JP7330092B2 - 半導体装置 - Google Patents
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Description
以下、添付の図面を参照しながら実施の形態について説明する。なお、図面は模式的に示されたものであり、異なる図面にそれぞれ示されている画像のサイズおよび位置の相互関係は、必ずしも正確に記載されたものではなく、適宜変更され得る。また、以下の説明では、同様の構成要素には同じ符号を付して図示し、それらの名称および機能も同様のものとする。よって、それらについての詳細な説明を省略する場合がある。
<装置構成>
図1は実施の形態1のIGBT100の構成を示す断面図である。図1に示されるようにIGBT100は、p型のコレクタ層13、n型のバッファ層12、n型のドリフト層1(第1の半導体層)、n型のキャリアストア層3(第2の半導体層)、p型のチャネル層2(第3の半導体層)およびチャネル層2の上層部に設けられたn型のエミッタ層5(第4の半導体層)を有して半導体基板BSが構成されている。また、チャネル層2の上層部には、エミッタ層5のさらに外側にp型のエミッタ層4がエミッタ層5の側面に接するように設けられている。なお、p型のエミッタ層4は、コンタクト層と呼称される場合もある。また、半導体基板BSとしては例えばシリコン基板を用いることができるが、炭化珪素基板などのワイドバンドギャップ半導体基板を用いても良い。
図2には、IGBT100の寄生容量の等価回路を示す。図2に示されるようにIGBT100のゲートGとコレクタCとの間にはゲート-コレクタ間容量Cgcが存在し、ゲートGとエミッタEとの間にはゲート-エミッタ間容量Cgeが存在し、コレクタCとエミッタEとの間にはコレクタ-エミッタ間容量Cceが存在している。
次に、IGBT100の製造方法について、製造工程を順に示す断面図である図7~図18を用いて説明する。なお、以下では、より現実的な構造を示す断面図を用い、トレンチゲート91およびダミートレンチゲート9の製造工程を中心に図示し説明するものとし、コレクタ電極16等の図示は省略する。
ダミートレンチゲート9の配設間隔D1(図1)は、例えば15μm以下に設定されるものとして説明したが、この理由について図19を用いて説明する。
<装置構成>
図20は実施の形態2のIGBT200の構成を示す断面図である。図1示したIGBT100においては、ダミートレンチゲート9、92およびトレンチゲート91の延在方向に対して垂直な方向の長さ、すなわちトレンチ幅は何れも同じであったが、図20に示すように、IGBT200においては、トレンチゲート91およびダミートレンチゲート92のトレンチ幅W2(第2のトレンチ幅)は、ダミートレンチゲート9のトレンチ幅W1(第1のトレンチ幅)よりも小さく形成されている。なお、図20においては、図1を用いて説明したIGBT100と同一の構成については同一の符号を付し、重複する説明は省略する。
以下、IGBT200の製造方法について、製造工程を順に示す断面図である図22~図26を用いて説明する。なお、以下では、より現実的な構造を示す断面図を用い、トレンチゲート91およびダミートレンチゲート9の製造工程を中心に図示し説明するものとし、コレクタ電極16等の図示は省略する。
図27は実施の形態2の変形例1のIGBT200Aの構成を示す断面図である。図27に示すようにIGBT200Aにおいては、トレンチゲート91およびダミートレンチゲート92のトレンチ幅W2が、ダミートレンチゲート9のトレンチ幅W1よりも小さく形成されていると共に、トレンチゲート91およびダミートレンチゲート92は、ダブルゲート構造となっており、並列して配置された2つのトレンチゲート91で一対をなし、並列して配置された2つのダミートレンチゲート92で一対をなしている。
図28は実施の形態2の変形例2のIGBT200Bの構成を示す断面図である。図28に示すようにIGBT200Aにおいては、トレンチゲート91およびダミートレンチゲート92のトレンチ幅W2が、ダミートレンチゲート9のトレンチ幅W1よりも小さく形成されていると共に、ダミートレンチゲート9は、ダブルゲート構造となっており、並列して配置された2つのダミートレンチゲート9で一対をなしている。
以上説明した実施の形態1および2は、IGBTを例示して説明したが、上述したダミートレンチゲート9、トレンチゲート91およびダミートレンチゲート92の適用はIGBTに限定されず、絶縁ゲート型トランジスタであればMOSFET(Metal Oxide Semiconductor Field Effect Transistor)にも適用可能である。なお、MOSFETに適用する場合はp型のコレクタ層13は設けず、コレクタ電極16はドレイン電極として機能する。
Claims (8)
- 第1導電型の第1の半導体層、
前記第1の半導体層上の第1導電型の第2の半導体層、
前記第2の半導体層上の第2導電型の第3の半導体層、
および前記第3の半導体層の上層部に選択的に設けられた第1導電型の第4の半導体層を少なくとも有する半導体基板と、
前記第4の半導体層および前記第3の半導体層を厚み方向に貫通して前記第2の半導体層内に達するトレンチゲートと、
前記第3の半導体層および前記第2の半導体層を厚み方向に貫通して前記第1の半導体層内に達する第1のダミートレンチゲートと、
前記第3の半導体層を厚み方向に貫通して前記第2の半導体層内に達する第2のダミートレンチゲートと、
少なくとも前記第4の半導体層に接する第1の主電極と、
前記第1の主電極とは前記半導体基板の厚み方向反対側に設けられた第2の主電極と、を備え、
前記第1および第2のダミートレンチゲートは、
前記トレンチゲートの配列間に配置され、前記第1の主電極に電気的に接続される、半導体装置。 - 前記第1および第2のダミートレンチゲートは、
前記トレンチゲートの配列間に交互に、かつ、前記トレンチゲートには前記第1のダミートレンチゲートが隣り合うように配置される、請求項1記載の半導体装置。 - 前記トレンチゲート、前記第1および第2のダミートレンチゲートは、
前記第1のダミートレンチゲートの第1の配設間隔と、
前記トレンチゲートと前記第2のダミートレンチゲートの第2の配設間隔とが等しくなるように配置される、請求項1記載の半導体装置。 - 前記第1のダミートレンチゲートは、
前記第1の配設間隔が15μm未満となるように配置される、請求項3記載の半導体装置。 - 前記トレンチゲート、前記第1および第2のダミートレンチゲートは、
前記トレンチゲートおよび前記第2のダミートレンチゲートの第2のトレンチ幅が、前記第1のダミートレンチゲートの第1のトレンチ幅よりも小さくなるように形成される、請求項1記載の半導体装置。 - 前記第1のトレンチ幅および前記第2のトレンチ幅は、
エッチングによるトレンチ形成における、エッチングマスクの開口幅と形成されるトレンチの深さとの相関関係に基づいて、前記トレンチゲート、前記第1および第2のダミートレンチゲートが同時に形成されるように設定される、請求項5記載の半導体装置。 - 前記トレンチゲートは、
2つが並列して配置されて一対をなし、
前記第2のダミートレンチゲートは、
2つが並列して配置されて一対をなし、
前記トレンチゲート、前記第1および第2のダミートレンチゲートは、
前記第1のダミートレンチゲートの第1の配設間隔と、
対をなす前記トレンチゲートと対をなす前記第2のダミートレンチゲートのそれぞれの対の中心間距離で規定される第2の配設間隔とが等しくなるように配置される、請求項5記載の半導体装置。 - 前記第1のダミートレンチゲートは、
2つが並列して配置されて一対をなし、
前記トレンチゲート、前記第1および第2のダミートレンチゲートは、
対をなす前記第1のダミートレンチゲートのそれぞれの対の中心間距離で規定される第1の配設間隔と、
前記トレンチゲートと前記第2のダミートレンチゲートとの第2の配設間隔とが等しくなるように配置される、請求項5記載の半導体装置。
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