004888 barrier function Effects 0.000 claims description 149
- 239000000463 material Substances 0.000 claims description 84
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 22
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 20
- 239000010410 layer Substances 0.000 description 385
- 239000004065 semiconductor Substances 0.000 description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 29
- 239000000758 substrate Substances 0.000 description 23
- 229910002601 GaN Inorganic materials 0.000 description 15
- 238000010893 electron trap Methods 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 10
- 229910010271 silicon carbide Inorganic materials 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000007704 transition Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000006911 nucleation Effects 0.000 description 6
- 238000010899 nucleation Methods 0.000 description 6
- 229910002704 AlGaN Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- -1 InGaN Chemical class 0.000 description 2
- 229910005883 NiSi Inorganic materials 0.000 description 2
- 229910010037 TiAlN Inorganic materials 0.000 description 2
- 229910008807 WSiN Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- 229910021431 alpha silicon carbide Inorganic materials 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/408—Electrodes ; Multistep manufacturing processes therefor with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02266—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3178—Coating or filling in grooves made in the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
Claims (8)
- 高電子移動度トランジスタであって、
チャンネル層と;
前記チャンネル層上のバリア層であって、前記バリア層は、前記チャンネル層に隣接する下側面と前記下側面の反対側の上側面とを有する、バリア層と;
前記バリア層の前記上側面上のソース接点と;
前記バリア層の前記上側面上のドレイン接点と;
前記ソース接点と前記ドレイン接点との間の前記バリア層の前記上側面上のゲート接点と;
前記ソース接点と前記ドレイン接点との間の前記バリア層の前記上側面上の第1のパッシベーション層と;
前記ソース接点と前記ドレイン接点との間の前記バリア層の前記上側面上の第2のパッシベーション層と;
を備え、
前記バリア層の前記上側面に第1の凹部と第2の凹部を備え、
前記第2のパッシベーション層は前記第1の凹部及び前記第2の凹部の両方の内部にあって前記第1の凹部及び前記第2の凹部の両方に充填され、
前記第1の凹部は前記ソース接点に隣接し、前記第2の凹部は前記ドレイン接点に隣接し、
前記第1のパッシベーション層及び前記第2のパッシベーション層の両方は前記バリア層に直接的に接触し、
前記第1のパッシベーション層は電荷散逸材料である第1の材料を含み、前記第2のパッシベーション層は前記第1の材料とは異なる第2の材料を含む、高電子移動度トランジスタ。 - 前記第1の材料は、窒素に対するケイ素の第1の比率を有する第1の窒化ケイ素材料であり、前記第2の材料は、窒素に対するケイ素の第2の比率を有する第2の窒化ケイ素材料であり、窒素に対するケイ素の前記第1の比率は、窒素に対するケイ素の前記第2の比率よりも少なくとも10パーセンテージ・ポイントだけ大きい、請求項1に記載の高電子移動度トランジスタ。
- 前記バリア層の前記上側面に第3の凹部を更に備え、前記第2のパッシベーション層は前記第3の凹部内にあり、前記第3の凹部は前記ゲート接点の下にある、請求項1から2までのいずれか一項に記載の高電子移動度トランジスタ。
- 前記第2のパッシベーション層は前記第1のパッシベーション層を覆う、請求項1から3までのいずれか一項に記載の高電子移動度トランジスタ。
- 前記第1のパッシベーション層は、前記ソース接点と前記ゲート接点との間にある前記バリア層の前記上側面の部分の第1のパーセンテージに直接的に接触し、前記ゲート接点と前記ドレイン接点との間にある前記バリア層の前記上側面の部分の第2のパーセンテージに直接的に接触し、前記第2のパーセンテージは前記第1のパーセンテージとは少なくとも10パーセンテージ・ポイントだけ大きい、請求項1から4までのいずれか一項に記載の高電子移動度トランジスタ。
- 前記第2のパーセンテージは前記第1のパーセンテージよりも少なくとも20パーセンテージ・ポイントだけ大きい、請求項5に記載の高電子移動度トランジスタ。
- 前記第2のパッシベーション層は、前記ソース接点と前記ゲート接点との間にある前記バリア層の前記上側面の部分の第3のパーセンテージに直接的に接触し、前記ゲート接点と前記ドレイン接点との間にある前記バリア層の前記上側面の部分の第4のパーセンテージに直接的に接触し、前記第4のパーセンテージは前記第3のパーセンテージとは少なくとも10パーセンテージ・ポイントだけ大きい、請求項1から5までのいずれか一項に記載の高電子移動度トランジスタ。
- 前記第4のパーセンテージは前記第3のパーセンテージを少なくとも50パーセンテージ・ポイントだけ上回る、請求項7に記載の高電子移動度トランジスタ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/238,853 US10937873B2 (en) | 2019-01-03 | 2019-01-03 | High electron mobility transistors having improved drain current drift and/or leakage current performance |
US16/238,853 | 2019-01-03 | ||
PCT/US2019/068557 WO2020142345A2 (en) | 2019-01-03 | 2019-12-26 | High electron mobility transistors having improved drain current drift and/or leakage current performance |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022517320A JP2022517320A (ja) | 2022-03-08 |
JP7333819B2 true JP7333819B2 (ja) | 2023-08-25 |
Family
ID=69374385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021538969A Active JP7333819B2 (ja) | 2019-01-03 | 2019-12-26 | 向上されたドレイン電流ドリフト及び/又は漏れ電流性能を有する高電子移動度トランジスタ |
Country Status (4)
Country | Link |
---|---|
US (2) | US10937873B2 (ja) |
EP (1) | EP3906583A2 (ja) |
JP (1) | JP7333819B2 (ja) |
WO (1) | WO2020142345A2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11430882B2 (en) | 2016-06-24 | 2022-08-30 | Wolfspeed, Inc. | Gallium nitride high-electron mobility transistors with p-type layers and process for making the same |
US10892356B2 (en) | 2016-06-24 | 2021-01-12 | Cree, Inc. | Group III-nitride high-electron mobility transistors with buried p-type layers and process for making the same |
JP7367440B2 (ja) * | 2019-10-04 | 2023-10-24 | 住友電気工業株式会社 | 高電子移動度トランジスタの製造方法及び高電子移動度トランジスタ |
US11658233B2 (en) * | 2019-11-19 | 2023-05-23 | Wolfspeed, Inc. | Semiconductors with improved thermal budget and process of making semiconductors with improved thermal budget |
US11444168B2 (en) * | 2020-11-02 | 2022-09-13 | Globalfoundries Singapore Pte. Ltd. | Transistor devices and methods of forming transistor devices |
CN114765215A (zh) * | 2021-01-12 | 2022-07-19 | 联华电子股份有限公司 | 半导体装置 |
WO2022173571A1 (en) * | 2021-02-10 | 2022-08-18 | Wolfspeed, Inc. | Group iii-nitride high-electron mobility transistors and process for making the same |
US11929428B2 (en) | 2021-05-17 | 2024-03-12 | Wolfspeed, Inc. | Circuits and group III-nitride high-electron mobility transistors with buried p-type layers improving overload recovery and process for implementing the same |
US11690306B2 (en) | 2021-08-19 | 2023-06-27 | Globalfoundries Singapore Pte. Ltd. | Correlated electron resistive memory device and integration schemes |
US11916119B2 (en) * | 2021-11-03 | 2024-02-27 | Globalfoundries U.S. Inc. | Transistor with self-aligned gate and self-aligned source/drain terminal(s) and methods |
CN117637835A (zh) * | 2024-01-23 | 2024-03-01 | 英诺赛科(珠海)科技有限公司 | 一种氮化镓器件及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008507843A (ja) | 2004-07-23 | 2008-03-13 | クリー インコーポレイテッド | キャップ層および埋込みゲートを有する窒化物ベースのトランジスタを作製する方法 |
JP2012044003A (ja) | 2010-08-19 | 2012-03-01 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2014078568A (ja) | 2012-10-09 | 2014-05-01 | Sumitomo Electric Ind Ltd | 半導体装置 |
JP2014187084A (ja) | 2013-03-22 | 2014-10-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2015072975A (ja) | 2013-10-02 | 2015-04-16 | トランスフォーム・ジャパン株式会社 | 電界効果型化合物半導体装置及びその製造方法 |
JP2016100471A (ja) | 2014-11-21 | 2016-05-30 | 住友電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7030428B2 (en) | 2001-12-03 | 2006-04-18 | Cree, Inc. | Strain balanced nitride heterojunction transistors |
US7045404B2 (en) | 2004-01-16 | 2006-05-16 | Cree, Inc. | Nitride-based transistors with a protective layer and a low-damage recess and methods of fabrication thereof |
US7901994B2 (en) | 2004-01-16 | 2011-03-08 | Cree, Inc. | Methods of manufacturing group III nitride semiconductor devices with silicon nitride layers |
US20070018199A1 (en) * | 2005-07-20 | 2007-01-25 | Cree, Inc. | Nitride-based transistors and fabrication methods with an etch stop layer |
US8309987B2 (en) * | 2008-07-15 | 2012-11-13 | Imec | Enhancement mode semiconductor device |
WO2010151855A2 (en) * | 2009-06-26 | 2010-12-29 | Cornell University | Iii-v semiconductor structures including aluminum-silicon nitride passivation |
KR101626463B1 (ko) * | 2010-02-26 | 2016-06-02 | 삼성전자주식회사 | 고 전자 이동도 트랜지스터의 제조방법 |
KR20110122525A (ko) * | 2010-05-04 | 2011-11-10 | 삼성전자주식회사 | Ldd 영역을 갖는 고 전자 이동도 트랜지스터(hemt) 및 그 제조방법 |
US9299821B2 (en) * | 2010-06-23 | 2016-03-29 | Cornell University | Gated III-V semiconductor structure and method |
JP2014078537A (ja) | 2011-02-15 | 2014-05-01 | Sharp Corp | 横型半導体装置 |
US8884308B2 (en) * | 2011-11-29 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | High electron mobility transistor structure with improved breakdown voltage performance |
US8680535B2 (en) * | 2011-12-23 | 2014-03-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | High electron mobility transistor structure with improved breakdown voltage performance |
US8669591B2 (en) * | 2011-12-27 | 2014-03-11 | Eta Semiconductor Inc. | E-mode HFET device |
JP6174874B2 (ja) * | 2013-03-15 | 2017-08-02 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
SG11201706079YA (en) * | 2015-03-09 | 2017-09-28 | Agency Science Tech & Res | Self-aligning source, drain and gate process for iii-v nitride mishemts |
EP3179515A1 (en) * | 2015-12-10 | 2017-06-14 | Nexperia B.V. | Semiconductor device and method of making a semiconductor device |
JP2017168530A (ja) * | 2016-03-14 | 2017-09-21 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
US10211329B2 (en) * | 2016-06-16 | 2019-02-19 | Infineon Technologies Americas Corp. | Charge trapping prevention III-Nitride transistor |
IT201700064155A1 (it) * | 2017-06-09 | 2018-12-09 | St Microelectronics Srl | Transistore hemt con alta resistenza allo stress in stato spento e relativo metodo di fabbricazione |
-
2019
- 2019-01-03 US US16/238,853 patent/US10937873B2/en active Active
- 2019-12-26 EP EP19845666.7A patent/EP3906583A2/en active Pending
- 2019-12-26 JP JP2021538969A patent/JP7333819B2/ja active Active
- 2019-12-26 WO PCT/US2019/068557 patent/WO2020142345A2/en unknown
-
2021
- 2021-01-14 US US17/148,688 patent/US11355600B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008507843A (ja) | 2004-07-23 | 2008-03-13 | クリー インコーポレイテッド | キャップ層および埋込みゲートを有する窒化物ベースのトランジスタを作製する方法 |
JP2012044003A (ja) | 2010-08-19 | 2012-03-01 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2014078568A (ja) | 2012-10-09 | 2014-05-01 | Sumitomo Electric Ind Ltd | 半導体装置 |
JP2014187084A (ja) | 2013-03-22 | 2014-10-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2015072975A (ja) | 2013-10-02 | 2015-04-16 | トランスフォーム・ジャパン株式会社 | 電界効果型化合物半導体装置及びその製造方法 |
JP2016100471A (ja) | 2014-11-21 | 2016-05-30 | 住友電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20200219987A1 (en) | 2020-07-09 |
WO2020142345A3 (en) | 2020-08-13 |
US20210134966A1 (en) | 2021-05-06 |
WO2020142345A2 (en) | 2020-07-09 |
EP3906583A2 (en) | 2021-11-10 |
US11355600B2 (en) | 2022-06-07 |
US10937873B2 (en) | 2021-03-02 |
JP2022517320A (ja) | 2022-03-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7333819B2 (ja) | 向上されたドレイン電流ドリフト及び/又は漏れ電流性能を有する高電子移動度トランジスタ | |
KR101108344B1 (ko) | 캡층 및 리세스된 게이트를 가지는 질화물계트랜지스터들의 제조방법들 | |
EP1817798B2 (en) | Cap layers and/or passivation layers for nitride-based transistors, transistor structures and methods of fabricating same | |
US9954087B2 (en) | Field effect transistor, and multilayered epitaxial film for use in preparation of field effect transistor | |
KR101359767B1 (ko) | 고 효율 및/또는 고 전력 밀도의 넓은 밴드갭 트랜지스터들 | |
JP7473638B2 (ja) | 伝導チャネルに近接した階段状フィールド・プレート及び関連する製造方法 | |
EP1973163B1 (en) | High temperature performance capable gallium nitride transistor | |
EP1905097B1 (en) | Nitride-based transistors and fabrication methods with an etch stop layer | |
US8835986B2 (en) | Method for fabrication of III-nitride device and the III-nitride device thereof | |
KR101487080B1 (ko) | 고전자 이동도 트랜지스터 및 그 형성 방법 | |
JP5383652B2 (ja) | 電界効果トランジスタ及びその製造方法 | |
KR20070032701A (ko) | 재성장된 오믹 콘택 영역을 갖는 질화물계 트랜지스터의제조방법 및 재성장된 오믹 콘택 영역을 갖는 질화물계트랜지스터 | |
WO2006118632A1 (en) | Aluminum free group iii-nitride based high electron mobility transistors and methods of fabricating same | |
US11462635B2 (en) | Nitride semiconductor device and method of manufacturing the same | |
KR20150117608A (ko) | 스위칭 소자 | |
WO2022113536A1 (ja) | 窒化物半導体装置およびその製造方法 | |
WO2017000906A1 (en) | Enhancement-mode double-channel high electron mobility transistor | |
EP3549173B1 (en) | High electron mobility transistor and method for manufacturing high electron mobility transistor | |
US20240162298A1 (en) | Nitride-based semiconductor device and method for manufacturing the same | |
JP2022084364A (ja) | 窒化物半導体装置およびその製造方法 | |
US11600721B2 (en) | Nitride semiconductor apparatus and manufacturing method thereof | |
US20240063300A1 (en) | High electron mobility transistors having reduced drain current drift and methods of fabricating such devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210831 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210831 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220930 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220930 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230104 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230228 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230411 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230707 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230808 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230815 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7333819 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |