JP6615658B2 - マスク及び薄膜トランジスタの製造方法 - Google Patents
マスク及び薄膜トランジスタの製造方法 Download PDFInfo
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- JP6615658B2 JP6615658B2 JP2016052087A JP2016052087A JP6615658B2 JP 6615658 B2 JP6615658 B2 JP 6615658B2 JP 2016052087 A JP2016052087 A JP 2016052087A JP 2016052087 A JP2016052087 A JP 2016052087A JP 6615658 B2 JP6615658 B2 JP 6615658B2
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- amorphous silicon
- channel region
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- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000010409 thin film Substances 0.000 title claims description 11
- 239000010408 film Substances 0.000 claims description 77
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 43
- 238000005224 laser annealing Methods 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 37
- 230000015572 biosynthetic process Effects 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 28
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 20
- 229920005591 polysilicon Polymers 0.000 claims description 19
- 238000009825 accumulation Methods 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 13
- 238000001953 recrystallisation Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 4
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101100489584 Solanum lycopersicum TFT1 gene Proteins 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
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- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Optics & Photonics (AREA)
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- High Energy & Nuclear Physics (AREA)
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- Thin Film Transistor (AREA)
Description
したがって、従来のレーザアニール処理では、アモルファスシリコン膜の再結晶化を促進させることで電子移動度を向上させる観点から、電子移動度がピーク値となるレーザパワーよりも高いレーザパワーのレーザ光を照射することは好ましくない。そのため、レーザパワーと電子移動度との関係でレーザ光の照射条件が限定されるという問題点を有している。
図1は、本発明によるTFTの製造方法の第1実施形態を示す工程図である。このTFTは、例えば液晶表示装置等に用いられる。第1実施形態では、本発明の技術的特徴をわかりやすくするため、TFTの製造方法を大きく4つのステップに分けて説明する。
ステップS2は、アモルファスシリコン膜のうちチャネル領域の形成領域を含む領域にレーザ光を照射し、その形成領域を含む領域を加熱溶融させ再結晶化させることによりチャネル領域を含むポリシリコン膜を形成させるレーザアニール工程を表している。ここで、チャネル領域の形成領域を含む領域は、その形成領域と、アモルファスシリコン膜が加熱溶融したときに熱を蓄積する蓄積領域とを有する。ここで、蓄積領域にレーザ光が照射されると、照射された領域において、絶縁膜上に積層されているアモルファスシリコン膜の下層領域に熱が蓄積されやすくなる。なお、形成領域にもレーザ光が照射されるので、熱が蓄積されることは言うまでもない。
ステップS3は、ステップS2のレーザアニール工程で形成されたポリシリコン膜のうち、チャネル領域以外の領域をエッチングにより取り除く工程を表している。
ステップS4は、公知技術を適宜適用することで、最終的にTFTの製造を完了するまでの複数の工程を1つのブロックで表している。
図3は、本発明によるTFTの製造方法に適用されるレーザアニール装置の一例を示す概要図である。
図10は、本発明における除去工程の一例を説明する平面図である。レーザアニール工程が終了すると、ポリシリコン化されたパターン201、202の領域(蓄積領域)がエッチングにより取り除かれる。これにより、絶縁膜4上に、半導体層5(ソース領域51、チャネル領域52、ドレイン領域53)が形成される。すなわち、基板2上の蓄積領域がポリシリコン化され、その領域はチャネル領域52への再結晶化の促進という役割を終えたので、除去工程では、チャネル領域52を除くポリシリコン化された領域をエッチングにより除去する点を特徴としている。そして、第1実施形態では、結果的にチャネル領域52のみを良好にポリシリコン化することができる。
図11は、除去工程後に、ソース電極及びドレイン電極を積層したTFTの一例を示す平面図である。図11では、ソース電極6が図10に示すソース領域51を覆うように積層され、ドレイン電極7が図10に示すドレイン領域53を覆うように積層されると共に、ソース電極6及びドレイン電極7は、チャネル領域52の一部の上層にも積層されている。図中、幅Dは、チャネル領域52の幅を表している。
そして、第1実施形態では、公知技術を適宜適用することで、最終的にTFT1を製造することができる。
一方、第2実施形態では、複数の開口128a〜128eを有する遮光マスク123aを、一つの投影レンズ(投影光学系)110を使用して基板2上に縮小投影する方式を採用する。したがって、第2実施形態では、図3に示す遮光マスク123及びマイクロレンズアレイ124の構成が、図12に示す方式に置き換わる。
ここで、図13に示す遮光マスク123aのような中心軸C1で左右対称の形状を有するマスクを採用した場合、投影レンズ110が、正立像を結像するレンズ構成であるか、倒立像を結像するレンズ構成であるかは、気にしなくてもよいというメリットがある。そこで、以下の説明では、正立像を結像するレンズ構成を使用した場合について説明をする。
2…基板
3…ゲート電極
4…絶縁膜
5…半導体層
6…ソース電極
7…ドレイン電極
8…アモルファスシリコン膜
9…ポリシリコン膜
12…レーザ照射光学系
15…制御部
51…ソース領域
52…チャネル領域
53…ドレイン領域
100…レーザアニール装置
110…投影レンズ
123、123a…遮光マスク
124…マイクロレンズアレイ
125…マイクロレンズ
128a〜128e…開口
L…レーザ光
Claims (5)
- 投影レンズを介して、一定の配列ピッチでマトリクス状に配置されたマスクパターンを縮小投影して、前記マスクパターンに対応した領域にレーザ光を照射させるマスクであって、
前記マスクパターンが、ゲート電極、絶縁膜、アモルファスシリコン膜の順に積層されている被照射物に対し、前記アモルファスシリコン膜のうちチャネル領域の形成領域に向けて前記レーザ光を照射させる第1パターンと、前記レーザ光の照射により発生する熱を蓄積する蓄積領域に向けて前記レーザ光を照射させる第2パターンとを組み合わせたものであるとともに、前記ゲート電極の大きさで規定される前記アモルファスシリコン膜への照射可能な領域の範囲内であって、前記チャネル領域の形成領域に隣接し、ソース電極とドレイン電極との下層となる領域を避けるように前記レーザ光を照射させる開口を有している、
ことを特徴とするマスク。 - 前記投影レンズは、複数のマイクロレンズであることを特徴とする請求項1に記載のマスク。
- 基板上に成膜されたアモルファスシリコン膜にレーザ光を照射する処理を含む薄膜トランジスタの製造方法であって、
前記アモルファスシリコン膜のうちチャネル領域の形成領域を含む領域に前記レーザ光を照射し、前記形成領域を含む領域を加熱溶融させ再結晶化させることにより前記チャネル領域を含むポリシリコン膜を形成させるレーザアニール工程と、
前記ポリシリコン膜のうち、前記チャネル領域以外の領域をエッチングにより取り除く工程と、を含み、
前記レーザアニール工程では、請求項1又は2に記載のマスクを用いて、前記マスクパターンに対応した前記チャネル領域の形成領域を含む領域に前記レーザ光を照射することを特徴とする薄膜トランジスタの製造方法。 - 前記投影レンズは、複数のマイクロレンズであることを特徴とする請求項3に記載の薄膜トランジスタの製造方法。
- 前記チャネル領域の形成領域を含む領域は、該形成領域と、前記アモルファスシリコン膜が加熱溶融したときに熱を蓄積する蓄積領域とから成ることを特徴とする請求項3又は4に記載の薄膜トランジスタの製造方法。
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CN201780016032.2A CN108713244A (zh) | 2016-03-16 | 2017-02-10 | 薄膜晶体管的制造方法及用于该制造方法的掩模 |
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