JP7281146B2 - 弾性波デバイス - Google Patents

弾性波デバイス Download PDF

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Publication number
JP7281146B2
JP7281146B2 JP2020132054A JP2020132054A JP7281146B2 JP 7281146 B2 JP7281146 B2 JP 7281146B2 JP 2020132054 A JP2020132054 A JP 2020132054A JP 2020132054 A JP2020132054 A JP 2020132054A JP 7281146 B2 JP7281146 B2 JP 7281146B2
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JP
Japan
Prior art keywords
metal
idt
pattern wiring
piezoelectric substrate
acoustic wave
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020132054A
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English (en)
Japanese (ja)
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JP2022028566A (ja
Inventor
惠一郎 本山
敦哉 ▲高▼橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANAN JAPAN TECHNOLOGY
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SANAN JAPAN TECHNOLOGY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by SANAN JAPAN TECHNOLOGY filed Critical SANAN JAPAN TECHNOLOGY
Priority to JP2020132054A priority Critical patent/JP7281146B2/ja
Priority to CN202110779572.4A priority patent/CN114070240A/zh
Publication of JP2022028566A publication Critical patent/JP2022028566A/ja
Application granted granted Critical
Publication of JP7281146B2 publication Critical patent/JP7281146B2/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02724—Comb like grating lines

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2020132054A 2020-08-03 2020-08-03 弾性波デバイス Active JP7281146B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020132054A JP7281146B2 (ja) 2020-08-03 2020-08-03 弾性波デバイス
CN202110779572.4A CN114070240A (zh) 2020-08-03 2021-07-09 弹性波装置及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020132054A JP7281146B2 (ja) 2020-08-03 2020-08-03 弾性波デバイス

Publications (2)

Publication Number Publication Date
JP2022028566A JP2022028566A (ja) 2022-02-16
JP7281146B2 true JP7281146B2 (ja) 2023-05-25

Family

ID=80233282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020132054A Active JP7281146B2 (ja) 2020-08-03 2020-08-03 弾性波デバイス

Country Status (2)

Country Link
JP (1) JP7281146B2 (zh)
CN (1) CN114070240A (zh)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006211612A (ja) 2005-01-31 2006-08-10 Sony Corp Ｓａｗデバイス、通信モジュール及びｓａｗデバイスの製造方法
WO2012063521A1 (ja) 2010-11-10 2012-05-18 株式会社村田製作所 弾性波装置及びその製造方法
JP2019192994A (ja) 2018-04-20 2019-10-31 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1075141A (ja) * 1996-08-30 1998-03-17 Fujitsu Ltd 弾性表面波素子の製造方法
JPH11163662A (ja) * 1997-11-27 1999-06-18 Kyocera Corp 弾性表面波フィルタ
JPH11312942A (ja) * 1998-04-27 1999-11-09 Toshiba Corp 弾性表面波デバイスの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006211612A (ja) 2005-01-31 2006-08-10 Sony Corp Ｓａｗデバイス、通信モジュール及びｓａｗデバイスの製造方法
WO2012063521A1 (ja) 2010-11-10 2012-05-18 株式会社村田製作所 弾性波装置及びその製造方法
JP2019192994A (ja) 2018-04-20 2019-10-31 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ

Also Published As

Publication number Publication date
JP2022028566A (ja) 2022-02-16
CN114070240A (zh) 2022-02-18

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