JP7213801B2 - プリント回路基板を製造するための方法 - Google Patents

プリント回路基板を製造するための方法 Download PDF

Info

Publication number
JP7213801B2
JP7213801B2 JP2019520056A JP2019520056A JP7213801B2 JP 7213801 B2 JP7213801 B2 JP 7213801B2 JP 2019520056 A JP2019520056 A JP 2019520056A JP 2019520056 A JP2019520056 A JP 2019520056A JP 7213801 B2 JP7213801 B2 JP 7213801B2
Authority
JP
Japan
Prior art keywords
layer
copper
copper surface
coating layer
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019520056A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019530986A5 (enExample
JP2019530986A (ja
Inventor
ウォンジン・チョ
マルック・ラガー
ディルク・テウス
セドリック・リン
Original Assignee
アトテック ドイチェランド ゲーエムベーハー ウント コ カーゲー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アトテック ドイチェランド ゲーエムベーハー ウント コ カーゲー filed Critical アトテック ドイチェランド ゲーエムベーハー ウント コ カーゲー
Publication of JP2019530986A publication Critical patent/JP2019530986A/ja
Publication of JP2019530986A5 publication Critical patent/JP2019530986A5/ja
Application granted granted Critical
Publication of JP7213801B2 publication Critical patent/JP7213801B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/282Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/119Details of rigid insulating substrates therefor, e.g. three-dimensional details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452Solder masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/385Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by conversion of the surface of the metal, e.g. by oxidation, whether or not followed by reaction or removal of the converted layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/465Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer having channels for the next circuit layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0108Transparent
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0315Oxidising metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0571Dual purpose resist, e.g. etch resist used as solder resist, solder resist used as plating resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0591Organic non-polymeric coating, e.g. for inhibiting corrosion thereby preserving solderability
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08Treatments involving gases
    • H05K2203/086Using an inert gas
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1157Using means for chemical reduction
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/281Applying non-metallic protective coatings by means of a preformed insulating foil

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP2019520056A 2016-10-14 2017-10-12 プリント回路基板を製造するための方法 Active JP7213801B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16193971.5 2016-10-14
EP16193971.5A EP3310137B1 (en) 2016-10-14 2016-10-14 Method for manufacturing a printed circuit board
PCT/EP2017/076003 WO2018069421A1 (en) 2016-10-14 2017-10-12 Method for manufacturing a printed circuit board

Publications (3)

Publication Number Publication Date
JP2019530986A JP2019530986A (ja) 2019-10-24
JP2019530986A5 JP2019530986A5 (enExample) 2020-11-19
JP7213801B2 true JP7213801B2 (ja) 2023-01-27

Family

ID=57136780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019520056A Active JP7213801B2 (ja) 2016-10-14 2017-10-12 プリント回路基板を製造するための方法

Country Status (7)

Country Link
US (1) US10477700B2 (enExample)
EP (1) EP3310137B1 (enExample)
JP (1) JP7213801B2 (enExample)
KR (1) KR102413015B1 (enExample)
CN (1) CN109845415B (enExample)
TW (1) TWI669041B (enExample)
WO (1) WO2018069421A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11991835B2 (en) 2019-03-01 2024-05-21 Atotech Deutschland Gmbh Method for increasing adhesion strength between a metal and an organic material
CN110856348A (zh) * 2019-10-09 2020-02-28 广东利尔化学有限公司 一种用于pcb除胶后处理中和还原剂
CN110798980A (zh) * 2019-10-12 2020-02-14 西安金百泽电路科技有限公司 一种改善渗油及油墨入孔的方法
JP7474095B2 (ja) * 2020-03-31 2024-04-24 リンテック株式会社 接着シート、及び接着シートの使用方法
JP2021194831A (ja) * 2020-06-12 2021-12-27 Ckd株式会社 スクリーンマスク検査方法及びスクリーンマスク検査装置
US11388822B2 (en) 2020-08-28 2022-07-12 Applied Materials, Inc. Methods for improved polymer-copper adhesion
CN112577982A (zh) * 2020-12-09 2021-03-30 广州添利电子科技有限公司 一种pcb表面处理金属薄层质量分析方法
WO2022258726A1 (en) 2021-06-09 2022-12-15 Atotech Deutschland GmbH & Co. KG A composite and a method for manufacturing a composite of a copper layer and an organic layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004085803A (ja) 2002-08-26 2004-03-18 Nippon Steel Chem Co Ltd アルカリ現像型感光性樹脂組成物
WO2009125845A1 (ja) 2008-04-10 2009-10-15 ソニーケミカル&インフォメーションデバイス株式会社 フレキシブル配線板の製造方法
JP2010166099A (ja) 2010-04-30 2010-07-29 Ibiden Co Ltd プリント配線板及びプリント配線板の製造方法
JP2013537581A (ja) 2010-07-06 2013-10-03 アトテック ドイチェランド ゲーエムベーハー 金属表面を処理する方法と、この方法によって形成された装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4316087A1 (de) 1993-05-13 1994-11-17 Morton Int Inc Verfahren zum bildmäßigen Metallisieren von strukturierten Leiterplatten
WO2005101929A1 (en) * 2004-04-19 2005-10-27 Youngeun Electronics Co., Ltd Printed circuit board including track gap-filled resin and fabricating method thereof
EP2065927B1 (en) * 2007-11-27 2013-10-02 Imec Integration and manufacturing method of Cu germanide and Cu silicide as Cu capping layer
JP6030401B2 (ja) * 2012-10-12 2016-11-24 三井金属鉱業株式会社 表面処理銅箔の製造方法
EP2754732B1 (en) * 2013-01-15 2015-03-11 ATOTECH Deutschland GmbH Aqueous composition for etching of copper and copper alloys
KR101422262B1 (ko) * 2013-02-08 2014-07-24 와이엠티 주식회사 동박층이 형성된 기판과 인쇄회로기판의 제조방법 및 이에 의하여 제조된 인쇄회로기판
US9857687B2 (en) * 2013-02-28 2018-01-02 Tokai Shinei Electronics Inidustry Co., Ltd Method of manufacturing substrate and substrate and mask film
US9637271B2 (en) 2013-03-15 2017-05-02 Owens-Brockway Glass Container Inc. Container with a medal
CN103260361B (zh) * 2013-05-14 2016-07-06 金悦通电子(翁源)有限公司 一种hdi外层线路负片加工方法
CN104735899B (zh) * 2013-12-19 2017-08-22 鹏鼎控股(深圳)股份有限公司 可挠式电路板及其制作方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004085803A (ja) 2002-08-26 2004-03-18 Nippon Steel Chem Co Ltd アルカリ現像型感光性樹脂組成物
WO2009125845A1 (ja) 2008-04-10 2009-10-15 ソニーケミカル&インフォメーションデバイス株式会社 フレキシブル配線板の製造方法
JP2010166099A (ja) 2010-04-30 2010-07-29 Ibiden Co Ltd プリント配線板及びプリント配線板の製造方法
JP2013537581A (ja) 2010-07-06 2013-10-03 アトテック ドイチェランド ゲーエムベーハー 金属表面を処理する方法と、この方法によって形成された装置

Also Published As

Publication number Publication date
KR20190066041A (ko) 2019-06-12
CN109845415A (zh) 2019-06-04
TWI669041B (zh) 2019-08-11
WO2018069421A1 (en) 2018-04-19
JP2019530986A (ja) 2019-10-24
KR102413015B1 (ko) 2022-06-24
TW201831068A (zh) 2018-08-16
CN109845415B (zh) 2020-12-08
EP3310137A1 (en) 2018-04-18
US10477700B2 (en) 2019-11-12
EP3310137B1 (en) 2019-02-27
US20190297732A1 (en) 2019-09-26

Similar Documents

Publication Publication Date Title
JP7213801B2 (ja) プリント回路基板を製造するための方法
EP2259665B1 (en) Solution for surface treatment
EP2341167B1 (en) Method for surface treatment of copper and copper material
CN1255492C (zh) 助粘组合物、多层印刷电路板的制法和转涂的铜表面
WO1993010652A1 (en) Process for improved adhesion between a metallic oxide and a polymer surface
TWI436706B (zh) A method of manufacturing a printed wiring board, and a printed wiring board obtained from the manufacturing method
US11963308B2 (en) Method for increasing adhesion strength between a surface of copper or copper alloy and an organic layer
JP2005050999A (ja) 配線基板および配線の形成方法
JP2009173999A (ja) 耐熱エージング特性に優れた金属被覆ポリイミド樹脂基板の製造方法
JP2966678B2 (ja) 金属銅と樹脂の複合体の製造方法
EP0488299B1 (en) Method of manufacturing a multi-layered wiring board
TW202307270A (zh) 銅層與有機層之複合物及其製造方法
JP2024064977A (ja) プリント配線板の製造方法、プリント配線板及び半導体パッケージ
JP3761200B2 (ja) 配線板の製造方法
JPH0358496A (ja) 内層用回路板の製造方法
JP2005072483A (ja) プリント配線基板の製造方法
JP2005171318A (ja) プリント配線板とプリント配線板の製造方法
JPH0730248A (ja) 多層プリント配線板の製造方法
JPH05275853A (ja) 多層配線板の製造方法
JPH0456389A (ja) 内層用回路板の銅回路の処理方法
JP2007115966A (ja) 半導体素子搭載用パッケージ基板の製造方法
JPH06103793B2 (ja) 内層用回路板の銅回路の処理方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201009

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20201009

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20211027

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211101

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220201

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20220620

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221020

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20221020

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20221027

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20221031

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20221219

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230117

R150 Certificate of patent or registration of utility model

Ref document number: 7213801

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150