JP7262210B2 - 凹部の埋め込み方法 - Google Patents
凹部の埋め込み方法 Download PDFInfo
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- JP7262210B2 JP7262210B2 JP2018218602A JP2018218602A JP7262210B2 JP 7262210 B2 JP7262210 B2 JP 7262210B2 JP 2018218602 A JP2018218602 A JP 2018218602A JP 2018218602 A JP2018218602 A JP 2018218602A JP 7262210 B2 JP7262210 B2 JP 7262210B2
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
Description
一実施形態の凹部の埋め込み方法について説明する。一実施形態に係る凹部の埋め込み方法は、ホールやトレンチ等の凹部に成膜とエッチングとを交互に繰り返してアモルファスシリコン膜を埋め込んだ後、レーザアニール処理を行う方法である。アモルファスシリコン膜は、例えばノンドープ膜であってもよく、ドープ膜であってもよい。ドープ膜のドーパントとしては、例えばリン(P)、ボロン(B)、ヒ素(As)、酸素(O)、炭素(C)が挙げられる。
上記の凹部の埋め込み方法における成膜工程、エッチング工程及び埋込工程を実施することができる成膜装置について、多数枚の基板に対して一括で熱処理を行うバッチ式の縦型熱処理装置を例に挙げて説明する。但し、成膜装置は、バッチ式の装置に限定されるものではなく、例えば基板を1枚ずつ処理する枚葉式の装置であってもよい。
上記の凹部の埋め込み方法におけるレーザアニール工程を実施することができるレーザアニール装置の一例について説明する。図4は、レーザアニール装置の構成例を示す概略図である。
一実施形態の凹部の埋め込み方法による効果を確認するために行った実施例について説明する。実施例では、上記の縦型熱処理装置1により凹部内にアモルファスシリコン膜を埋め込んだ後、上記のレーザアニール装置100により凹部内のアモルファスシリコン膜にレーザアニール処理を行った。
レーザ波長:1070nm
レーザ出力:43W
掃引速度:5mm/秒
基板の温度:800℃
34 反応管
40 ガス供給手段
41 排気手段
42 加熱手段
95 制御手段
100 レーザアニール装置
Claims (7)
- 凹部内に埋め込まれたアモルファス半導体膜にレーザ光を照射することにより、前記アモルファス半導体膜を結晶化させることなく加熱する工程を有し、
前記アモルファス半導体膜が埋め込まれた前記凹部内にはシームが形成されており、
前記加熱する工程は前記アモルファス半導体膜がアモルファスを維持したまま前記凹部内のシームを除去する、
凹部の埋め込み方法。 - 前記凹部内に前記アモルファス半導体膜を成膜する工程と、前記アモルファス半導体膜の一部をエッチングする工程とを繰り返すことにより、前記凹部内に前記アモルファス半導体膜を埋め込む工程を有する、
請求項1に記載の凹部の埋め込み方法。 - 前記埋め込む工程では、前記凹部の開口が閉塞するように前記アモルファス半導体膜を形成する、
請求項2に記載の凹部の埋め込み方法。 - 前記加熱する工程では、前記凹部に対する前記レーザ光の照射位置を移動させながら前記レーザ光を照射する、
請求項1乃至3のいずれか一項に記載の凹部の埋め込み方法。 - 前記加熱する工程では、前記レーザ光の照射位置を固定して前記凹部を移動させながら前記レーザ光を照射する、
請求項1乃至3のいずれか一項に記載の凹部の埋め込み方法。 - 前記加熱する工程では、前記アモルファス半導体膜の膜種に応じて、前記アモルファス半導体膜を加熱する温度及び前記アモルファス半導体膜に対する前記レーザ光の移動速度を調整する、
請求項1乃至5のいずれか一項に記載の凹部の埋め込み方法。 - 前記アモルファス半導体膜は、アモルファスシリコン膜、アモルファスシリコンゲルマニウム膜、又はアモルファスゲルマニウム膜である、
請求項1乃至6のいずれか一項に記載の凹部の埋め込み方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018218602A JP7262210B2 (ja) | 2018-11-21 | 2018-11-21 | 凹部の埋め込み方法 |
KR1020190147307A KR102547550B1 (ko) | 2018-11-21 | 2019-11-18 | 오목부의 매립 방법 |
CN201911127515.7A CN111211093A (zh) | 2018-11-21 | 2019-11-18 | 凹部的埋入方法 |
US16/690,958 US11177133B2 (en) | 2018-11-21 | 2019-11-21 | Method of filling recess |
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JP2018218602A JP7262210B2 (ja) | 2018-11-21 | 2018-11-21 | 凹部の埋め込み方法 |
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JP2020088106A JP2020088106A (ja) | 2020-06-04 |
JP7262210B2 true JP7262210B2 (ja) | 2023-04-21 |
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US (1) | US11177133B2 (ja) |
JP (1) | JP7262210B2 (ja) |
KR (1) | KR102547550B1 (ja) |
CN (1) | CN111211093A (ja) |
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