JP7131003B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7131003B2 JP7131003B2 JP2018049628A JP2018049628A JP7131003B2 JP 7131003 B2 JP7131003 B2 JP 7131003B2 JP 2018049628 A JP2018049628 A JP 2018049628A JP 2018049628 A JP2018049628 A JP 2018049628A JP 7131003 B2 JP7131003 B2 JP 7131003B2
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Description
特許文献1 特開2015-156489号公報
特許文献2 再公表2011-125156号公報
Claims (19)
- 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向において前記トランジスタ部を挟む2つのダイオード部と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する前記配列方向の両端において、前記半導体基板の下面に設けられた2つのコレクタ領域と、
前記両端に設けられた2つの前記コレクタ領域の間において前記配列方向の前記トランジスタ部の中央を含み、前記半導体基板の下面と接して設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記第1低注入領域の前記配列方向における幅は、前記第1低注入領域における前記配列方向のキャリア拡散長の2倍以下であり、
前記キャリア拡散長は、前記第1低注入領域における正孔の拡散係数Dとライフタイムτをかけた値の平方根(Dτ)^ 0.5 で算出される
半導体装置。 - それぞれの前記ダイオード部は、前記半導体基板の下面に設けられた第1導電型のカソード領域を有し、
前記トランジスタ部の前記コレクタ領域は前記カソード領域に接している
請求項1に記載の半導体装置。 - 前記第1低注入領域は、2つの前記コレクタ領域と接している
請求項1または2に記載の半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
を備え、
前記ダイオード部は、前記半導体基板の下面に設けられた第1導電型のカソード領域を有し、
前記トランジスタ部は、前記半導体基板の下面に設けられ、且つ、前記カソード領域と接する第2導電型の第1領域を有し、
前記カソード領域の上方および前記第1領域の上方に第2導電型の第2領域が設けられ、
前記第1領域は、前記カソード領域に接する両端よりも内側の一部において、上方に前記第2領域が設けられていない領域を有し、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられたコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記トランジスタ部において重なって設けられた前記第1領域および前記第2領域が前記コレクタ領域であり、前記第2領域が上方に設けられていない前記第1領域が前記第1低注入領域である
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
前記トランジスタ部と前記ダイオード部とが配置され、前記半導体基板の上面および下面の間で電流が流れる活性領域と、
前記半導体基板の上面視において、前記半導体基板の外周端と前記活性領域との間に設けられた外周領域と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられたコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
前記半導体基板の上面から前記半導体基板の内部まで設けられ、前記半導体基板の上面において前記配列方向に直交する延伸方向に延伸して設けられたゲートトレンチ部を有し、
前記第1低注入領域の一部は、前記半導体基板の上面視において前記ゲートトレンチ部と重なり、
前記トランジスタ部において、前記ゲートトレンチ部および前記半導体基板の上面に接して、前記延伸方向にエミッタ領域が複数設けられ、
前記半導体基板の上面視において、前記延伸方向における前記第1低注入領域の前記外周領域側の端部は、最も前記外周領域側に設けられる前記エミッタ領域から、前記延伸方向に沿って予め定められた距離を離間して配置され、
予め定められた前記距離は、前記第1低注入領域から注入されるキャリアの拡散長よりも小さい、
半導体装置。 - 前記ダイオード部は、前記配列方向に沿って前記トランジスタ部と交互に配列された、
請求項4または5に記載の半導体装置。 - 前記第1低注入領域は、前記配列方向における前記トランジスタ部の中央を含む
請求項4から6のいずれか一項に記載の半導体装置。 - 前記半導体基板の上面視において、前記延伸方向における前記第1低注入領域の前記外周領域側の端部は、前記外周領域に設けられる、請求項5に記載の半導体装置。
- 前記コレクタ領域が、前記延伸方向における前記第1低注入領域の前記外周領域側の端部から、前記外周領域まで、前記延伸方向に設けられる、
請求項5または8に記載の半導体装置。 - 前記配列方向に延伸し、前記活性領域に隣り合って設けられた第1ゲート金属層と、
前記配列方向に直交する延伸方向に延伸し、前記活性領域に隣り合って設けられ、前記第1ゲート金属層と接続された第2ゲート金属層と、
をさらに備え、
前記活性領域は、前記半導体基板の上面視で、前記配列方向において前記第2ゲート金属層と対抗し、且つ、前記配列方向に直交する延伸方向において前記第1ゲート金属層と対向する角部を有し、
前記トランジスタ部は、前記角部において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第2低注入領域をさらに有する、
請求項5、8および9のいずれか一項に記載の半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられたコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記配列方向において、前記第1低注入領域の幅は、トレンチピッチ以上前記トランジスタ部の幅の1/3以下である、
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられたコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記配列方向に、前記ダイオード部から前記トランジスタ部の一部にわたって設けられ、前記半導体基板の上面側に設けられた、ライフタイムキラーを含む上面側ライフタイム制御領域をさらに備え、
前記第1低注入領域は、前記半導体基板の上面視において、前記上面側ライフタイム制御領域と重ならない、
半導体装置。 - 前記第1低注入領域および前記コレクタ領域は第2導電型であり、
前記第1低注入領域のドーピング濃度を前記半導体基板の深さ方向に積分した積分濃度が、前記コレクタ領域のドーピング濃度を前記半導体基板の深さ方向に積分した積分濃度よりも低い、
請求項4から12のいずれか一項に記載の半導体装置。 - 前記第1低注入領域のドーピング濃度は、前記コレクタ領域のドーピング濃度よりも低い、請求項13に記載の半導体装置。
- 前記半導体基板の深さ方向において、前記第1低注入領域の厚さは、前記コレクタ領域の厚さよりも小さい、請求項13または14に記載の半導体装置。
- 前記第1低注入領域は、前記配列方向に、前記半導体基板の下面側に設けられた、ライフタイムキラーを含むライフタイム制御領域を含む、請求項4から15のいずれか一項に記載の半導体装置。
- 前記第1低注入領域の少なくとも一部は、前記コレクタ領域の導電型とは反対の導電型の注入抑止領域を含む、請求項4から16のいずれか一項に記載の半導体装置。
- 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられたコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記トランジスタ部は、前記配列方向に直交する延伸方向に複数配置され、
前記延伸方向における両端の前記トランジスタ部は、前記半導体基板の下面に設けられた前記コレクタ領域と前記第1低注入領域とを有し、
前記両端の前記トランジスタ部以外の前記トランジスタ部は、前記半導体基板の下面に設けられた前記コレクタ領域を有し、前記半導体基板の下面に前記第1低注入領域を有さない、
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部に隣接するダイオード部と、
を備え、
前記トランジスタ部は、
前記ダイオード部に隣接する両端において、前記半導体基板の下面に設けられた、第2導電型のコレクタ領域と、
前記両端よりも内側において、前記半導体基板の下面側に設けられ、前記半導体基板の下面側から上面側へのキャリア注入密度が前記コレクタ領域よりも低い第1低注入領域と、
を有し、
前記第1低注入領域は、
前記半導体基板の下面において前記コレクタ領域よりも内側に設けられ、前記コレクタ領域よりもドーピング濃度が低い第2導電型の第1領域と、
前記半導体基板の下面において前記第1領域に挟まれた第1導電型の注入抑止領域と
を含む
半導体装置。
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JP6992895B2 (ja) * | 2018-06-21 | 2022-01-13 | 富士電機株式会社 | 半導体装置および製造方法 |
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