JP7266881B2 - 光硬化性および熱硬化性を有する樹脂組成物およびその硬化物、接着剤、半導体装置、ならびに電子部品 - Google Patents
光硬化性および熱硬化性を有する樹脂組成物およびその硬化物、接着剤、半導体装置、ならびに電子部品 Download PDFInfo
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- JP7266881B2 JP7266881B2 JP2019569138A JP2019569138A JP7266881B2 JP 7266881 B2 JP7266881 B2 JP 7266881B2 JP 2019569138 A JP2019569138 A JP 2019569138A JP 2019569138 A JP2019569138 A JP 2019569138A JP 7266881 B2 JP7266881 B2 JP 7266881B2
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- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- YAAUVJUJVBJRSQ-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2-[[3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propoxy]methyl]-2-(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical compound SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS YAAUVJUJVBJRSQ-UHFFFAOYSA-N 0.000 description 1
- DBHQYYNDKZDVTN-UHFFFAOYSA-N [4-(4-methylphenyl)sulfanylphenyl]-phenylmethanone Chemical compound C1=CC(C)=CC=C1SC1=CC=C(C(=O)C=2C=CC=CC=2)C=C1 DBHQYYNDKZDVTN-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- HNYOPLTXPVRDBG-UHFFFAOYSA-N barbituric acid Chemical compound O=C1CC(=O)NC(=O)N1 HNYOPLTXPVRDBG-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical class OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 229930006711 bornane-2,3-dione Natural products 0.000 description 1
- BXIQXYOPGBXIEM-UHFFFAOYSA-N butyl 4,4-bis(tert-butylperoxy)pentanoate Chemical compound CCCCOC(=O)CCC(C)(OOC(C)(C)C)OOC(C)(C)C BXIQXYOPGBXIEM-UHFFFAOYSA-N 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical class N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 239000006028 limestone Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000013035 low temperature curing Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- YLHXLHGIAMFFBU-UHFFFAOYSA-N methyl phenylglyoxalate Chemical compound COC(=O)C(=O)C1=CC=CC=C1 YLHXLHGIAMFFBU-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 229940105570 ornex Drugs 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920002589 poly(vinylethylene) polymer Polymers 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007962 solid dispersion Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- NHDIQVFFNDKAQU-UHFFFAOYSA-N tripropan-2-yl borate Chemical compound CC(C)OB(OC(C)C)OC(C)C NHDIQVFFNDKAQU-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
- H01L23/295—Organic, e.g. plastic containing a filler
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G75/00—Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
- C08G75/02—Polythioethers
- C08G75/0204—Polyarylenethioethers
- C08G75/0209—Polyarylenethioethers derived from monomers containing one aromatic ring
- C08G75/0213—Polyarylenethioethers derived from monomers containing one aromatic ring containing elements other than carbon, hydrogen or sulfur
- C08G75/0222—Polyarylenethioethers derived from monomers containing one aromatic ring containing elements other than carbon, hydrogen or sulfur containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G75/00—Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
- C08G75/02—Polythioethers
- C08G75/04—Polythioethers from mercapto compounds or metallic derivatives thereof
- C08G75/045—Polythioethers from mercapto compounds or metallic derivatives thereof from mercapto compounds and unsaturated compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/24—Acids; Salts thereof
- C08K3/26—Carbonates; Bicarbonates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/36—Sulfur-, selenium-, or tellurium-containing compounds
- C08K5/37—Thiols
- C08K5/378—Thiols containing heterocyclic rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/02—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
- C08L101/06—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing oxygen atoms
- C08L101/08—Carboxyl groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
- C08L33/10—Homopolymers or copolymers of methacrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L35/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least one other carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L35/02—Homopolymers or copolymers of esters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L81/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing sulfur with or without nitrogen, oxygen or carbon only; Compositions of polysulfones; Compositions of derivatives of such polymers
- C08L81/02—Polythioethers; Polythioether-ethers
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
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- C09J181/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing sulfur, with or without nitrogen, oxygen, or carbon only; Adhesives based on polysulfones; Adhesives based on derivatives of such polymers
- C09J181/02—Polythioethers; Polythioether-ethers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
- C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/564—Details not otherwise provided for, e.g. protection against moisture
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/24—Acids; Salts thereof
- C08K3/26—Carbonates; Bicarbonates
- C08K2003/265—Calcium, strontium or barium carbonate
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- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Adhesives Or Adhesive Processes (AREA)
Description
〔1〕(A)多官能(メタ)アクリレート樹脂、
(B)多官能チオール樹脂、および
(C)純度99%以上の炭酸カルシウムフィラー
を含むことを特徴とする、樹脂組成物。
〔2〕(B)成分が、分子内にエステル結合を有しない多官能チオール樹脂を含む、上記〔1〕記載の樹脂組成物。
〔3〕(B)成分が、(B)成分100質量部に対して、50~100質量部のグリコールウリル化合物を含んでいる、上記〔1〕または〔2〕記載の樹脂組成物。
〔4〕(B)成分が、分子内にエステル結合を有する多官能チオール樹脂を含む、上記〔1〕~〔3〕のいずれか記載の樹脂組成物。
〔5〕さらに、タルクを含む、上記〔1〕~〔4〕のいずれか記載の樹脂組成物。
〔6〕上記〔1〕~〔5〕のいずれか記載の樹脂組成物を含む、接着剤。
〔7〕上記〔1〕~〔5〕のいずれか記載の樹脂組成物の硬化物。
〔8〕上記〔7〕記載の硬化物を含む、半導体装置。
〔9〕上記〔8〕記載の半導体装置を含む、電子部品。
上記〔7〕によれば、硬化後の耐湿信頼性(特に、耐湿試験後のシェア強度)が高い、光硬化性および熱硬化性を有する樹脂組成物の硬化物を得ることができる。
上記〔8〕によれば、硬化後の耐湿信頼性(特に、耐湿試験後のシェア強度)が高い、光硬化性および熱硬化性を有する樹脂組成物の硬化物による、信頼性の高い半導体装置、例えば、イメージセンサーモジュールを得ることができる。
上記〔9〕によれば、硬化後の耐湿信頼性(特に、耐湿試験後のシェア強度)が高い、光硬化性および熱硬化性を有する樹脂組成物の硬化物を含む半導体装置を有する、高信頼性の電子部品を得ることができる。
(A)多官能(メタ)アクリレート樹脂、
(B)多官能チオール樹脂、および
(C)純度99%以上の炭酸カルシウムフィラー
を含む。
膠質炭酸カルシウムは、たとえば、立方形状を有し、平均粒子径が0.01μm以上0.1μm未満であり、結晶形はカルサイトである。半膠質炭酸カルシウムは、たとえば、立方形状を有し、平均粒子径が0.1μm以上1.0μm未満であり、結晶形は、カルサイトである。軽微性炭酸カルシウムは、たとえば、紡錘形状を有し、平均粒子径が1.0μm以上であり、結晶形は、カルサイトまたはアラゴナイトである。
重質炭酸カルシウムは、結晶形がカルサイトである石灰石を、粉砕および分級することによって製造される。このため、重質炭酸カルシウムは、低価格であるが、不定形で、純度が低い、という特徴を有する。
本実施形態の接着剤は、上述の樹脂組成物を含む。この接着剤は、エンジニアリングプラスチック、セラミックス、および金属に対して、良好な接合を可能にする。
本実施形態の樹脂組成物の硬化物は、上述の樹脂組成物の硬化物である。
本実施形態の半導体装置は、上述の樹脂組成物の硬化物を含むため、高い耐湿信頼性を有する。本実施形態の電子部品は、この半導体装置を含むため、高い耐湿信頼性を有する。
(A)成分の(A2)DCP-Aには、共栄社化学株式会社製ジメチロール-トリシクロデカンジアクリレート(品名:ライトアクリレートDCP-A、アクリレート当量:188g/eq)を使用した。
(B)成分の(B1)PEPTには、SC有機化学製チオール樹脂(品名:PEPT、チオール当量:124g/eq)を使用した。
(B)成分の(B2)C3 TS-Gには、四国化成工業製グリコールウリル誘導体(品名:C3 TS-G、チオール当量:114g/eq)を使用した。
(B)成分の(B3)PEMPには、SC有機化学製ペンタエリスリトールテトラキス(3-メルカプトプロピオネート)(商品名:PEMP、チオール当量:128g/eq)を使用した。
(C)成分の99.99%炭酸カルシウムには、宇部マテリアルズ製(品名:CS4NA、平均粒径:<0.5μm)を使用した。
(C’)成分の98%炭酸カルシウムには、白石工業製炭酸カルシウム(品名:ホワイトンSB赤、平均粒径:1.8μm)を使用した。
(C’’)成分のシリカには、アドマテックス製シリカ(品名:SO-E2、平均粒径:0.6μm)を使用した。
(C’’’)成分の水酸化マグネシウムには、宇部マテリアルズ製水酸化マグネシウム(品名:UD-653、平均粒径:≦10μm)を使用した。
(C’’’’)成分の水酸化アルミニウムには、住友化学製水酸化アルミニウム(品名:C-301N、平均粒径:1.5μm)を使用した。
その他のラジカル重合開始剤には、BASF製2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(品名:IRGACURE TPO)を使用した。
潜在性硬化促進剤には、T&K TOKA(株)製アミン-エポキシアダクト系固体分散型潜在性硬化促進剤(品名:FXR1211)を使用した。
タルクには、松村産業製タルク(品名:5000PJ、平均粒径:4μm)を使用した。
シランカップリング剤には、信越シリコーン製3-グリシドキシプロピルトリメトキシシラン(品名:KBM-403)を使用した。
表1および2に示す配合で、3本ロールミルを用いて、樹脂組成物からなる接着剤を調製した。
SUS基板に接着剤を印刷した。塗布サイズは、2mmφとした。印刷した接着剤上に、3.2mm×1.6mm×0.45mm厚のアルミナチップを載置した。硬化条件は、UV照射量2000mJ/cm2(UV波長:365nm、LEDランプ)の後、送風乾燥機中で80℃/60分、とした。
このようにして得られた試験片について、プレッシャークッカー試験(Pressure Cooker Test;以下、PCT)(2atm、121℃、100%RH、20時間)を行った。その後、dage社製万能型ボンドテスター「DAGE4000」を用いて、アルミナチップに荷重をかけ、チップが剥離した時の剪断応力(N)を測定した。このような測定を1つの試験片につき10回行い、10回の平均値を、耐湿試験後のシェア強度の測定値とした。シェア強度は50N以上であることが好ましい。表1および表2に、シェア強度の測定結果(評価結果)を示す。
実施例1、5、8および9については、ピール強度を測定した。下側基材(ガラスの平滑板:40mm×60mm×0.3mm)上に、20mm×60mm、厚さ50μmとなるよう樹脂組成物を塗布した。下側基材上に、気泡を噛み込まないように注意しながら、上側基材(SUS―304製リボン(厚さ20μm、幅5mm、長さ50mm))を載置した。このようにして、5mm×20mmの接着面をもつ、5つの試験片を作製した。硬化では、試験片の裏面に対し、UVを、照射量2000mJ/cm2(UV波長:365nm、LEDランプ)で照射した。その後、送風乾燥機中で、試験片を80℃/60分硬化させた。
2枚のガラス板(平滑板:40mm×60mm×0.3mm)によって、硬化した時の膜厚が500±100μmとなるように、実施例1、5、8および9の樹脂組成物を挟むことにより、塗膜を形成した。樹脂組成物の硬化では、UVを、照射量2000mJ/cm2(UV波長:365nm、LEDランプ)で、塗膜に照射した。その後、塗膜を含むガラス板を、送風乾燥機中で80℃/60分間放置した。この塗膜を、ガラス板から剥がした後、カッターで所定寸法(5mm×40mm)に切り取った。なお、切り口を、サンドペーパーを用いて、滑らかになるように仕上げた。この塗膜を、JIS C6481に従い、セイコーインスツル社製、動的熱機械測定(DMA)を用いて、引張り法を用いて、周波数10Hzで測定した。tanδピークの値を、Tgとした。表3に、Tgの測定結果を示す。
(i)SUS基板の上に、実施例1、5、8および9の樹脂組成物(試料)を、接着剤として塗布した。塗布サイズは、幅:9mm×長さ:9mm×厚さ:0.3mmとした。
(ii)塗布された試料の上に、Niコートブロックを載置して、試験片を形成した。
(iii)試験片を、80℃に加熱したオーブンに投入し、試料を60分間加熱硬化させた。
(iv)試料を加熱硬化させた後、オーブンから試験片を取り出した。落下衝撃試験機(日立テクノロジー&サービス社製)を用いて、室温で、試験片の耐落下衝撃性を測定した。この測定では、試験片を、高さを変えながら落下させた。落下に伴う衝撃によって、試験片のNiコートブロックがSUS板から剥離するような高さを、試験片の耐落下衝撃性を示す測定値(単位:mm)とした。試験片の高さを、200mmから始め、500mmまでは100mm毎に上げていき、500mm以上は50mmずつ上げた。各高さで、試験片を5回ずつ落下させ、NiコートブロックがSUS板から剥離しなければ、試験片の高さを上げて測定を続行した。表3に、耐落下衝撃性の測定結果を示す。
また、表3からわかるように、(B)成分として、グリコールウリル化合物と、一般式(4)で示されるチオールとを併用した実施例5および9は、グリコールウリル化合物を単独で使用した実施例1に比して、高いピール強度を有する。さらに、Tgが50℃以下でありタルクを含む実施例9は、耐落下衝撃性に優れていた。
Claims (9)
- (A)(メタ)アクリレート官能基を2以上有する化合物である多官能(メタ)アクリレート樹脂、
(B)チオール官能基を2以上有する化合物である多官能チオール樹脂、および
(C)純度99%以上の炭酸カルシウムフィラー
を含むことを特徴とする、光硬化性および熱硬化性を有する樹脂組成物。 - (B)成分が、分子内にエステル結合を有しない多官能チオール樹脂を含む、
請求項1記載の光硬化性および熱硬化性を有する樹脂組成物。 - (B)成分が、(B)成分100質量部に対して、50~100質量部のグリコールウリル化合物を含んでいる、
請求項1又は2に記載の光硬化性および熱硬化性を有する樹脂組成物。 - (B)成分が分子内にエステル結合を有する多官能チオール樹脂を含む、
請求項1から3のいずれか1項に記載の光硬化性および熱硬化性を有する樹脂組成物。 - さらに、タルクを含む、請求項1から4のいずれか1項に記載の光硬化性および熱硬化性を有する樹脂組成物。
- 請求項1から5のいずれか1項に記載の光硬化性および熱硬化性を有する樹脂組成物を含む、接着剤。
- 請求項1から5のいずれか1項に記載の光硬化性および熱硬化性を有する樹脂組成物の硬化物。
- 請求項7記載の硬化物を含む、半導体装置。
- 請求項8記載の半導体装置を含む、電子部品。
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