JP2017183508A - シリコン膜の形成方法および形成装置 - Google Patents
シリコン膜の形成方法および形成装置 Download PDFInfo
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- JP2017183508A JP2017183508A JP2016068449A JP2016068449A JP2017183508A JP 2017183508 A JP2017183508 A JP 2017183508A JP 2016068449 A JP2016068449 A JP 2016068449A JP 2016068449 A JP2016068449 A JP 2016068449A JP 2017183508 A JP2017183508 A JP 2017183508A
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- silicon film
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 241
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 241
- 239000010703 silicon Substances 0.000 title claims abstract description 241
- 238000000034 method Methods 0.000 title claims abstract description 66
- 238000005530 etching Methods 0.000 claims abstract description 72
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 35
- 150000002367 halogens Chemical class 0.000 claims abstract description 35
- 230000015572 biosynthetic process Effects 0.000 claims description 22
- -1 silane compound Chemical class 0.000 claims description 22
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 11
- 229910000077 silane Inorganic materials 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 6
- 239000002210 silicon-based material Substances 0.000 abstract description 3
- 239000011800 void material Substances 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 150
- 235000012431 wafers Nutrition 0.000 description 44
- 239000012535 impurity Substances 0.000 description 28
- 239000011261 inert gas Substances 0.000 description 18
- 229910021417 amorphous silicon Inorganic materials 0.000 description 12
- 238000011534 incubation Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 5
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- AWFPGKLDLMAPMK-UHFFFAOYSA-N dimethylaminosilicon Chemical compound CN(C)[Si] AWFPGKLDLMAPMK-UHFFFAOYSA-N 0.000 description 4
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- BIVNKSDKIFWKFA-UHFFFAOYSA-N N-propan-2-yl-N-silylpropan-2-amine Chemical compound CC(C)N([SiH3])C(C)C BIVNKSDKIFWKFA-UHFFFAOYSA-N 0.000 description 2
- UOERHRIFSQUTET-UHFFFAOYSA-N N-propyl-N-silylpropan-1-amine Chemical compound CCCN([SiH3])CCC UOERHRIFSQUTET-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
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- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/311—Etching the insulating layers by chemical or physical means
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H01L21/76837—Filling up the space between adjacent conductive structures; Gap-filling properties of dielectrics
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- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
Abstract
Description
[第1の実施形態]
最初に、本発明に係るシリコン膜の形成方法の第1の実施形態について、図1のフロー図および図2の工程断面図に基づいて説明する。
一般的に、シリコン膜上へシリコン膜を成膜する際にはインキュベーションタイムはほとんど存在しない。一方、絶縁膜であるSiO2膜上へシリコン膜を成膜する際には所定のインキュベーションタイムが存在する。この状態で表面にハロゲン元素を含有する吸着層205が形成されると、シリコン膜上ではインキュベーションタイムがほとんど増加しないのに対し、SiO2膜上ではさらにインキュベーションタイムが増加する。
次に、本発明に係るシリコン膜の形成方法の第2の実施形態について、図7のフロー図および図8の工程断面図に基づいて説明する。
次に、本発明のシリコン膜の形成方法の実施に用いることができるシリコン膜の形成装置の一例について説明する。図9は、そのようなシリコン膜の形成装置の一例である成膜装置を示す縦断面図である。
(具体例1)
・絶縁膜:SiO2膜
・第1シリコン膜203(アモルファスシリコン)
ノンドープシリコン
シリコン原料ガス:SiH4
成膜温度:530℃
圧力:0.45Torr(60Pa)
・エッチング
エッチングガス:Cl2ガス
温度:350℃
圧力:0.15Torr(20Pa)
・第2シリコン膜204(アモルファスシリコン)
ボロンドープトシリコン
シリコン原料ガス:SiH4
ドープガス:BCl3
成膜温度:350℃
圧力:4.5Torr(600Pa)
(具体例2)
・絶縁膜:SiO2膜
・第1シリコン膜203(アモルファスシリコン)
ボロンドープトシリコン
シリコン原料ガス:SiH4
ドープガス:BCl3
成膜温度:350℃
圧力:4.5Torr(600Pa)
・エッチング
エッチングガス:Cl2ガス
温度:350℃
圧力:0.15Torr(20Pa)
・第2シリコン膜204(アモルファスシリコン)
ボロンドープトシリコン
シリコン原料ガス:SiH4
ドープガス:BCl3
成膜温度:350℃
圧力:4.5Torr(600Pa)
・シード層
シリコン原料ガス:Si2H6
形成温度:350℃
圧力:1Torr(133Pa)
次に実験例について説明する。
図10は実験例におけるサンプルウエハの各工程の断面を示すSEM写真である。
図10(a)は、Si基体上に形成されたSiO2膜に間口の幅が60nm、深さが230nmのトレンチが所定パターンで形成されたサンプルウエハに、シリコン原料としてSiH4ガスを用いて530℃でノンドープのアモルファスシリコン膜(a−Si膜)を60nmの厚さで埋め込んだ状態である。その後、Cl2ガスを用いて、350℃で150nmの深さでa−Si膜をエッチングした。そのときの状態が図10(b)である。ウエハの表面およびトレンチ上部の内壁面ではSiO2膜が露出している。その後、シリコン原料としてSiH4ガスを用い、不純物原料としてBCl3を用いて、350℃で30〜35nmの厚さのボロンドープトシリコン膜(B−Si膜)を成膜した。そのときの状態が図10(c)である。B−Si膜がa−Si膜の上にボトムアップ成長しており、ボイドのない健全な膜となっていることがわかる。このことから、本発明の手法は、微細凹部にボイドフリーでシリコン膜を埋め込む上で有効な手法であることが確認された。
以上、本発明の実施形態について説明したが、この発明は、上記の実施形態に限定されることはなく、その趣旨を逸脱しない範囲で種々変形可能である。
2;加熱炉
4;ヒータ
10;処理容器
20;ウエハボート
21;Si原料ガス供給機構
22;不純物含有ガス供給機構
23;ハロゲン含有エッチングガス供給機構
45;排気管
46;真空ポンプ
50;制御部
200;Si基体
201;絶縁膜
202;凹部(トレンチまたはホール)
203;第1シリコン膜
204;第2シリコン膜
205;吸着層
206;シード層
W;半導体ウエハ(被処理基板)
Claims (17)
- 凹部が形成された絶縁膜を表面に有する被処理基板に対し、前記凹部内にシリコン膜を形成するシリコン膜の形成方法であって、
(a)被処理基板にシリコン原料ガスを供給して前記凹部を埋め込むように第1シリコン膜を成膜する工程と、
(b)次いで、前記被処理基板にハロゲン含有エッチングガスを供給して、前記第1シリコン膜をエッチングし、前記被処理基板の表面および前記凹部の内壁上部の前記絶縁膜表面を露出させ、前記凹部内の底部に前記第1のシリコン膜を残存させる工程と、
(c)次いで、エッチング後の被処理基板にシリコン原料ガスを供給して、前記凹部内の底部に残存する前記第1シリコン膜上に第2シリコン膜をボトムアップ成長させる工程と
を有することを特徴とするシリコン膜の形成方法。 - 前記(b)工程により、露出した前記絶縁膜表面に、ハロゲン元素を含む吸着層が形成されることを特徴とする請求項1に記載のシリコン膜の形成方法。
- 前記(a)工程および前記(c)工程に用いる前記シリコン原料ガスは、シラン系化合物またはアミノシラン系化合物であることを特徴とする請求項1または請求項2に記載のシリコン膜の形成方法。
- 前記(a)工程に先立って行われる、(d)前記被処理基板にシリコン原料を供給して前記絶縁膜表面にシード層を形成する工程をさらに有することを特徴とする請求項1から請求項3のいずれか1項に記載のシリコン膜の形成方法。
- 前記(d)工程に用いる前記シリコン原料ガスは、高次シラン系化合物またはアミノシラン化合物であることを特徴とする請求項4に記載のシリコン膜の形成方法。
- 前記第1シリコン膜はノンドープシリコン膜またはドープトシリコン膜であり、前記第2シリコン膜はノンドープシリコン膜またはドープトシリコン膜であることを特徴とする請求項1から請求項5のいずれか1項に記載のシリコン膜の形成方法。
- 前記ドープトシリコン膜は、ボロンドープトシリコン膜であることを特徴とする請求項6に記載のシリコン膜の形成方法。
- 前記第1シリコン膜は、前記ノンドープシリコン膜であり、前記第2シリコン膜はボロンドープトシリコン膜であることを特徴とする請求項7に記載のシリコン膜の形成方法。
- 前記第1シリコン膜および前記第2シリコン膜はいずれもボロンドープトシリコン膜であることを特徴とする請求項7に記載のシリコン膜の形成方法。
- 前記ハロゲン含有エッチングガスは、Cl2、HCl、F2、Br2、HBrから選択されたガスであることを特徴とする請求項1から請求項9のいずれか1項に記載のシリコン膜の形成方法。
- 前記絶縁膜はSiO2膜であり、前記ハロゲン含有エッチングガスはCl2ガスであることを特徴とする請求項10に記載のシリコン膜の形成方法。
- 前記(b)工程および前記(c)工程を複数回繰り返すことを特徴とする請求項1から請求項11のいずれか1項に記載のシリコン膜の形成方法。
- 前記(a)工程および前記(c)工程は、300〜600℃の範囲の温度で行われることを特徴とする請求項1から請求項12のいずれか1項に記載のシリコン膜の形成方法。
- 前記(b)工程は、250〜500℃の範囲の温度で行われることを特徴とする請求項1から請求項13のいずれか1項に記載のシリコン膜の形成方法。
- 凹部が形成された絶縁膜を表面に有する被処理基板に対し、前記凹部内にシリコン膜を形成するシリコン膜の形成装置であって、
前記被処理基板を収容する処理容器と、
前記処理容器内に所定のガスを供給するガス供給部と、
前記処理容器内を加熱する加熱機構と、
前記処理容器内を排気して減圧状態とする排気機構と、
前記ガス供給部、前記加熱機構、および前記排気機構を制御する制御部と
を具備し、
前記制御部は、
前記排気機構により前記処理容器内を所定の減圧状態に制御し、前記加熱機構により前記処理容器内を所定温度に制御し、
前記ガス供給部から前記処理容器内にシリコン原料ガスを供給させて、前記凹部を埋め込むように第1シリコン膜を成膜させ、
次いで、前記ガス供給部から前記処理容器内にハロゲン含有エッチングガスを供給させ、前記第1シリコン膜をエッチングして、前記被処理基板の表面および前記凹部の内壁上部の前記絶縁膜表面を露出させ、前記凹部内の底部に前記第1のシリコン膜を残存させ、
次いで、エッチング後の被処理基板にシリコン原料ガスを供給して、前記凹部内の底部に残存する前記第1シリコン膜上に第2シリコン膜をボトムアップ成長させることを特徴とするシリコン膜の形成装置。 - 前記処理容器は、前記被処理基板が複数保持された基板保持具が収容され、複数の基板に対して処理が行われることを特徴とする請求項15に記載のシリコン膜の形成装置。
- コンピュータ上で動作し、シリコン膜の形成装置を制御するためのプログラムが記憶された記憶媒体であって、前記プログラムは、実行時に、請求項1から請求項14のいずれかのシリコン膜の形成方法が行われるように、コンピュータに前記シリコン膜の形成装置を制御させることを特徴とする記憶媒体。
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